Cov xwm txheej rau cov txheej txheem cathode ion hollow

Cov xwm txheej hauv qab no yuav tsum tau ua kom lub teeb cathode arc hollow ignite:

1. Ib rab phom cathode hollow ua los ntawm tantalum raj tau teeb tsa rau ntawm phab ntsa chamber txheej thiab tuaj yeem siv los tso tawm cov hluav taws xob kub. Lub cheeb tsam sab hauv ntawm lub raj tiaj tus yog φ 6 ~ φ 15mm, nrog rau phab ntsa tuab ntawm 0.8-2mm.

1. Lub hwj chim muab los ntawm lub hwj chim pib arc thiab lub hwj chim tswj arc sib luag. Lub zog hluav taws xob ntawm lub hwj chim arc striking yog 800-1000V, thiab lub zog hluav taws xob arc yog 30-50A; Lub zog hluav taws xob arc yog 40-70V, thiab lub zog hluav taws xob arc yog 80-300A.

Cov txheej txheem tso tawm cathode arc hollow ua raws li cov txheej txheem ntawm kev hloov pauv los ntawm kev tso tawm teeb pom kev tsis zoo mus rau kev tso tawm arc hauv "volt ampere characteristic curve". Ua ntej, xav tau lub zog fais fab los muab 800V pib voltage los tsim cov teeb pom kev hauv lub raj tantalum. Cov argon ions siab-density hauv lub raj tantalum bombard thiab cua sov lub raj mus rau qhov kub uas cov electrons kub raug tso tawm, ua rau muaj ntau ntawm plasma electron ntws thiab nce tam sim ntawd hauv cov cathode arc hollow. Tom qab ntawd, xav tau lub zog fais fab tam sim no siab los tswj cov teeb pom kev arc. Cov txheej txheem ntawm kev hloov pauv los ntawm kev tso tawm teeb pom kev mus rau kev tso tawm arc yog automatic, yog li nws yog qhov tsim nyog los teeb tsa lub zog fais fab uas tuaj yeem tso tawm ob qho tib si voltage siab thiab tam sim no siab.

Yog tias ob qho kev xav tau no tsom mus rau ib qho chaw fais fab, qhov kawg ntawm lub tshuab hloov hluav taws xob yuav tsum tau qhwv nrog cov xov hlau tuab heev rau ntau qhov tig kom tso tawm qhov hluav taws xob siab thiab tam sim no siab, uas yuav yog qhov chaw fais fab loj. Tom qab ntau xyoo ntawm kev txhim kho, nws muaj peev xwm ua kom lub zog pib me me arc sib luag nrog lub zog arc txij nkawm. Lub zog pib arc siv cov xov hlau nyias los cua ntau qhov tig, uas tuaj yeem tso tawm qhov hluav taws xob siab ntawm 800V los hlawv cov raj tantalum thiab tsim cov teeb ci; Lub zog arc tuaj yeem tso tawm kaum tawm volts thiab pua pua amperes ntawm tam sim no los ntawm kev cua ib txoj hlua tuab nrog tsawg dua tig kom tswj tau qhov ruaj khov ntawm qhov tso tawm cathode arc hollow. Vim yog qhov kev sib txuas sib luag ntawm ob lub zog ntawm cov raj tantalum, thaum lub sijhawm hloov pauv los ntawm qhov teeb ci tsis zoo mus rau qhov tso tawm arc, ob lub zog yuav txuas thiab hloov los ntawm qhov hluav taws xob siab thiab tam sim no qis mus rau qhov hluav taws xob qis thiab tam sim no siab.

1. Kho qhov nqus tsev sai sai. Qhov nqus tsev rau qhov tso tawm ntawm lub teeb ci hauv cov raj tantalum yog li ntawm 100Pa, thiab cov qauv zaj duab xis tso rau hauv qab qhov chaw nqus tsev qis no yuav tsum ntxhib heev. Yog li ntawd, tom qab hlawv qhov tso tawm ntawm lub arc, nws yog qhov tsim nyog kom txo qhov ntau ntawm cov cua ntws thiab kho qhov nqus tsev sai sai rau 8 × 10-1 ~ 2Pa kom tau txais cov qauv zaj duab xis zoo.

1. Lub workpiece turntable tau teeb tsa nyob ib puag ncig lub chamber txheej, nrog rau lub workpiece txuas nrog lub ncej tsis zoo ntawm lub zog fais fab bias thiab lub chamber nqus tsev txuas nrog lub ncej zoo. Vim yog qhov ceev tam sim no ntawm lub cathode arc hollow, lub zog bias ntawm lub workpiece ion coated tsis tas yuav ncav cuag 1000V, feem ntau 50-200V.

5. Teem ib lub kauj electromagnetic uas tsom mus rau ib puag ncig Gan collapse, thiab lub teb electromagnetic uas tsim los ntawm kev siv tam sim no rau lub kauj tuaj yeem tsom lub electron beam ntawm qhov chaw ntawm cov hlau ingot, ua rau lub zog ceev ntawm cov electron ntws.