Mamiriro ekuputira ion ye cathode isina chinhu

Zvinhu zvinotevera zvinodiwa kuti ubatidze mwenje we cathode arc une hollow cathode:

1. Pfuti ye cathode ine hollow yakagadzirwa ne tantalum tube yakaiswa pamadziro e coating chamber uye inogona kushandiswa kuburitsa maerekitironi anopisa. Dhayamita yemukati me flat tube i φ 6 ~ φ 15mm, ine ukobvu hwemadziro hwe 0.8-2mm.

1. Simba iri rinoumbwa nemagetsi anotanga arc uye magetsi anoramba achishandiswa arc ari pamwe chete. Voltage yemagetsi anomhanya arc i800-1000V, uye arc striking current i30-50A; Voltage ye arc i40-70V, uye arc current i80-300A.

Maitiro ekuburitsa arc ye cathode cathode anotevera maitiro ekushandura kubva pakuburitsa glow discharge isina kujairika kuenda pakuburitsa arc mu "volt ampere characteristic curve". Chekutanga, simba rinodiwa kuti ripe 800V starting voltage kuti riburitse glow discharge mu tantalum tube. Ma-argon ions e high-density ari mukati me tantalum tube anoputika uye anopisa chubhu kusvika patembiricha inoburitswa maerekitironi anopisa, zvichikonzera kuwanda kwemaerekitironi eplasma uye kuwedzera kamwe kamwe kwe current ye hollow cathode arc. Zvadaro, simba re high current rinodiwawo kuti arc discharge irambe iripo. Maitiro ekushandura kubva pakuburitsa glow kuenda pakuburitsa arc inoitika otomatiki, saka zvakakosha kugadzirisa simba rinogona kuburitsa voltage yakakwira uye high current.

Kana zvinodiwa zviviri izvi zvakanangana nechinhu chimwe chete chemagetsi, chikamu chechipiri chemagetsi chinobuda mutransformer chinofanira kuputirwa newaya dzakakora kwazvo kuti dzikwanise kuburitsa voltage yakakwira uye current yakakwira, iyo ichave sosi yemagetsi yakakura. Mushure memakore ekuvandudzwa, zvinokwanisika kutenderedza arc diki yekutanga magetsi nemagetsi ekugadzirisa arc. Simba rekutanga re arc rinoshandisa waya dzakatetepa kutenderedza matenderedzwa akawanda, ayo anogona kuburitsa voltage yakakwira ye800V kubatidza machubhu etantalum uye kugadzira kuburitsa kupenya; Simba re arc rinogona kuburitsa makumi emavolts nemazana emaampere emagetsi nekumonera waya yakakora ine kutenderera kushoma kuchengetedza kugadzikana kwe hollow cathode arc discharge. Nekuda kwekubatana kwakafanana kwemagetsi maviri pamachubhu etantalum, panguva yekushandura kubva pakuburitsa kupenya kusingawanzoitiki kuenda pakuburitsa kupenya, magetsi maviri aya anozobatana otomatiki uye anochinja kubva pa high voltage ne low current kuenda ku low voltage ne high current.

1. Gadzirisa mwero wevacuum nekukurumidza. Mwero wevacuum wekuburitsa chiedza mumachubhu etantalum unenge 100Pa, uye chimiro chefirimu rakaiswa pasi pemamiriro evacuum akaderera hachidzivisike. Saka, mushure mekubatidza arc discharge, zvakakosha kuderedza huwandu hwemhepo nekukurumidza uye kugadzirisa mwero wevacuum kusvika 8×10-1~2Pa kuti uwane chimiro chakanaka chekutanga chefirimu.

1. Chigadziko chebasa chinotenderedzwa chakatenderedzwa nekamuri rekuputira, chigadziko chebasa chakabatana nedanda re negative remagetsi e bias uye chigadziko che vacuum chakabatana nedanda re positive. Nekuda kwehuwandu hwakawanda hwemagetsi e hollow cathode arc, voltage ye bias ye workpiece yakaputirwa ne ion haifanirwe kusvika 1000V, kazhinji 50-200V.

5. Isa coil yemagetsi inotarisisa yakatenderedza kudonha kweGan, uye munda wemagetsi unogadzirwa nekushandisa magetsi pacoil unogona kutarisisa danda remaerekitironi pakati peingot yesimbi, zvichiwedzera simba rekuyerera kwemaerekitironi.