Zofunikira pakuphimba kwa ion ya cathode yopanda kanthu

Zinthu zotsatirazi ndizofunikira kuti muyatse nyali ya cathode arc yopanda kanthu:

1. Mfuti ya cathode yopanda kanthu yopangidwa ndi chubu cha tantalum imayikidwa pakhoma la chipinda chophikira ndipo ingagwiritsidwe ntchito kutulutsa ma elekitironi otentha. M'mimba mwake wa chubu chathyathyathya ndi φ 6 ~ φ 15mm, ndi makulidwe a khoma a 0.8-2mm.

1. Mphamvu yamagetsi imapangidwa ndi mphamvu yoyambira ya arc ndi mphamvu yosunga arc motsatizana. Mphamvu yamagetsi ya arc striking power supply ndi 800-1000V, ndipo mphamvu yamagetsi ya arc striking ndi 30-50A; Mphamvu yamagetsi ya arc ndi 40-70V, ndipo mphamvu yamagetsi ya arc ndi 80-300A.

Njira yotulutsira ma arc a hollow cathode imatsatira njira yosinthira kuchoka ku kutulutsa kosazolowereka kwa kuwala kupita ku kutulutsa ma arc mu "volt ampere characteristic curve". Choyamba, magetsi amafunika kuti apereke magetsi oyambira a 800V kuti apange kutulutsa kwa kuwala mu chubu cha tantalum. Ma argon ion okhala ndi kuchuluka kwakukulu mkati mwa chubu cha tantalum amaphulika ndikutenthetsa chubucho kutentha komwe ma elekitironi otentha amatulutsidwa, zomwe zimapangitsa kuti ma elekitironi ambiri a plasma ayende bwino komanso kuwonjezeka kwadzidzidzi kwa mphamvu yamagetsi ya hollow cathode arc. Kenako, mphamvu yamagetsi yapamwamba imafunikanso kuti asunge kutulutsa kwa arc. Njira yosinthira kuchoka ku kutulutsa kwa kuwala kupita ku kutulutsa kwa arc imachitika yokha, kotero ndikofunikira kukhazikitsa magetsi omwe amatha kutulutsa magetsi ambiri komanso amphamvu.

Ngati zofunikira ziwirizi zikuyang'ana kwambiri pa gwero limodzi lamagetsi, gawo lachiwiri lotulutsa mphamvu la transformer liyenera kuzunguliridwa ndi mawaya okhuthala kwambiri nthawi zambiri kuti litulutse magetsi ambiri ndi magetsi amphamvu, omwe adzakhala gwero lalikulu lamagetsi. Pambuyo pa zaka zambiri zokonzanso, n'zotheka kuyika magetsi ang'onoang'ono oyambira arc ndi magetsi okonza arc. Mphamvu yoyambira arc imagwiritsa ntchito mawaya opyapyala kuti azungulire maulendo angapo, omwe amatha kutulutsa magetsi ambiri a 800V kuti ayatse machubu a tantalum ndikupanga kuwala; Mphamvu ya arc imatha kutulutsa ma volts makumi ndi mazana a ma ampere amagetsi pozungulira waya wokhuthala ndi maulendo ochepa kuti asunge kukhazikika kwa kuwala kwa cathode arc. Chifukwa cha kulumikizana kofanana kwa magetsi awiri pa machubu a tantalum, panthawi yosintha kuchoka pa kuwala kosadziwika bwino kupita ku kuwala kwa arc, magetsi awiriwa amalumikizana okha ndikusintha kuchokera pa magetsi amphamvu ndi otsika kupita ku magetsi otsika ndi amphamvu kwambiri.

1. Sinthani mwachangu mulingo wa vacuum. Mulingo wa vacuum wotulutsa kuwala m'machubu a tantalum ndi pafupifupi 100Pa, ndipo kapangidwe ka filimu yosungidwa pansi pa mikhalidwe yotsika ya vacuum imakhala yolimba mosalekeza. Chifukwa chake, mukayatsa kutulutsa kwa arc, ndikofunikira kuchepetsa nthawi yomweyo kuchuluka kwa mpweya ndikusinthira mwachangu mulingo wa vacuum kukhala 8×10-1~2Pa kuti mupeze kapangidwe kabwino koyambirira ka filimu.

1. Chipinda chogwirira ntchito chimayikidwa mozungulira chipinda chophikira, ndipo chogwirira ntchitocho chimalumikizidwa ku pole yoyipa ya mphamvu ya bias ndipo chipinda chopanda mpweya chimalumikizidwa ku pole yoyipa. Chifukwa cha kuchuluka kwa mphamvu ya cathode arc yopanda kanthu, mphamvu ya bias ya workpiece yokhala ndi ion siyenera kufika pa 1000V, nthawi zambiri 50-200V.

5. Ikani coil yolunjika ya electromagnetic kuzungulira kugwa kwa Gan, ndipo gawo la electromagnetic lopangidwa pogwiritsa ntchito mphamvu yamagetsi ku coil likhoza kuyang'ana kuwala kwa electron pakati pa ingot yachitsulo, ndikuwonjezera kuchuluka kwa mphamvu ya kuyenda kwa electron.