Izimo zokumboza i-ion cathode engenalutho

Izimo ezilandelayo ziyadingeka ukuze kuthunge ukukhanya kwe-arc ye-cathode engenalutho:

1. Isibhamu se-cathode esingenalutho esenziwe nge-tantalum tube sifakwe odongeni lwegumbi lokunamathela futhi singasetshenziswa ukukhipha ukugeleza kwe-electron eshisayo. Ububanzi bangaphakathi beshubhu eliyisicaba ngu-φ 6~ φ 15mm, nogqinsi oluyi-0.8-2mm.

1. Ukunikezwa kwamandla kwakhiwe i-arc yokuqala yamandla kagesi kanye ne-arc egcina ukunikezwa kwamandla ngokuhambisana. I-voltage ye-arc eshaya amandla kagesi i-800-1000V, futhi i-arc ehlabayo yamanje i-30-50A; I-voltage ye-arc ingu-40-70V, kanti i-arc yamanje ingu-80-300A.

Inqubo yokukhipha i-cathode arc engenalutho ilandela inqubo yokuguqula kusuka ekuphumeni okungavamile kuya ekukhishweni kwe-arc "kwijika lesici se-volt ampere". Okokuqala, ukunikezwa kwamandla kuyadingeka ukuze kuhlinzekwe i-voltage yokuqala engu-800V ukuze kukhiqizwe ukukhishwa okukhanyayo kushubhu ye-tantalum. Ama-argon ion anobukhulu obuphezulu ngaphakathi kwe-tantalum tube bombard futhi ashise ishubhu ezingeni lokushisa lapho ama-electron ashisayo akhishwa khona, okuholela ekugelezeni kwe-plasma electron enkulu kanye nokwanda okungazelelwe kwamanje kwe-arc ye-cathode engenalutho. Khona-ke, ukunikezwa kwamandla kwamanje okuphezulu kuyadingeka ukuze kugcinwe ukukhishwa kwe-arc. Inqubo yokuguqula kusuka ekuphumeni okukhanyayo kuya ekukhishweni kwe-arc kuyazenzakalela, ngakho-ke kuyadingeka ukulungisa ukunikezwa kwamandla okungakhipha kokubili i-voltage ephezulu kanye nephezulu yamanje.

Uma lezi zidingo ezimbili zigxile emthonjeni wamandla owodwa, ukuphela kokuphuma kwesibili kwe-transformer yamandla kumele kulimazwe ngezintambo eziwugqinsi kakhulu ukuze kuphenduke izikhathi eziningi ukuze kukhishwe i-voltage ephezulu kanye namandla aphezulu, okuzoba umthombo wamandla wevolumu enkulu. Ngemuva kweminyaka yokuthuthuka, kungenzeka ukufanisa ugesi omncane wokuqala we-arc ne-arc yokulungisa amandla kagesi. Ukunikezwa kwamandla okuqala kwe-arc kusebenzisa izintambo ezincanyana ukuze kuphendulwe izikhathi eziningi, okungakhipha amandla kagesi aphezulu angu-800V ukuze kuthungele amashubhu e-tantalum futhi kukhiqize ukuchithwa kokukhanya; Ukunikezwa kwamandla kwe-arc kungakhipha amashumi ama-volts namakhulu ama-ampere wamanje ngokusonta ucingo oluwugqinsi olunamajika ambalwa ukuze kugcinwe ukuzinza kokuphuma kwe-arc ye-cathode engenalutho. Ngenxa yokuxhumeka okuhambisanayo kwezinto ezimbili zamandla kumashubhu e-tantalum, phakathi nenqubo yokuguqula kusuka ekuphumeni okungavamile kuya ekukhishweni kwe-arc, lezi zinsiza ezimbili zamandla zizoxhuma ngokuzenzakalelayo futhi zishintshe kusuka ku-voltage ephezulu kanye namanje aphansi kuya ku-voltage ephansi kanye namandla aphezulu.

1. Ngokushesha lungisa izinga le-vacuum. Izinga levacuum lokukhishwa kokukhanya kumashubhu e-tantalum licishe libe ngu-100Pa, futhi isakhiwo sefilimu esifakwe ngaphansi kwezimo zevacuum ephansi kanjalo simaholoholo. Ngakho-ke, ngemva kokushisa ukukhishwa kwe-arc, kuyadingeka ukunciphisa ngokushesha inani lokugeleza komoya futhi ulungise ngokushesha izinga le-vacuum ku-8 × 10-1 ~ 2Pa ukuze uthole isakhiwo sefilimu sokuqala esihle.

1. I-turntable ye-workpiece ifakwe eduze kwegumbi lokumboza, ne-workpiece exhunywe esigxotsheni esingalungile se-bias power supply kanye ne-vacuum room exhunywe esigxotsheni esihle. Ngenxa yokuminyana okuphezulu kwamanje kwe-arc ye-cathode engenalutho, i-voltage echema ye-ion coated workpiece ayidingi ukuthi ifinyelele ku-1000V, ngokuvamile i-50-200V.

5. Setha ikhoyili kazibuthe egxilile ezungeze ukuwa kwe-Gan, futhi inkambu kazibuthe kagesi ekhiqizwe ngokusebenzisa i-current ikhoyili ingagxilisa i-electron beam emaphakathi nengot yensimbi, ikhulise ukuminyana kwamandla okugeleza kwe-electron.