Kusayensi yezinto zokwakha kanye nobunjiniyela, inkambu yezingubo zefilimu ezacile idlala indima ebalulekile ezimbonini kusukela kwezobuchwepheshe kuya ekukhiqizeni okuthuthukile. Phakathi kobuchwepheshe obuhlukahlukene obukhona, ukuphalaza kwe-physical vapor deposition (PVD) kuye kwavela njengendlela emisha nephumelelayo yokufaka amafilimu amancane kuma-substrates. Lesi sihloko sizongena emhlabeni we-PVD sputtering, sidingida izinhlelo zokusebenza zayo, izinzuzo kanye nentuthuko yakamuva. I-PVD sputtering, eyaziwa nangokuthi i-magnetron sputtering, iyindlela esetshenziswa kabanzi embonini ye-semiconductor ukufaka amafilimu amancanyana kumawafa. Kuhilela ukusebenzisa i-plasma ukuze kukhishwe ama-athomu entweni eqondiwe, bese ifakwa ku-substrate, yakhe ifilimu elincanyana.
Le nqubo inikeza izinzuzo eziningi, njengokulawula okunembile kogqinsi lwefilimu, ukunamathela okuhle kakhulu, kanye nekhono lokubeka izinto ezihlukahlukene ezihlanganisa izinsimbi, ama-oxides, nama-nitride. Ukusetshenziswa kwe-PVD sputtering kubanzi futhi kuhlukahlukene. Embonini ye-elekthronikhi, ijwayele ukusetshenziselwa ukufaka izinto zokuqhuba ezifana ne-aluminium nethusi, okuvumela ukukhiqizwa kwezingxenye ezincane namasekhethi ahlanganisiwe. Ngaphezu kwalokho, i-PVD sputtering isetshenziswa kakhulu embonini yokuhlanganisa i-optical coating, njenge-anti-reflective coatings kumalensi nezibuko ukuze kuthuthukiswe ukusebenza kokudlulisa ukukhanya. Intuthuko yakamuva kubuchwepheshe be-PVD sputtering iyenza idume kakhulu. Intuthuko ephawulekayo ukwethulwa kwe-sputtering esebenzayo, engafaka amafilimu amancanyana ezinhlanganisela ezinezakhiwo ezithuthukisiwe. Ngokwethula amagesi asebenzayo ekamelweni le-vacuum ngesikhathi sokufakwa, abakhiqizi bangakwazi ukulawula ukubunjwa kanye ne-stoichiometry yamafilimu afakiwe, banikeze ukusebenza okuthuthukisiwe nokusebenza.
Ukwengeza, amasu amasha okuhlosiwe akhulise amandla e-PVD sputtering. Isibonelo, ukusebenzisa okuhlosiwe okuyinhlanganisela okuhlanganisa izinto eziningi kungafaka amafilimu amancane akhethekile anezakhiwo ezihlukile. Lokhu kuvula umnyango wokuthuthukiswa kwezinto ezintsha zama-electronics athuthukile, ukugcinwa kwamandla kanye namadivayisi we-biomedical. Kafushane, i-PVD sputtering iyindlela enamandla yokuhlanganisa ifilimu emincane enezinhlobonhlobo zezinhlelo zokusebenza nentuthuko yakamuva. Ngokulawula okunembile kokumiswa kwefilimu emincane kanye nokuhambisana nezinto ezihlukahlukene, isiphenduke isisekelo ezimbonini ezifana ne-electronics kanye ne-optics. Ucwaningo oluqhubekayo kanye nokuqanjwa okusha emkhakheni we-PVD sputtering kulindeleke ukuthi kuthuthukise amakhono ayo, kuvumele ukwakhiwa kwezinto ezintsha kanye nokuphusha imingcele yentuthuko yezobuchwepheshe.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Vacuum ye-Zhenhua.
Isikhathi sokuthumela: May-27-2025