Izimo zokugqoka i-ion ye-cathode engenalutho

Kudingeka izimo ezilandelayo ukuze kuvuswe isibani se-cathode arc esingenalutho:

1. Isibhamu se-cathode esingenalutho esenziwe ngethubhu ye-tantalum sifakwe odongeni lwegumbi lokumboza futhi singasetshenziswa ukukhipha ukugeleza kwe-electron okushisayo. Ububanzi bangaphakathi bethubhu eliyisicaba bungu-φ 6 ~ φ 15mm, kanye nobukhulu bodonga obungu-0.8-2mm.

1. Ugesi wakhiwe ugesi oqala nge-arc kanye nogesi ogcina i-arc ngokuhambisana. I-voltage yogesi oshaya nge-arc ingu-800-1000V, kanti ugesi oshaya nge-arc ungu-30-50A; I-voltage ye-arc ingu-40-70V, kanti ugesi we-arc ungu-80-300A.

Inqubo yokukhipha i-arc ye-cathode engenalutho ilandela inqubo yokuguqula kusuka ekukhishweni kokukhanya okungavamile kuya ekukhishweni kwe-arc ku-"volt ampere characteristic curve". Okokuqala, kudingeka ukunikezwa kwamandla ukuze kuhlinzekwe nge-voltage yokuqala engu-800V ukuze kukhiqizwe ukukhishwa kokukhanya ku-tantalum tube. Ama-ion e-argon aphezulu ngaphakathi kwe-tantalum tube aqhuma futhi ashise i-tube aye ekushiseni lapho kukhishwa khona ama-electron ashisayo, okuholela ekugelezeni okukhulu kwe-plasma electron kanye nokwanda okungazelelwe komthamo wamandla we-arc ye-cathode engenalutho. Ngemuva kwalokho, kudingeka ukunikezwa kwamandla aphezulu ukuze kugcinwe ukukhishwa kwe-arc. Inqubo yokuguqula kusuka ekukhishweni kokukhanya kuya ekukhishweni kwe-arc izenzakalelayo, ngakho-ke kuyadingeka ukumisa ukunikezwa kwamandla okungakhipha kokubili i-voltage ephezulu kanye nomthamo wamandla aphezulu.

Uma lezi zidingo ezimbili zigxile emthonjeni owodwa wamandla, ukuphela kokukhipha kwesibili kwe-transformer yamandla kumele kuhlanganiswe ngezintambo ezijiyile kakhulu ukuze kukhishwe i-voltage ephezulu kanye ne-current ephezulu, okuzoba umthombo wamandla omkhulu. Ngemva kweminyaka yokuthuthukiswa, kungenzeka ukuhlanganisa ukunikezwa kwamandla okuqala kwe-arc encane ngogesi we-arc wokulungisa. Ugesi wokuqala we-arc usebenzisa izintambo ezincane ukuze ujikeleze amajika amaningi, okungakhipha i-voltage ephezulu engu-800V ukuze kuvuswe amashubhu e-tantalum futhi kukhiqize ukukhishwa kokukhanya; Ugesi we-arc ungakhipha amashumi ama-volt kanye namakhulu ama-ampere wamandla ngokugoqa intambo ejiyile ngamajika ambalwa ukuze kugcinwe ukuzinza kokukhishwa kwe-arc ye-cathode engenalutho. Ngenxa yokuxhumeka okufanayo kwezinsiza ezimbili zamandla kumashubhu e-tantalum, ngesikhathi senqubo yokuguqula kusuka ekukhishweni kokukhanya okungavamile kuya ekukhishweni kwe-arc, izinsiza ezimbili zamandla zizoxhuma ngokuzenzakalelayo futhi zishintshe kusuka ku-voltage ephezulu kanye ne-current ephansi ziye ku-voltage ephansi kanye ne-current ephezulu.

1. Lungisa ngokushesha izinga le-vacuum. Izinga le-vacuum lokukhipha ukukhanya kumashubhu e-tantalum licishe libe yi-100Pa, futhi isakhiwo sefilimu esifakiwe ngaphansi kwezimo ezinjalo ze-vacuum eziphansi siqinile ngokungenakugwenywa. Ngakho-ke, ngemva kokushisa ukukhishwa kwe-arc, kuyadingeka ukunciphisa ngokushesha inani lokugeleza komoya bese ulungisa ngokushesha izinga le-vacuum libe yi-8×10-1~2Pa ukuze uthole isakhiwo sefilimu sokuqala esihle.

1. I-turntable ye-workpiece ifakiwe izungeze igumbi lokumboza, lapho i-workpiece ixhunywe epalini elibi lokunikezwa kwamandla kwe-bias kanye negumbi le-vacuum lixhunywe epalini elibi. Ngenxa yobuningi bamanje obuphezulu be-hollow cathode arc, i-bias voltage ye-ion coated workpiece ayidingi ukufinyelela ku-1000V, ngokuvamile i-50-200V.

5. Setha ikhoyili kagesi egxile ekuzungezeni ukuwa kweGan, futhi insimu kagesi ekhiqizwa ngokusebenzisa ugesi kukhoyili ingagxila umsebe we-electron enkabeni ye-ingot yensimbi, okwandisa amandla okugeleza kwe-electron.