Kwizinto zenzululwazi kunye nobunjineli, intsimi yeebhanyabhanya ezibhityileyo idlala indima ebalulekileyo kumashishini ukusuka kwi-elektroniki ukuya kwimveliso ephezulu. Phakathi kobugcisa obahlukeneyo obukhoyo, i-physical vapor deposition (PVD) sputtering iye yavela njengendlela entsha nesebenzayo yokufaka iifilimu ezibhityileyo kwiisubstrates. Eli nqaku liza kungena kwihlabathi le-PVD sputtering, lixoxa ngezicelo zalo, iinzuzo kunye nophuhliso lwamva nje. I-PVD sputtering, ekwabizwa ngokuba yimagnetron sputtering, bubuchule obusetyenziswa kakhulu kwishishini le-semiconductor ukufaka iifilimu ezicekethekileyo kwii-wafers. Kubandakanya ukusebenzisa iplasma ukususa iiathomu kwizinto ekujoliswe kuzo, ezithi ke zifakwe kwi-substrate, yenze ifilimu encinci.
Inkqubo ibonelela ngeenzuzo ezininzi, ezinjengolawulo oluchanekileyo lobungqingqwa befilimu, ukuncamathela okugqwesileyo, kunye nokukwazi ukufaka izinto ezahlukeneyo ezibandakanya isinyithi, i-oxides, kunye ne-nitrides. Ukusetyenziswa kwePVD sputtering kubanzi kwaye kwahluka. Kumashishini ombane, ngokuqhelekileyo kusetyenziselwa ukufaka izinto zokuqhuba ezifana ne-aluminium kunye nobhedu, okwenza kube lula ukuveliswa kwezinto ezincinci kunye neesekethe ezidibeneyo. Ukongeza, i-PVD sputtering isetyenziswa kakhulu kwishishini le-optical coating, elifana ne-anti-reflective coatings kwiilensi kunye nezipili zokuphucula ukuhanjiswa kokukhanya. Inkqubela phambili yamva nje kwitekhnoloji yePVD yokutshiza iyenza idume ngakumbi. Uphuhliso oluqaphelekayo kukwaziswa kwe-sputtering esebenzayo, enokuthi ifake iifilimu ezincinci zekhompawundi ezineempawu eziphuculweyo. Ngokuzisa iigesi ezisebenzayo kwigumbi lokucoca ngexesha lokufakwa, abavelisi banokulawula ukubunjwa kunye ne-stoichiometry yeefilimu ezifakwe, ukubonelela ngokuphuculweyo kokusebenza kunye nokusebenza.
Ukongeza, iinguqulelo ekujoliswe kuzo ziye zandisa izakhono zePVD sputtering. Umzekelo, ukusebenzisa iithagethi ezidityanisiweyo ezibandakanya izixhobo ezininzi kunokufaka iifilimu ezinqabileyo ezikhethekileyo ezineempawu ezizodwa. Oku kuvula umnyango wophuhliso lwezixhobo ezitsha ze-electronics eziphambili, ukugcinwa kwamandla kunye nezixhobo ze-biomedical. Isishwankathelo, i-PVD sputtering yindlela enamandla yokugquma ifilimu enoluhlu olubanzi lwezicelo kunye nenkqubela phambili yamva nje. Ngolawulo oluchanekileyo malunga nokubekwa kwefilimu encinci kunye nokuhambelana nezixhobo ezahlukeneyo, iye yaba yeyona nto iphambili kumashishini afana ne-elektroniki kunye ne-optics. Uphando oluqhubekayo kunye nokuveliswa kwezinto ezintsha kwintsimi ye-PVD sputtering kulindeleke ukuba ikhulise ngakumbi amandla ayo, ivumela ukuyilwa kwezinto ezintsha kunye nokutyhala imida yenkqubela phambili yetekhnoloji.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaIvacuum yaseZhenhua.
Ixesha lokuposa: May-27-2025