Ho mahlale a thepa le boenjiniere, lebala la ho roala lifilimi tse tšesaane le phetha karolo ea bohlokoa liindastering ho tloha ho tsa elektroniki ho isa ho tse tsoetseng pele. Har'a litheknoloji tse fapaneng tse fumanehang, sputtering ea vapor deposition (PVD) e hlahile e le mokhoa o mocha le o sebetsang oa ho beha lifilimi tse tšesaane holim'a li-substrates. Sengoliloeng sena se tla shebana le lefats'e la PVD sputtering, se bua ka ts'ebeliso ea eona, melemo le nts'etsopele ea morao-rao. PVD sputtering, eo hape e tsejoang e le magnetron sputtering, ke mokhoa o sebelisoang haholo indastering ea semiconductor ho beha lifilimi tse tšesaane holim'a liphaphatha. Ho akarelletsa ho sebelisa plasma ho ntša liathomo nthong eo ho shebiloeng ho eona, ebe e kenngoa holim'a substrate, ho etsa filimi e tšesaane.
Ts'ebetso ena e fana ka melemo e mengata, joalo ka taolo e nepahetseng ea botenya ba filimi, ho khomarela hantle, le bokhoni ba ho beha lisebelisoa tse fapaneng tse kenyelletsang tšepe, li-oxide le nitride. Lisebelisoa tsa PVD sputtering li pharaletseng ebile li fapane. Indastering ea lisebelisoa tsa elektroniki, hangata e sebelisoa ho beha lisebelisoa tse tsamaisang joalo ka aluminium le koporo, tse nolofalletsang tlhahiso ea likaroloana tse nyane le li-circuits tse kopaneng. Ho phaella moo, PVD sputtering e sebelisoa haholo indastering ea ho roala ka optical, joalo ka liphahlo tse thibelang ho bonahatsa lilense le liipone ho ntlafatsa ts'ebetso ea phetisetso ea leseli. Likhatelo-pele tsa morao-rao tsa theknoloji ea PVD ea sputtering li etsa hore e ratoe le ho feta. Khatelo-pele e hlokomelehang ke ho hlahisoa ha reactive sputtering, e ka kenyang lifilimi tse tšesaane tsa metsoako e nang le thepa e ntlafalitsoeng. Ka ho hlahisa likhase tse sebetsang ka kamoreng ea vacuum nakong ea deposition, bahlahisi ba ka laola sebopeho le stoichiometry ea lifilimi tse behiloeng, ho fana ka ts'ebetso le ts'ebetso e ntlafetseng.
Ho feta moo, lintlafatso tsa sepheo li ekelitse bokhoni ba PVD sputtering. Mohlala, ho sebelisa lipheo tse kopaneng tse nang le lisebelisoa tse ngata ho ka beha lifilimi tse tšesaane tse ikhethang tse nang le thepa e ikhethang. Sena se bula monyako oa nts'etsopele ea lisebelisoa tse ncha tsa lisebelisoa tsa elektronike tse tsoetseng pele, polokelo ea matla le lisebelisoa tsa biomedical. Ka kakaretso, PVD sputtering ke mokhoa o matla oa ho roala filimi o nang le mefuta e mengata ea likopo le tsoelo-pele ea morao tjena. Ka taolo e nepahetseng mabapi le ho beoa ha lifilimi tse tšesaane le ho tsamaellana le lisebelisoa tse fapaneng, e fetohile setsi sa mantlha liindastering tse kang tsa elektroniki le tsa optics. Patlisiso e ntseng e tsoela pele le boqapi lefapheng la PVD sputtering e lebelletsoe ho ntlafatsa bokhoni ba eona, ho nolofalletsa ho theha lisebelisoa tse ncha le ho sutumelletsa meeli ea tsoelopele ea theknoloji.
-Sengoliloeng sena se lokolloa kemoetsi oa mochine oa vacuum coatingPhula ea Zhenhua.
Nako ea poso: May-27-2025