Saenseng ea thepa le boenjiniere, tšimo ea liaparo tse tšesaane tsa filimi e bapala karolo ea bohlokoa liindastering tse tlohang ho tsa elektroniki ho ea tlhahisong e tsoetseng pele. Har'a mahlale a fapaneng a fumanehang, ho sputtering ea physical vapor deposition (PVD) ho hlahile e le mokhoa o mocha le o sebetsang oa ho beha lifilimi tse tšesaane holim'a li-substrate. Sengoloa sena se tla kenella lefats'eng la ho sputtering ea PVD, se tšohla lits'ebetso tsa sona, melemo le nts'etsopele ea morao-rao. Ho sputtering ea PVD, e tsejoang hape e le magnetron sputtering, ke mokhoa o sebelisoang haholo indastering ea semiconductor ho beha lifilimi tse tšesaane holim'a li-wafer. E kenyelletsa ho sebelisa plasma ho tlosa liathomo ho tsoa thepa e reriloeng, ebe e kenngoa holim'a substrate, e etsa filimi e tšesaane.
Ts'ebetso ena e fana ka melemo e mengata, joalo ka taolo e nepahetseng ea botenya ba filimi, ho khomarela ho hoholo, le bokhoni ba ho kenya thepa e fapaneng ho kenyeletsoa le litšepe, li-oxide le li-nitride. Ts'ebeliso ea ho phunya ha PVD e pharaletse ebile e fapane. Indastering ea lisebelisoa tsa elektroniki, e sebelisoa hangata ho kenya thepa e tsamaisang motlakase joalo ka aluminium le koporo, e nolofalletsang tlhahiso ea likarolo tse nyane le lipotoloho tse kopaneng. Ho phaella moo, ho phunya ha PVD ho sebelisoa haholo indastering ea ho roala ea optical, joalo ka ho roala ho thibelang ho bonahatsa lilenseng le liiponeng ho ntlafatsa ts'ebetso ea phetisetso ea leseli. Tsoelo-pele ea morao tjena theknolojing ea ho phunya ha PVD e etsa hore e ratoe le ho feta. Nts'etsopele e hlokomelehang ke ho kenyelletsoa ha ho phunya ha motlakase ho arabelang, ho ka kenyang lifilimi tse tšesaane tsa metsoako e nang le thepa e ntlafalitsoeng. Ka ho kenya likhase tse arabelang ka phapusing ea vacuum nakong ea ho beha, bahlahisi ba ka laola sebopeho le stoichiometry ea lifilimi tse behiloeng, ho fana ka ts'ebetso e ntlafetseng le ts'ebetso.
Ho phaella moo, boqapi ba sepheo bo atolositse bokgoni ba ho phunya ha PVD. Mohlala, ho sebedisa dipheo tse kopaneng tse nang le thepa e mengata ho ka beha difilimi tse tshesane tse ikgethang haholo tse nang le thepa e ikgethang. Sena se bula monyako wa ntshetsopele ya thepa e ntjha bakeng sa disebediswa tsa elektroniki tse tswetseng pele, polokelo ya matla le disebediswa tsa bongaka. Ka bokhutšoanyane, ho phunya ha PVD ke mokgwa o matla wa ho kwahela filimi e tshesane o nang le mefuta e mengata ya ditshebediso le kgatelopele ya moraorao. Ka taolo e nepahetseng hodima ho bewa ha filimi e tshesane le ho tsamaellana le disebediswa tse fapaneng, e se e le ntho ya bohlokwa diindastering tse kang di-elektroniki le di-optics. Diphuputso tse tswelang pele le boqapi lefapheng la ho phunya ha PVD ho lebelletswe ho ntlafatsa bokgoni ba yona haholo, ho nolofalletsa ho thehwa ha disebediswa tse ntjha le ho sutumelletsa meedi ya kgatelopele ya theknoloji.
–Sengoloa sena se lokollotsoe kemoetsi oa mochini oa ho roala ka vacuum cleanerMochini o hloekisang oa Zhenhua.
Nako ea poso: Mots'eanong-27-2025