Ka Mālama ʻana i ka Hana Paʻa o nā Lako Uhi Vacuum ma lalo o nā Kūlana Ukana Kiʻekiʻe

I ka hana ʻana o ka uhi ʻana i ka vacuum hou, hōʻike nā kūlana hana ukana kiʻekiʻe i nā pilikia koʻikoʻi i ke kūpaʻa a me ke kūlike o ka waiho ʻana o ka ʻili lahilahi. I ka piʻi ʻana o nā koi no ka throughput kiʻekiʻe, nā nui substrate nui, a me nā uhi paʻakikī multi-layer, nā ʻōnaehana uhi vacuum—inā pahaPVD, ka hoʻoheheʻe ʻana o ka magnetron,Pono ʻo ALD, a i ʻole PECVD—e mālama i ka mana pololei ma luna o nā palena hana e hōʻoia i ka like ʻana o ke kiʻiʻoniʻoni, ka hana hou ʻana, a me ka hilinaʻi holoʻokoʻa o nā lako.

Hoʻokau nā kūlana ukana kiʻekiʻe i ke kaumaha nui ma luna o nā pamu vacuum, nā lako mana, a me nā kumu waiho. He mea koʻikoʻi ka mālama ʻana i kahi ʻano vacuum kiʻekiʻe loa, no ka mea, hiki i kekahi ʻano loli o ke kaomi kumu ke hoʻopilikia pololei i nā helu sputter, ka paʻa plasma, a me nā pilina gas-phase, a i ka hopena e hoʻopilikia ana i ka nui o ka kiʻiʻoniʻoni, ka refractive index, a me ka adhesion. No laila, ua hoʻohui ʻia nā ʻōnaehana pumping vacuum holomua, me nā pamu turbomolecular a me cryogenic, me ka nānā ʻana i ka manawa maoli a me ka kaohi manaʻo e uku no nā loli ukana kinoea i hoʻokumu ʻia e nā nui substrate nui a i ʻole ka hoʻolauna kinoea reactive i ka wā o nā kaʻina hana kiʻekiʻe.

He mea nui like ke kūpaʻa o ka hāʻawi ʻana i ka mana ma lalo o ka hana ukana kiʻekiʻe. Pono nā kaʻina hana PVD electron sputtering a me ka electron beam i ka mana mau e hoʻomau i ka plasma like a me nā helu erosion target paʻa. Hiki i nā loli o ke au a i ʻole ke au ke alakaʻi i ka waiho ʻana like ʻole, ka arcing, a me ka make ʻana o ka target, kahi e hoʻopilikia ai i nā waiwai optical a me nā mechanical film. No ka hōʻemi ʻana i kēia mau pilikia, hoʻohana nā laina uhi ukana kiʻekiʻe i nā lako mana i hoʻomalu ʻia e ka digital me ka ʻike arc a me ka hoʻopau ʻana, ka pulsed DC a i ʻole RF modulation, a me ka nānā ʻana i ka manawa maoli o nā palena target a me substrate.

ʻO ka hoʻokele wela kekahi mea koʻikoʻi. ʻO nā holo uhi nui a kiʻekiʻe paha e hoʻopuka i ka wela nui ma nā pahuhopu a me nā substrates, hiki ke hoʻoulu i ke kaumaha kiʻiʻoniʻoni, ka warping substrate, a me nā hemahema microstructural. ʻO ka hoʻomaʻalili ikaika o nā pahuhopu, nā mea paʻa substrate, a me nā paia o ke keʻena, i hui pū ʻia me ka profiling mahana pololei a me ka nānā ʻana, e hōʻoia i ka hoʻokaʻawale like ʻana o ka ikehu, hoʻemi i ke kaumaha koena, a mālama i ka microstructure kiʻiʻoniʻoni hiki ke hana hou ʻia ma nā holo he nui.

ʻO ka automation kaʻina hana a me nā ʻōnaehana diagnostic in-situ ke kikowaena no ka hoʻomau ʻana i ka hana paʻa. ʻO ka nānā ʻana i nā ʻano plasma, nā helu deposition, a me ke ʻano like o ka mānoanoa e hiki ai i ka ʻōnaehana ke hoʻoponopono i nā palena, me ke kahe kinoea, ka modulation mana, a me ka hoʻohuli ʻana o ka substrate, e uku no nā ʻokoʻa i hoʻokumu ʻia e nā kūlana ukana kiʻekiʻe. ʻO ia ka mana pani-loop e pale aku i nā hewa cumulative ma luna o nā pōʻaiapuni hana lōʻihi a hōʻoia i nā uhi kiʻekiʻe, hiki ke hana hou ʻia.

He kuleana koʻikoʻi nō hoʻi ka lawelawe ʻana i nā mea. Hoʻonui nā pūʻulu substrate nui a i ʻole nā ​​pahuhopu kaumaha i ka ukana mīkini ma luna o nā manipulators a me nā conveyors, e pono ai ka kaohi neʻe ikaika a me ke kaulike pololei e pale aku i ka hoʻokaʻawale ʻole ʻana o ka waiho ʻana. ʻO ka hoʻohui ʻana o nā ʻōnaehana ukana/wehe automated a me nā lima robotic kiʻekiʻe e hōʻemi ana i ke komo ʻana o ke kanaka, hoʻemi i ka pilikia haumia, a mālama i ke kūlike o ke kaʻina hana ma lalo o nā kūlana hana koi.

I ka hopena, ʻo ka mālama ʻana i ka hana paʻa o nā lako uhi vacuum ma lalo o nā kūlana ukana kiʻekiʻe e pono ai kahi ala i hoʻohui ʻia, e hoʻohui ana i ka ʻenehana vacuum holomua, ka mana mana pololei, ka hoʻokele wela hana, nā diagnostics kaʻina hana manawa maoli, a me ka lawelawe ʻana i nā mea hana automated. Ma ka hoʻomaikaʻi ʻana i kēia mau mea, hiki i nā ʻōnaehana uhi ke hāʻawi i nā ʻili lahilahi like a kiʻekiʻe hoʻi i nā wahi hana paʻakikī, e kākoʻo ana i ka hana ʻana ma o ka throughput kiʻekiʻe me ka hōʻoia ʻana i ka hilinaʻi, ka hana hou ʻana, a me ka pono o ke kaʻina hana.

-Ua paʻi ʻia kēia ʻatikala emea hana lako uhi vacuum ʻO Zhenhua Vacuum