Musainzi yezvinhu uye mainjiniya, nyaya yekupenda zvidimbu zvemafirimu matete ine basa guru mumaindasitiri akasiyana-siyana kubva pamagetsi kusvika pakugadzira zvinhu zvepamusoro. Pakati pematekinoroji akasiyana aripo, kuputika kwemafuta emuviri (PVD) kwave nzira itsva uye inoshanda yekuisa mafirimu matete pazvigadziko. Chinyorwa chino chichaongorora nyika yekuputika kwePVD, ichikurukura mashandisirwo ayo, mabhenefiti ayo uye kuvandudzwa kwazvino. Kuputika kwePVD, kunozivikanwawo semagnetron sputtering, inzira inoshandiswa zvakanyanya muindasitiri yesemiconductor kuisa mafirimu matete pazvigadziko. Izvi zvinosanganisira kushandisa plasma kubvisa maatomu kubva pane chimwe chinhu, icho chinozoiswa pazvigadziko, zvichigadzira firimu diki.
Maitiro aya ane mabhenefiti akawanda, akadai sekudzora ukobvu hwefirimu nemazvo, kunamira kwakanaka, uye kugona kuisa zvinhu zvakasiyana-siyana zvinosanganisira simbi, maokisi, uye nitrides. Mashandisirwo ePVD sputtering akasiyana-siyana. Muindasitiri yezvemagetsi, inowanzo shandiswa kuisa zvinhu zvinofambisa mhepo zvakaita sealuminium nemhangura, zvichigonesa kugadzirwa kwezvikamu zvidiki uye maseketi akabatanidzwa. Pamusoro pezvo, PVD sputtering inoshandiswa zvakanyanya muindasitiri ye optical coating, senge anti-reflective coatings pamalenzi nemagirazi kuti iwedzere kushanda kwechiedza. Kufambira mberi kwazvino muPVD sputtering tekinoroji kuri kuita kuti iwedzere kufarirwa. Chimwe chinhu chakakosha ndechekuunzwa kwe reactive sputtering, iyo inogona kuisa mafirimu matete emakomponi ane hunhu hwakawedzerwa. Nekuisa reactive gases mu vacuum chamber panguva yekuisa, vagadziri vanogona kudzora kuumbwa uye stoichiometry yemafirimu akaiswa, zvichipa mashandiro akanaka uye mashandiro.
Pamusoro pezvo, hunyanzvi hutsva hwakawedzera kugona kwePVD sputtering. Semuenzaniso, kushandisa zvinhu zvakasiyana-siyana zvinogona kuisa mafirimu matete ane hunyanzvi hwakasiyana. Izvi zvinovhura mukana wekugadzirwa kwezvinhu zvitsva zvemagetsi epamusoro, kuchengetedza simba uye zvishandiso zvekurapa. Muchidimbu, PVD sputtering inzira ine simba yekuvhara firimu matete ine mashandisirwo akasiyana-siyana uye kufambira mberi munguva pfupi yapfuura. Nekudzora kwakaringana pamusoro pekuisa firimu matete uye kuenderana nezvinhu zvakasiyana-siyana, yave chinhu chikuru mumaindasitiri akadai semagetsi nemaziso. Kutsvagurudza kuri kuenderera mberi uye hunyanzvi mumunda wePVD sputtering kunotarisirwa kuwedzera kugona kwayo, zvichigonesa kugadzirwa kwezvinhu zvitsva uye kusundira miganhu yekufambira mberi kwetekinoroji.
–Chinyorwa ichi chakaburitswa namugadziri wemuchina wevacuum coatingZhenhua Vacuum.
Nguva yekutumira: Chivabvu-27-2025