Mukugadzirwa kwevacuum coating yemazuva ano, mamiriro ekushanda ane mutoro wakawanda anounza matambudziko makuru pakugadzikana uye kugara kwenguva refu kwefirimu diki. Sezvo kudiwa kwemuchina wakawanda, saizi huru dzesubstrate, uye machira akawanda akaomarara achiwedzera, masisitimu evacuum coating—zvisinei nekutiPVD, magnetron sputtering,ALD, kana PECVD—inofanira kuchengetedza kutonga kwakarurama pamusoro pemagadzirirwo ebasa kuti ive nechokwadi chekuti firimu rakaenzana, rinodzokororwa, uye rakavimbika mumidziyo yese.
Mamiriro ezvinhu ane mutoro wakawanda anoisa kushushikana kukuru pamapombi evacuum, magetsi, uye masosi ekuisa. Kuchengetedza nzvimbo ine vacuum yakakwira zvakanyanya kwakakosha, sezvo chero shanduko musimba rebase inogona kukanganisa zvakananga mwero wesputter, kugadzikana kweplasma, uye kusangana kwegasi-phase, zvichizokanganisa huwandu hwefirimu, refractive index, uye adhesion. Masisitimu epamusoro evacuum pumping, anosanganisira turbomolecular uye cryogenic pumps, saka akabatanidzwa nekutarisa kwenguva chaiyo uye kudzora mhinduro kuti atsive kuchinja kwegasi kunokonzerwa nehuwandu hwakawanda hwe substrate kana reactive gas introducing panguva ye high-throughput processes.
Kugadzikana kwekupa simba kwakakoshawo kana paine mutoro wakawanda. Maitiro eMagnetron sputtering uye maerekitironi ePVD anoda simba rakafanana kuti arambe aine plasma yakafanana uye mwero wakasimba wekudonha kwechinangwa. Kuchinja-chinja kwevoltage kana current kunogona kutungamira mukusaiswa kwesimba, arcing, uye chepfu yechinangwa, izvo zvinokanganisa hunyanzvi hwemafirimu nehunyanzvi hwemakanika. Kuderedza njodzi idzi, mitsetse ye coating ine mutoro wakawanda inoshandisa magetsi anodzorwa nedhijitari nekuona uye kudzvinyirira arc, pulsed DC kana RF modulation, uye kutarisa nguva chaiyo kwetarget ne substrate parameters.
Kutarisira kupisa chimwe chinhu chakakosha. Kufamba kwepurasitiki yakakura kana kuti yakakwira kunounza kupisa kwakakosha pazvibodzwa nezvikamu, izvo zvinogona kukonzera kushushikana kwefirimu, kupwanyika kwezvikamu, uye zvikanganiso zve microstructure. Kutonhodza kwezvibodzwa, zvinobata zvikamu, uye madziro emakamuri, pamwe chete nekutarisa tembiricha nemazvo, zvinoita kuti simba riparadzirwe zvakaenzana, kunoderedza kushushikana kwasara, uye kuchengetedza chimiro chefirimu chinogona kudzokororwazve pakufamba kwakasiyana-siyana.
Maitiro ekugadzirisa otomatiki uye masisitimu ekuongorora ari mukati mechinhu ndiwo musimboti wekuchengetedza kushanda kwakasimba. Kutarisa hunhu hweplasma panguva chaiyo, mwero wekuisa zvinhu, uye kufanana kweukobvu kunobvumira sisitimu kugadzirisa maparamita nenzira inochinja-chinja, kusanganisira kuyerera kwegasi, modulation yesimba, uye kutenderera kwesubstrate, kuti itsigire shanduko dzinokonzerwa nemamiriro ezvinhu ane mutoro wakawanda. Kudzora kwakadaro kweclosed-loop kunodzivirira zvikanganiso zvinounganidzwa panguva refu yekugadzira uye kunoita kuti machira emhando yepamusoro uye anodzokororwa.
Kubata zvinhu kunoitawo basa guru. Mabheti makuru e substrate kana kuti zvinangwa zvinorema zvinowedzera mutoro wemakanika pa manipulators nema conveyors, zvichida kudzora kufamba kwakasimba uye kurongeka kwakanyatsonaka kudzivirira kusafanana kwekuisa zvinhu. Kubatanidzwa kwema automated load/unload systems uye ma robotic arms akanyatsogadzirwa kunoderedza kupindira kwevanhu, kunoderedza njodzi yekusvibiswa, uye kuchengetedza maitiro akafanana mumamiriro ezvinhu akaomarara ekushanda.
Mukupedzisa, kuchengetedza kushanda kwakasimba kwemidziyo yekuputira vacuum pasi pemamiriro ezvinhu ane mutoro wakawanda kunoda nzira yakabatana, kusanganisa tekinoroji yepamusoro yekubvisa vacuum, kutonga kwesimba kwakaringana, manejimendi yekupisa inoshanda, kuongororwa kwemaitiro panguva chaiyo, uye kubata zvinhu otomatiki. Nekugadzirisa zvinhu izvi, masisitimu ekuputira anogona kupa mafirimu matete akafanana, emhando yepamusoro kunyangwe munzvimbo dzakaoma dzekugadzira, achitsigira kugadzirwa kwepamusoro-soro uku achivimbisa kuvimbika, kudzokororwa, uye kushanda zvakanaka kwemaitiro.
-Chinyorwa ichi chakabudiswa namugadziri wemidziyo yekuputira vacuum Zhenhua Vacuum
Nguva yekutumira: Kurume-06-2026