Tlhahisong ea sejoale-joale ea ho koahela ka vacuum, maemo a ts'ebetso a boima bo phahameng a hlahisa liphephetso tse kholo botsitsong le botsitsong ba ho beoa ha filimi e tšesaane. Ha litlhoko tsa tlhahiso e phahameng, boholo bo boholo ba substrate, le liphahlo tse rarahaneng tsa mekhahlelo e mengata li ntse li eketseha, litsamaiso tsa ho koahela ka vacuum—ebang kePVD, ho phunya ha magnetron,ALD, kapa PECVD—e tlameha ho boloka taolo e nepahetseng hodima diparamente tsa tshebetso ho netefatsa hore filimi e a tshwana, e kgona ho ikatisa hape, le ho tshepahala ha disebediswa ka kakaretso.
Maemo a mojaro o phahameng a beha kgatello e kgolo hodima dipompo tsa vacuum, phepelo ya motlakase, le mehlodi ya ho bea dintho. Ho boloka tikoloho ya vacuum e phahameng haholo ho bohlokwa, kaha phapang efe kapa efe kgatellong ya motheo e ka ama ka ho toba ditefello tsa sputter, botsitso ba plasma, le dikamano tsa kgase, qetellong di ama bongata ba filimi, index ya refractive, le kgomarelo. Ditsamaiso tse tswetseng pele tsa ho pompa vacuum, ho kenyeletswa dipompo tsa turbomolecular le cryogenic, ka hona di kopantswe le tlhokomelo ya nako ya sebele le taolo ya maikutlo ho lefella diphetoho tsa mojaro wa kgase tse bakwang ke bongata bo boholo ba substrate kapa tlhahiso ya kgase e arabelang nakong ya ditshebetso tse phahameng tsa ho ntsha metsi.
Botsitso ba ho fana ka motlakase bo bohlokoa ka ho lekana tlas'a ts'ebetso ea mojaro o moholo. Ts'ebetso ea magnetron sputtering le electron beam PVD li hloka matla a tsitsitseng a ho boloka plasma e ts'oanang le sekhahla se tsitsitseng sa khoholeho ea sepheo. Liphetoho tsa motlakase kapa tsa hona joale li ka lebisa ho deposition e sa ts'oanang, arcing, le chefo ea sepheo, e leng se behang thepa ea optical le ea mechini kotsing. Ho fokotsa likotsi tsena, mela e mengata ea ho roala e sebelisa mehloli ea motlakase e laoloang ka dijithale ka ho lemoha le ho hatella arc, pulsed DC kapa RF modulation, le ho beha leihlo ka nako ea sebele ea liparamente tsa sepheo le substrate.
Taolo ea mocheso ke ntlha e 'ngoe ea bohlokoa. Ho matha ha lipeipi tse kholo kapa tse teteaneng haholo ho hlahisa mocheso o moholo ho lipheo le li-substrate, e leng se ka bakang khatello ea filimi, ho sotha ha substrate, le liphoso tsa sebopeho. Ho pholisa ka mafolofolo ha lipheo, li-substrate tse tšoereng substrate, le mabota a kamore, hammoho le profiling e nepahetseng ea mocheso le tlhokomelo, ho netefatsa kabo e ts'oanang ea matla, ho fokotsa khatello e setseng, le ho boloka sebopeho sa filimi se ka ikatisang hape ho pholletsa le lipeipi tse ngata.
Boiketsetso ba ts'ebetso le litsamaiso tsa tlhahlobo ea kahare ho sebaka ke tsa bohlokoa ho etseng hore ts'ebetso e tsitse. Tlhokomelo ea nako ea sebele ea litšobotsi tsa plasma, sekhahla sa ho beoa ha lintho, le ho tšoana ha botenya li lumella sistimi ho fetola liparamente ka mokhoa o feto-fetohang, ho kenyeletsoa phallo ea khase, phetoho ea matla, le potoloho ea substrate, ho lefella liphetoho tse bakoang ke maemo a mojaro o phahameng. Taolo e joalo ea selika-likoe e thibela liphoso tse bokellaneng nakong ea potoloho e telele ea tlhahiso 'me e netefatsa hore ho na le liphahlo tsa boleng bo holimo, tse ka phetoang.
Ho sebetsana le thepa le hona ho bapala karolo ea bohlokoa. Lihlopha tse kholo tsa substrate kapa lipheo tse boima li eketsa moroalo oa mechini ho li-manipulator le li-conveyor, e leng se hlokang taolo e matla ea motsamao le ho otlolla ka nepo ho qoba ho se lumellane ha ho beoa. Ho kopanngoa ha litsamaiso tsa mojaro/ho lahlela thepa ka boiketsetso le matsoho a roboto a nepahetseng haholo ho fokotsa ho kenella ha batho, ho fokotsa kotsi ea tšilafalo, le ho boloka ts'ebetso e tsitsitse tlas'a maemo a thata a ts'ebetso.
Qetellong, ho boloka ts'ebetso e tsitsitseng ea lisebelisoa tsa ho roala ka vacuum tlas'a maemo a mojaro o phahameng ho hloka mokhoa o kopaneng, o kopanyang theknoloji e tsoetseng pele ea ho roala ka vacuum, taolo ea matla a nepahetseng, tsamaiso e mafolofolo ea mocheso, tlhahlobo ea ts'ebetso ea nako ea sebele, le ts'ebetso ea thepa e iketsang. Ka ho ntlafatsa lintlha tsena, litsamaiso tsa ho roala li ka fana ka lifilimi tse tšesaane tse tšoanang, tsa boleng bo holimo esita le libakeng tse thata tsa tlhahiso, li tšehetsa tlhahiso ea tlhahiso e phahameng ha li ntse li netefatsa ho tšepahala, ho ikatisa hape le katleho ea ts'ebetso.
-Sengoloa sena se phatlalalitsoe kemoetsi oa lisebelisoa tsa ho roala ka vacuum Letsoho la Zhenhua
Nako ea poso: Hlakubele-06-2026