Kwisayensi yezinto kunye nobunjineli, intsimi yeengubo zefilimu ezincinci idlala indima ebalulekileyo kumashishini aqala kwi-elektroniki ukuya kwimveliso ephucukileyo. Phakathi kwezobuchwepheshe ezahlukeneyo ezikhoyo, ukutshiza nge-physical vapor deposition (PVD) kuye kwavela njengendlela entsha nesebenzayo yokufaka iifilimu ezincinci kwi-substrates. Eli nqaku liza kujonga kwihlabathi lokutshiza nge-PVD, lixoxa ngezicelo zalo, iingenelo kunye nophuhliso lwamva nje. Ukutshiza nge-PVD, okwaziwa ngokuba yi-magnetron sputtering, yindlela esetyenziswa kakhulu kushishino lwe-semiconductor ukufaka iifilimu ezincinci kwi-wafers. Kubandakanya ukusebenzisa i-plasma ukususa ii-athomu kwizinto ekujoliswe kuzo, ezithi emva koko zifakwe kwi-substrate, zenze ifilimu encinci.
Le nkqubo inika iingenelo ezininzi, ezinje ngokulawula ngokuchanekileyo ubukhulu befilimu, ukunamathela okugqwesileyo, kunye nokukwazi ukufaka izinto ezahlukeneyo kuquka iintsimbi, ii-oxides, kunye nee-nitrides. Ukusetyenziswa kwe-PVD sputtering kubanzi kwaye kwahlukile. Kwishishini le-elektroniki, isetyenziswa kakhulu ukufaka izinto eziqhubayo ezifana ne-aluminium kunye nobhedu, okuvumela ukuveliswa kwezinto ezincinci kunye neesekethe ezidibeneyo. Ukongeza, i-PVD sputtering isetyenziswa kakhulu kwishishini le-optical coating, njenge-anti-reflective coatings kwi-lens nakwizipili ukuphucula ukusebenza kokuhambisa ukukhanya. Inkqubela phambili yakutshanje kwi-PVD sputtering technology iyenza ithandwe ngakumbi nangakumbi. Uphuhliso oluphawulekayo kukungeniswa kwe-reactive sputtering, enokufaka iifilimu ezincinci zeekhompawundi ezineempawu eziphuculweyo. Ngokungenisa iigesi eziphendulayo kwigumbi le-vacuum ngexesha lokufakwa, abavelisi banokulawula ukwakheka kunye ne-stoichiometry yeefilimu ezifakiweyo, ukubonelela ngokusebenza okuphuculweyo kunye nokusebenza.
Ukongeza, izinto ezintsha ekujoliswe kuzo zandise amandla okutshiza nge-PVD. Umzekelo, ukusebenzisa iithagethi ezidityanisiweyo eziquka izinto ezininzi kunokubeka iifilimu ezincinci ezikhethekileyo ezineempawu ezikhethekileyo. Oku kuvula ucango lokuphuhliswa kwezinto ezintsha ze-elektroniki eziphambili, ukugcinwa kwamandla kunye nezixhobo ze-biomedical. Ngamafutshane, ukutshiza nge-PVD yindlela enamandla yokugquma ifilimu encinci enoluhlu olubanzi lwezicelo kunye nophuhliso lwakutshanje. Ngolawulo oluchanekileyo lokufakwa kwefilimu encinci kunye nokuhambelana nezixhobo ezahlukeneyo, kuye kwaba yinto eqhelekileyo kumashishini afana ne-elektroniki kunye ne-optics. Uphando oluqhubekayo kunye nophuhliso kwicandelo lokutshiza nge-PVD kulindeleke ukuba luphucule ngakumbi amandla alo, luvumele ukudalwa kwezinto ezintsha kwaye lutyhale imida yokuqhubela phambili kwezobuchwepheshe.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumI-Vacuum yaseZhenhua.
Ixesha leposi: Meyi-27-2025