Maemo a latelang a hlokahala ho hotetsa leseli la cathode arc le sekoti:
- Sethunya sa cathode se sekoti se entsoeng ka tube ea tantalum se kentsoe leboteng la kamore ea ho roala 'me se ka sebelisoa ho ntša phallo e chesang ea elektronike. Bophara bo ka hare ba tube e bataletseng ke φ 6 ~ φ 15mm, ka bophara ba lerako la 0.8-2mm.
- Phepelo ea motlakase e entsoe ka phepelo ea motlakase e qalang arc le arc e bolokang phepelo ea motlakase ka ho bapisa. Matla a matla a matla a arc ke 800-1000V, 'me arc e otlang hona joale ke 30-50A; Arc voltage ke 40-70V, 'me arc current ke 80-300A.
Ts'ebetso ea "hollow cathode arc discharge" e latela mokhoa oa ho fetoha ho tloha ho khanya e sa tloaelehang ho ea ho arc discharge ho "volt ampere characteristic curve". Taba ea pele, phepelo ea motlakase e ea hlokahala ho fana ka motlakase oa ho qala oa 800V ho hlahisa khanya ka har'a tube ea tantalum. The phahameng segokanyipalo argon ion ka hare ho tantalum tube bombard le futhumatsang tube ho mocheso moo elektronike chesang e ntša, ho fella ka palo e khōlō ea plasma elektrone phallo le ka tšohanyetso keketseho ea hona joale ea sekoti cathode arc. Joale, phepelo ea motlakase e phahameng ea hajoale e boetse e hlokahala ho boloka ho tsoa ha arc. Mokhoa oa ho fetola ho tloha ho khanya ho ea ho arc discharge o ikemela, kahoo hoa hlokahala ho lokisa phepelo ea motlakase e ka ntšang motlakase o phahameng le oa hona joale o phahameng.
Haeba litlhoko tsena tse peli li tsepamisitsoe mohloling o le mong oa matla, karolo ea bobeli ea tlhahiso ea motlakase ea motlakase e tlameha ho lematsoa ka lithapo tse teteaneng haholo bakeng sa ho chencha ka makhetlo a mangata e le ho ntša motlakase o phahameng le hona joale, e tla ba mohloli o moholo oa matla a matla. Kamora lilemo tsa ntlafatso, hoa khonahala ho bapisa phepelo e nyane ea arc e qalang ka phepelo ea motlakase ea arc. Motlakase oa ho qala oa arc o sebelisa lithapo tse tšesaane ho phethola nako e ngata, e ka ntšang matla a phahameng a 800V ho hotetsa li-tubes tsa tantalum le ho hlahisa khanya e khanyang; Motlakase oa arc o ka ntša li-volts tse mashome le li-ampere tse makholo tsa hona joale ka ho phunya terata e teteaneng e nang le methinyeho e fokolang ho boloka botsitso ba ho tsoa ha cathode arc. Ka lebaka la khokahanyo e tšoanang ea lisebelisoa tse peli tsa matla holim'a li-tubes tsa tantalum, nakong ea ts'ebetso ea ho fetola ho tloha ho khanya ho sa tloaelehang ho ea ho arc discharge, lisebelisoa tse peli tsa matla li tla kopanya le ho fetola ho tloha ho matla a phahameng le a tlaase ho ea ho matla a tlaase le a phahameng hona joale.
- Ka potlako fetola boemo ba vacuum. Boemo ba vacuum bakeng sa phallo e khanyang ka har'a li-tubes tsa tantalum ke hoo e ka bang 100Pa, 'me sebopeho sa filimi se kentsoeng tlas'a maemo a tlase joalo a vacuum e mahoashe. Ka hona, ka mor'a ho khantša ho tsoa ha arc, hoa hlokahala ho fokotsa hang-hang palo ea phallo ea moea le ho potlakela ho fetola boemo ba vacuum ho 8 × 10-1 ~ 2Pa ho fumana sebopeho se setle sa filimi ea pele.
- The workpiece turntable e kenngoa ho pota-pota kamoreng ea ho roala, e nang le mosebetsi o kopantsoeng le palo e mpe ea phepelo ea matla a leeme le kamore ea vacuum e amanang le palo e ntle. Ka lebaka la matla a phahameng a hona joale a sekoti sa cathode arc, leeme voltage ea ion coated workpiece ha e hloke ho fihla ho 1000V, hangata 50-200V.
5. Beha khoele e lebisang tlhokomelo ea motlakase ho pota-potile ho putlama ha Gan, 'me sebaka sa motlakase se hlahisoang ke ho sebelisa hona joale ho coil se ka tsepamisa mohopolo oa elektronike bohareng ba ingot ea tšepe, ho eketsa matla a matla a phallo ea elektronike.
Nako ea poso: Jul-20-2023