Mamiriro ezvinhu ehollow cathode ion coating

Mamiriro anotevera anodiwa kuti ubatidze hollow cathode arc light:

1. Pfuti yekathode yakagomara yakagadzirwa netantalum chubhu inoiswa pamadziro ekamuri yekuputira uye inogona kushandiswa kuburitsa inopisa maerekitironi kuyerera. Iyo yemukati dhayamita yeflat chubhu ndeye φ 6 ~ φ 15mm, ine madziro ukobvu we0.8-2mm.

1. Simba remagetsi rinoumbwa nearc kutanga magetsi uye arc inochengetedza magetsi inoenderana. Iyo voltage yearc inorova magetsi ndeye 800-1000V, uye iyo arc inorova ikozvino ndeye 30-50A; Iyo arc voltage ndeye 40-70V, uye arc ikozvino i80-300A.

Iyo hollow cathode arc discharge process inotevera maitiro ekushandura kubva kune abnormal kupenya kubuda kuenda ku arc discharge mu "volt ampere characteristic curve". Chekutanga, magetsi anodiwa kuti ape 800V yekutanga voltage kuti ibudise kubuda kupenya mu tantalum chubhu. Iyo yakakwirira-density argon ions mukati me tantalum chubhu bombard uye kupisa chubhu kusvika kune tembiricha uko maerekitironi anopisa anoburitswa, zvichikonzera kuwanda kweplasma electron kuyerera uye kamwe kamwe kuwedzera kweiyo hollow cathode arc. Zvadaro, yakakwira ikozvino magetsi inodiwa zvakare kuchengetedza iyo arc kubuda. Maitiro ekushandura kubva pakuvheneka kubuda kuenda kuarc discharge ndeye otomatiki, saka zvinodikanwa kugadzirisa magetsi anogona kuburitsa zvese zvakakwirira voltage uye zvazvino.

Kana izvi zviviri zvinodiwa zvakanangidzirwa pane imwe simba sosi, iyo yechipiri inobuda inopera yemagetsi transformer inofanira kukuvadzwa newaya dzakakora kwazvo kune machinjiro mazhinji kuitira kuti ibudise yakakwira voltage uye yakakwira ikozvino, inova yakakura vhoriyamu simba sosi. Mushure memakore ekuvandudza, zvinokwanisika kufananidza diki arc kutanga magetsi ekupa nearc yekugadziridza magetsi. Iyo arc yekutanga magetsi inoshandisa waya dzakatetepa kuvhuvhuta matenderedzwa akawanda, ayo anogona kuburitsa yakakwira voltage ye800V kubatidza machubhu etantalum uye kuburitsa kubuda kupenya; Iyo arc magetsi emagetsi anogona kuburitsa makumi emavolts uye mazana ema amperes ezvino nekumonera waya gobvu ine mashoma matende kuti achengetedze kugadzikana kwehollow cathode arc discharge. Nekuda kwekubatana kwakabatana kwemagetsi maviri emagetsi patantalum chubhu, panguva yekushandura kubva kune abnormal glow discharge kuenda kuarc discharge, magetsi maviri aya anozobatana otochinja kubva pakakwirira voltage uye yakaderera ikozvino kune yakaderera voltage uye yakakwirira ikozvino.

1. Kurumidza kugadzirisa vacuum level. Iyo vacuum level yekupenya inobuda mu tantalum chubhu yakatenderedza 100Pa, uye iyo yakaiswa bhaisikopo chimiro pasi peyakadzika vacuum mamiriro akakomba. Nokudaro, mushure mokupisa arc discharge, zvinodikanwa kuti pakarepo kuderedza kuwanda kwemhepo inoyerera uye nokukurumidza kugadzirisa vacuum level kusvika 8 × 10-1 ~ 2Pa kuti uwane yakanaka yekutanga firimu chimiro.

1. Iyo workpiece turntable inogadzika yakatenderedza kamuri yekupfekedza, ine workpiece yakabatana kune yakaipa danda reiyo bias simba rekupa uye vacuum chamber yakabatana kune yakanaka pole. Nekuda kwehurefu hwazvino hwehollow cathode arc, iyo bias voltage yeion coated workpiece haidi kusvika 1000V, kazhinji 50-200V.

5. Gadzirisa coil ye electromagnetic yakatarisana nekudonha kweGan, uye nzvimbo yemagetsi inogadzirwa nekushandisa ikozvino kune coil inogona kutarisa danda reelectron pakati peingot yesimbi, kuwedzera simba remagetsi ekuyerera kweelectron.