Ibisabwa kugirango habeho cathode ion

Ibikurikira birasabwa gutwika urumuri rwuzuye cathode arc:

1. Imbunda ya cathode yuzuye ikozwe mu muyoboro wa tantalum yashyizwe ku rukuta rwa chambre kandi irashobora gukoreshwa mu gusohora amashanyarazi ashyushye. Diameter y'imbere yigituba kiringaniye ni φ 6 ~ φ 15mm, hamwe nurukuta rwa 0.8-2mm.

1. Amashanyarazi agizwe na arc itangira amashanyarazi hamwe na arc ikomeza gutanga amashanyarazi murwego rumwe. Umuvuduko wa arc ukubita amashanyarazi ni 800-1000V, naho arc ikubita ni 30-50A; Umuvuduko wa arc ni 40-70V, naho arc ya 80-300A.

Inzira yo gusohora ya cathode arc ikurikira inzira yo guhindura ibintu biva mu mucyo udasanzwe ukajya muri arc muri "volt ampere iranga umurongo". Ubwa mbere, amashanyarazi arasabwa gutanga 800V itangira voltage kugirango itange urumuri rwinshi muri tantalum. Ubucucike bukabije bwa argon ion imbere muri tantalum tube bombard hanyuma ushyushya umuyoboro mubushyuhe aho electron zishyushye zisohoka, bikaviramo ubwinshi bwa plasma electron electronique kandi byiyongera gitunguranye mumyuka ya cathode arc yuzuye. Noneho, amashanyarazi menshi arakenewe nayo kugirango akomeze gusohora arc. Inzira yo guhindura ibintu biva mu mucyo ujya kuri arc isohoka mu buryo bwikora, birakenewe rero ko dushiraho amashanyarazi ashobora gusohora amashanyarazi menshi hamwe n’umuyaga mwinshi.

Niba ibi bisabwa byombi byibanze kumasoko imwe yingufu, isohoka rya kabiri ryanyuma rya power transformateur rigomba gukomeretswa ninsinga zibyibushye cyane kugirango zihindurwe kugirango zivemo ingufu nyinshi n’umuvuduko mwinshi, uzaba isoko nini yingufu. Nyuma yimyaka yo gutera imbere, birashoboka kubangikanya arc ntoya itangira amashanyarazi hamwe no kubungabunga arc amashanyarazi. Amashanyarazi atangira amashanyarazi akoresha insinga zoroshye kugirango umuyaga uhindurwe inshuro nyinshi, zishobora gusohora voltage nini ya 800V kugirango ikonge tantalum kandi ikabyara urumuri; Amashanyarazi ya arc arashobora gusohora volt mirongo na amperes amagana yumuyaga muguhinduranya umugozi wijimye hamwe nimpinduka nkeya kugirango ugumane ituze ryimyuka ya cathode arc isohoka. Bitewe no guhuza ibice bibiri bitanga ingufu kumiyoboro ya tantalum, mugihe cyo guhindura ibintu biva mu mucyo udasanzwe ukajya mu gusohora arc, amashanyarazi yombi azahita ahuza kandi ahindurwe ava mumashanyarazi menshi hamwe numuyoboro muke ujya mumashanyarazi make hamwe numuyoboro mwinshi.

1. Hindura vuba urwego rwa vacuum. Urwego rwa vacuum rwo gusohora urumuri muri tantalum ni hafi 100Pa, kandi imiterere ya firime yabitswe mubihe nkibi bya vacuum byanze bikunze. Kubwibyo, nyuma yo gutwika arc isohoka, birakenewe guhita ugabanya umuvuduko wumwuka kandi ugahindura byihuse urwego rwa vacuum kuri 8 × 10-1 ~ 2Pa kugirango ubone imiterere yambere ya firime.

1. Impinduka zakazi zashyizwe hafi yicyumba gitwikiriye, hamwe nakazi kahujwe na pole mbi yumuriro wa bias hamwe nicyumba cya vacuum gihujwe na pole nziza. Bitewe nubucucike buri hejuru bwa cathode ya holhoc arc, voltage ya bias yumurimo wa ion yatwikiriwe ntigomba kugera kuri 1000V, mubisanzwe 50-200V.

5. Shiraho icyerekezo cya electromagnetic coil hafi yo gusenyuka kwa Gan, kandi umurima wa electromagnetique ukomoka mugukoresha amashanyarazi kuri coil urashobora kwerekeza urumuri rwa electron rwagati rwicyuma, bikongerera ingufu imbaraga za electron.