Mu ikorwa rya none ry’imyenda ikoze mu buryo bwa “vacuum cover”, imikorere ikora mu buryo buhanitse itera imbogamizi zikomeye ku buryo icyuma gifunga ...PVD, magnetron sputtering,ALD, cyangwa PECVD—igomba kugenzura neza ibipimo by'imikorere kugira ngo filime ihuze, ikoreshwe neza, kandi ikoreshwe neza muri rusange.
Imiterere y’umutwaro mwinshi ishyira imbaraga nyinshi ku mashini zikoresha umwuka uvamo umwuka, amashanyarazi, n’amasoko yo gushyiramo umwuka. Kubungabunga ibidukikije bifite umwuka uvamo umwuka mwinshi ni ingenzi cyane, kuko itandukaniro iryo ari ryo ryose mu muvuduko w’ibanze rishobora kugira ingaruka zitaziguye ku gipimo cy’umuvuduko, kudahinduka kwa plasma, no gukorana kwa gazi, amaherezo bigira ingaruka ku bucucike bwa filime, igipimo cyo kugarura umwuka, no gufatana. Sisitemu zigezweho zo gupompa umwuka uvamo umwuka, harimo na turbomolecular na cryogenic pumps, bityo zihuzwa no kugenzura mu buryo bwihuse no kugenzura ibitekerezo kugira ngo zihuze ihindagurika ry’umutwaro wa gazi riterwa n’ingano nini y’imashini cyangwa imyuka ikora mu gihe cy’imikoreshereze myinshi y’umwuka.
Guhagarara k'umuvuduko w'amashanyarazi ni ingenzi cyane mu gihe cy'umuvuduko mwinshi. Uburyo bwo gusohora amashanyarazi mu buryo bwa Magnetron na PVD bisaba ubucucike bw'imbaraga buhamye kugira ngo plasma ikomeze kuba imwe kandi isuri ihamye. Ihindagurika ry'amashanyarazi cyangwa umuvuduko w'amashanyarazi rishobora gutuma habaho imiterere idahuye, guhindagurika, no kwangirika kw'ibice, ibyo bikaba byangiza imiterere y'amashusho n'iy'imashini. Kugira ngo bigabanye izi ngaruka, imiyoboro y'amashanyarazi ikoresha ingufu zigenzurwa mu buryo bw'ikoranabuhanga hamwe no kumenya no gukumira arc, guhindura DC cyangwa RF mu buryo bwa pulsed, no gukurikirana mu buryo nyabwo ibipimo by'ibice n'ibice by ...
Gucunga ubushyuhe ni ikindi kintu cy'ingenzi. Gukoresha irangi rinini cyangwa rinini cyane bitanga ubushyuhe bwinshi ku ntego no ku ngingo, bishobora gutera stress ya firime, kugorama kwa substrate, no kugira inenge mu miterere y'uturemangingo. Gukonjesha cyane kw'intego, ibikoresho bya substrate, n'inkuta z'icyumba, hamwe no kugenzura neza ubushyuhe, bituma ingufu zikwirakwira mu buryo bumwe, bigabanya stress isigaye, kandi bigakomeza imiterere ya firime ishobora kongera kubyazwa umusaruro mu ngendo nyinshi.
Uburyo bwo gukora ibintu mu buryo bwikora n'uburyo bwo gusuzuma ibintu mu buryo busanzwe ni ingenzi mu gutuma imikorere ihoraho. Gukurikirana imiterere ya plasma mu buryo bufatika, igipimo cyo kuyishyira mu mwanya wayo, n'ubugari bungana bituma ikoranabuhanga rihindura ibipimo mu buryo buhamye, harimo urujya n'uruza rwa gazi, guhindura ingufu, no kuzunguruka kw'ibice, kugira ngo bibe bisimbura ihindagurika riterwa n'imiterere y'umutwaro mwinshi. Ubwo buryo bwo kugenzura burinda amakosa menshi mu gihe kirekire cyo gukora kandi bugatuma habaho irangi ryiza kandi rishobora gusubiramo.
Gufata ibikoresho nabyo bigira uruhare runini. Itsinda rinini ry’ibikoresho cyangwa intego zikomeye byongera umutwaro wa mekanike ku byuma bitwara ibintu n’ibikoresho bitwara ibintu, bigasaba kugenzura neza ingendo no kuzishyira hamwe neza kugira ngo hirindwe ko ibintu bihinduka kimwe. Guhuza sisitemu zikora ku buryo bwikora/busohora imizigo n’amaboko ya roboti afite ubuhanga buhanitse bigabanya ibikorwa by’abantu, bigabanya ibyago byo kwandura, kandi bigakomeza gukora neza mu gihe cy’imikorere igoye.
Mu gusoza, gukomeza gukoresha neza ibikoresho byo gusiga irangi mu buryo buhamye mu gihe cy’imitwaro myinshi bisaba uburyo buhuriweho, buhuza ikoranabuhanga rigezweho ryo gusiga irangi, kugenzura ingufu zigezweho, gucunga ubushyuhe mu buryo bufatika, gusuzuma ibikorwa mu buryo bwihuse, no gucunga ibikoresho mu buryo bwikora. Mu kunoza ibi bintu, sisitemu zo gusiga irangi zishobora gutanga filime ntoya kandi nziza ndetse no mu bintu bigoye gukora, zigashyigikira inganda zikora neza mu gihe zigenzura ko zizewe, zishobora kongera gukoreshwa, kandi zigatanga umusaruro mwiza.
-Iyi nkuru yasohotse nauruganda rukora ibikoresho byo gusiga irangi ry'umwuka Zhenhua Vacuum
Igihe cyo kohereza: Werurwe-06-2026