Zoyenera kuti zokutira dzenje cathode ion zokutira

Izi ndizofunikira kuti muyatse kuwala kwa cathode arc:

1. Mfuti yopanda dzenje yopangidwa ndi chubu ya tantalum imayikidwa pakhoma lachipinda chotchingira ndipo ingagwiritsidwe ntchito kutulutsa kutuluka kwa ma elekitironi otentha. Mkatikati mwa chubu lathyathyathya ndi φ 6 ~ φ 15mm, ndi makulidwe a khoma la 0.8-2mm.

1. Mphamvu yamagetsi imapangidwa ndi magetsi oyambira arc ndi arc yosunga magetsi molumikizana. Mphamvu yamagetsi yamagetsi a arc ndi 800-1000V, ndipo mphamvu ya arc ndi 30-50A; Mphamvu ya arc ndi 40-70V, ndipo arc panopa ndi 80-300A.

Njira yotulutsa cathode arc yotulutsa imatsata njira yosinthira kuchoka ku kuwala kwachilendo kupita ku arc discharge mu "volt ampere characteristic curve". Choyamba, magetsi amafunikira kuti apereke voteji yoyambira 800V kuti apangitse kutulutsa kowala mu chubu cha tantalum. The mkulu kachulukidwe argon ayoni mkati tantalum chubu bombard ndi kutentha chubu kwa kutentha kumene ma elekitironi otentha limatulutsa, chifukwa mu kuchuluka kwa plasma elekitironi otaya ndi kuwonjezeka mwadzidzidzi panopa wa dzenje cathode arc. Kenako, magetsi apamwamba kwambiri amafunikiranso kuti arc azitulutsa. Njira yosinthira kuchokera ku kutulutsa kowala kupita ku arc kukhetsa ndizodziwikiratu, chifukwa chake ndikofunikira kukonza magetsi omwe amatha kutulutsa ma voliyumu apamwamba komanso apamwamba kwambiri.

Ngati zofunika ziwirizi zikuyang'ana pa gwero limodzi la mphamvu, mapeto achiwiri a chosinthira mphamvu ayenera kuvulazidwa ndi mawaya wandiweyani kwambiri kuti azitha kutembenuka kuti atulutse voteji yapamwamba komanso yamakono, yomwe idzakhala gwero lalikulu lamagetsi. Pambuyo pazaka zakusintha, ndizotheka kufananiza kagawo kakang'ono koyambira ka arc ndi magetsi owongolera arc. Mphamvu yoyambira ya arc imagwiritsa ntchito mawaya opyapyala kuti azitha kuzungulira kangapo, zomwe zimatha kutulutsa voteji yayikulu ya 800V kuyatsa machubu a tantalum ndikupanga kutulutsa kowala; Mphamvu yamagetsi ya arc imatha kutulutsa ma volts makumi ambiri ndi mazana a ma amperes apano pomangirira waya wandiweyani ndi matembenuzidwe ochepa kuti asungike kukhazikika kwa kutulutsa kwa cathode arc. Chifukwa cha kugwirizana kofanana kwa magetsi awiri pa machubu a tantalum, panthawi yosintha kuchokera ku kuwala kwachilendo kupita ku arc kutulutsa, mphamvu ziwirizi zidzagwirizanitsa ndikusintha kuchokera kumagetsi apamwamba ndi otsika mpaka otsika voteji ndi mkulu wamakono.

1. Sinthani mwachangu mulingo wa vacuum. Mulingo wa vacuum wa kutulutsa kowala mu machubu a tantalum ndi pafupifupi 100Pa, ndipo mawonekedwe amakanema omwe amayikidwa pansi pazivumbululo zotsika ngati izi ndizovuta kwambiri. Chifukwa chake, mutatha kuyatsa kutulutsa kwa arc, ndikofunikira kuchepetsa nthawi yomweyo kuchuluka kwa mpweya ndikusinthira mwachangu mulingo wa vacuum kukhala 8 × 10-1 ~ 2Pa kuti mupeze mawonekedwe abwino afilimu.

1. The workpiece turntable waikidwa kuzungulira ❖ kuyanika chipinda, ndi workpiece olumikizidwa ku mtengo zoipa za kukondera magetsi ndi zingalowe chipinda cholumikizidwa ndi mzati zabwino. Chifukwa cha kachulukidwe wamkulu wa cathode arc, kukondera voteji ya ion TACHIMATA workpiece sayenera kufika 1000V, kawirikawiri 50-200V.

5. Khazikitsani koyilo yoyang'ana ma elekitiromaginetiki kuzungulira kugwa kwa Gan, ndipo gawo lamagetsi lomwe limapangidwa ndikugwiritsa ntchito pano pa koyiloyo limatha kuyang'ana mtengo wa elekitironi pakatikati pa ingot yachitsulo, ndikuwonjezera kuchuluka kwamphamvu kwa ma electron.