Ekukhiqizweni kwe-vacuum coating yesimanje, izimo zokusebenza ezithwala umthwalo omningi ziletha izinselele ezinkulu ekuzinzeni nasekuhambisaneni kokufakwa kwefilimu encane. Njengoba izidingo zokukhiqiza okuphezulu, ubukhulu obukhulu be-substrate, kanye nokugqoka okuyinkimbinkimbi okunezingqimba eziningi kukhuphuka, izinhlelo zokugqoka ze-vacuum—kungakhathaliseki ukuthiI-PVD, i-magnetron sputtering,I-ALD, noma i-PECVD—kumele igcine ukulawula okunembile kwamapharamitha enqubo ukuqinisekisa ukufana kwefilimu, ukukhiqizwa kabusha, kanye nokuthembeka kwemishini iyonke.
Izimo zomthwalo ophezulu zibeka ukucindezeleka okukhulu kumaphampu e-vacuum, izinsiza zikagesi, kanye nemithombo yokufaka. Ukugcina indawo ye-vacuum ephezulu kakhulu kubalulekile, njengoba noma yikuphi ukuhlukahluka kokucindezela kwesisekelo kungathinta ngqo amazinga e-sputter, ukuzinza kwe-plasma, kanye nokusebenzisana kwesigaba segesi, ekugcineni kuthinte ubuningi befilimu, inkomba yokubuyisa, kanye nokunamathela. Izinhlelo zokupompa ze-vacuum ezithuthukisiwe, kufaka phakathi amaphampu e-turbomolecular kanye ne-cryogenic, ngakho-ke zihlanganiswe nokuqapha kwesikhathi sangempela kanye nokulawula impendulo ukuze kulungiswe ukushintshashintsha komthwalo wegesi okubangelwa yivolumu enkulu ye-substrate noma ukwethulwa kwegesi esabelayo ngesikhathi sezinqubo zokuphuma okuphezulu.
Ukuzinza kokulethwa kwamandla kubaluleke ngokulinganayo ngaphansi kokusebenza komthwalo ophezulu. Izinqubo ze-Magnetron sputtering kanye ne-electron beam PVD zidinga ubuningi bamandla obuhambisanayo ukuze kugcinwe i-plasma efanayo kanye namazinga okuguguleka okuqondiwe okuzinzile. Ukuguquguquka kwamandla kagesi noma kwamanje kungaholela ekufakweni kwe-arcing, i-arcing, kanye nobuthi obuqondiwe okungebona obufanayo, okuphazamisa izakhiwo ze-optical neze-mechanical zefilimu. Ukuze kuncishiswe lezi zingozi, imigqa yokumboza enamandla isebenzisa izinsiza zamandla ezilawulwa ngedijithali ngokutholwa kwe-arc kanye nokucindezelwa, ukuguqulwa kwe-pulsed DC noma i-RF, kanye nokuqapha ngesikhathi sangempela kwamapharamitha e-target kanye ne-substrate.
Ukuphathwa kokushisa kungenye into ebalulekile. Ukufakwa kwe-coating okukhulu noma okuphezulu kukhiqiza ukushisa okukhulu kuzo zombili izinhloso kanye nezingxenye ezingaphansi komhlaba, okungadala ukucindezeleka kwefilimu, ukugoba kwezingxenye ezingaphansi komhlaba, kanye nokukhubazeka kwesakhiwo. Ukupholisa okusebenzayo kwezinhloso, izibambi zezingxenye ezingaphansi komhlaba, kanye nezindonga zegumbi, kuhlanganiswe nokuhlolwa okunembile kokushisa kanye nokuqapha, kuqinisekisa ukusatshalaliswa kwamandla okufanayo, kunciphisa ukucindezeleka okusele, futhi kugcina isakhiwo sefilimu esiphindaphindwayo kuzo zonke izindlela eziningi.
Ukuzenzakalela kwenqubo kanye nezinhlelo zokuxilonga ezisendaweni kubalulekile ekugcineni ukusebenza okuzinzile. Ukuqapha ngesikhathi sangempela izici ze-plasma, amazinga okufakwa, kanye nokufana kobukhulu kuvumela uhlelo ukuthi lulungise amapharamitha ngokuguquguqukayo, okuhlanganisa ukugeleza kwegesi, ukuguqulwa kwamandla, kanye nokujikeleza kwe-substrate, ukuze kulungiswe ukushintshashintsha okubangelwa izimo zomthwalo ophezulu. Ukulawulwa okunjalo kwe-closed-loop kuvimbela amaphutha aqongelelekayo emijikelezweni emide yokukhiqiza futhi kuqinisekisa ukumbozwa kwekhwalithi ephezulu, okuphindaphindwayo.
Ukuphathwa kwezinto nakho kudlala indima ebalulekile. Amaqoqo amakhulu e-substrate noma ama-targets asindayo andisa umthwalo wemishini kuma-manipulators nama-conveyor, okudinga ukulawulwa kokunyakaza okuqinile kanye nokuqondana okunembile ukuze kugwenywe ukungafaneli kokubekwa. Ukuhlanganiswa kwezinhlelo zomthwalo/zokukhulula ezizenzakalelayo kanye nezingalo zerobhothi ezinembayo ephezulu kunciphisa ukungenelela kwabantu, kunciphisa ingozi yokungcola, futhi kugcina ukuhambisana kwenqubo ngaphansi kwezimo zokusebenza ezidinga amandla.
Ekuphetheni, ukugcina ukusebenza okuzinzile kwemishini yokumboza nge-vacuum ngaphansi kwezimo zomthwalo ophezulu kudinga indlela ehlanganisiwe, ehlanganisa ubuchwepheshe obuthuthukisiwe be-vacuum, ukulawulwa kwamandla okunembile, ukuphathwa kokushisa okusebenzayo, ukuxilongwa kwenqubo ngesikhathi sangempela, kanye nokuphathwa kwezinto ngokuzenzakalela. Ngokwenza lezi zici zibe ngcono, izinhlelo zokumboza zingaletha amafilimu amancane afanayo, asezingeni eliphezulu ngisho nasezindaweni zokukhiqiza eziyinselele, zisekela ukukhiqizwa komkhiqizo ophezulu ngenkathi kuqinisekiswa ukuthembeka, ukukhiqizwa kabusha, kanye nokusebenza kahle kwenqubo.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuum I-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Mashi-06-2026