PVD Sputtering: Kupita patsogolo mu Thin Film Coating Technology

Mu sayansi yazinthu ndi uinjiniya, gawo la zokutira zamakanema opyapyala limagwira ntchito yofunika kwambiri m'mafakitale kuyambira zamagetsi mpaka kupanga zapamwamba. Pakati pa matekinoloje osiyanasiyana omwe alipo, kupopera kwa vapor deposition (PVD) kwatulukira ngati njira yatsopano komanso yothandiza yoyika mafilimu opyapyala pazitsulo. Nkhaniyi ifotokoza za dziko la PVD sputtering, kukambirana ntchito zake, maubwino ndi zomwe zachitika posachedwa. PVD sputtering, yomwe imadziwikanso kuti magnetron sputtering, ndi njira yomwe imagwiritsidwa ntchito kwambiri m'makampani a semiconductor kuyika mafilimu opyapyala pazakudya zopyapyala. Zimaphatikizapo kugwiritsa ntchito madzi a m'magazi kuchotsa maatomu pa chinthu chomwe akufuna, chomwe chimayikidwa pagawo laling'ono, kupanga filimu yopyapyala.

Njirayi imapereka zabwino zambiri, monga kuwongolera ndendende makulidwe a kanema, kumamatira kwabwino kwambiri, komanso kuthekera koyika zinthu zosiyanasiyana kuphatikiza zitsulo, ma oxides, ndi nitrides. Kugwiritsa ntchito PVD sputtering ndi kwakukulu komanso kosiyanasiyana. M'makampani amagetsi, nthawi zambiri amagwiritsidwa ntchito kuyika zida zopangira zinthu monga aluminiyamu ndi mkuwa, zomwe zimathandiza kupanga tinthu tating'onoting'ono ndi mabwalo ophatikizika. Kuphatikiza apo, PVD sputtering imagwiritsidwa ntchito kwambiri m'makampani opanga zokutira, monga zokutira zotsutsana ndi magalasi ndi magalasi kuti apititse patsogolo kufalikira kwa kuwala. Kupita patsogolo kwaposachedwa kwaukadaulo wa PVD sputtering kukupangitsa kuti ikhale yotchuka kwambiri. Chinthu chodziwika bwino ndikuyambitsa sputtering, yomwe imatha kuyika mafilimu ang'onoang'ono omwe ali ndi mphamvu zowonjezera. Poyambitsa mpweya wotuluka m'chipinda chosungiramo mpweya panthawi yoyika, opanga amatha kuwongolera mapangidwe ndi stoichiometry ya mafilimu osungidwa, ndikupereka magwiridwe antchito ndi magwiridwe antchito.

Kuphatikiza apo, zopangira zowunikira zakulitsa luso la PVD sputtering. Mwachitsanzo, kugwiritsa ntchito mipherezero yophatikizika yokhala ndi zida zingapo kumatha kuyika makanema apadera apadera okhala ndi mawonekedwe apadera. Izi zimatsegula chitseko cha chitukuko cha zipangizo zatsopano zamagetsi zamakono, kusungirako mphamvu ndi zipangizo zamakono. Mwachidule, PVD sputtering ndi njira yamphamvu yopaka filimu yopyapyala yokhala ndi ntchito zambiri komanso kupita patsogolo kwaposachedwa. Ndi kuwongolera kolondola kwa filimu yopyapyala komanso yogwirizana ndi zida zosiyanasiyana, yakhala yofunika kwambiri m'mafakitale monga zamagetsi ndi zamagetsi. Kufufuza kopitilira muyeso ndi luso laukadaulo wa PVD sputtering akuyembekezeka kupititsa patsogolo luso lake, kupangitsa kuti pakhale zida zatsopano ndikukankhira malire akupita patsogolo kwaukadaulo.

-Nkhaniyi yatulutsidwa ndiwopanga makina opangira vacuumZhenhua Vuta.