I roto i te whanaketanga o te hangarau tākai haurua-ira, ko ngā hononga poutū he mea nui tonu hei whakatau i te mahi a te pūnaha, te tapuwae, me te whakapaunga hiko. Mai i ngā tikanga honohono waea me ngā tikanga whakawhiti-maramara ki te putanga mai o ngā IC whakarārangi 3D, kua rapu te umanga i ngā otinga hononga poto ake me te kiato teitei ake.
I roto i tēnei horopaki, kua puta ake a TSV (Through Silicon Via) me TGV (Through Glass Via) hei hangarau honohono poutū matua e rua. He rerekē rāua i roto i ngā pūnaha rauemi, ngā tukanga hanga, ngā āhuatanga mahi, me ngā rohe tono, e tohu ana i tētahi wāhi nui i roto i te whanaketanga takai o te whakatupuranga e whai ake nei.
I. TSV: Paionia o te Tākai 3D
1. Te Mātāpono Hangarau
Ko te TSV e pā ana ki ngā vias ōwehenga-teitei kua whakairohia mā roto i tētahi papa silicon (he tekau ki te rau maikoroni te hohonu), ā, muri iho ka hangaia he paparanga ārai, he paparanga purapura whakarewa, me te whakakī whakarewa (he parahi te nuinga) ki runga i ngā pakitara via. Mā ēnei vias poutū ka taea te hono hiko tere-teitei i waenga i ngā paparanga maramara kua whakarārangihia.
2. Te Rere o te Tukanga
Ko te tukanga hanga TSV noa ko:
Te Whakairo Hōhonu o te Hiraka (DRIE): Waihangahia he via ōwehenga-teitei i roto i te anga hiraka.
Te Whakatakotoranga Paparanga Ārai: Ko te tikanga ka whakamahia te SiO₂ kua whakatakotoria ki te PECVD hei wehe i te whakakī whakarewa mai i te papa silicon mā te hiko.
Te Whakatakotoranga Paparanga Kākano me te Whakakikorua Hiko: Te whakatakotoranga PVD o te paparanga kākano whakarewa, ā, muri iho ka whakakikoruatia ki te parahi.
Te Whakakanapa Matū Ā-Mīhini (CMP): Tangohia te konganuku taikaha kia puta ai he mata papatahi.
3. Ngā Painga me ngā Here
He poto rawa ngā ara hononga a te TSV, he iti te whakaroa o te tohu, he iti te kai hiko, me te whānui o te whānui, ā, he mea tino nui tēnei mō te rorohiko mahi-teitei me te mahara whānui-nui.
Heoi anō, he iti anō ngā herenga o te TSV:
Ngā take ahotea wera: Ka taea e te kore taurite nui o te CTE i waenga i te silicon me te parahi te whakaiti i te pono.
Te utu nui mō ngā tukanga: He uaua, he aro nui hoki ki te hua te whakairo hōhonu, te whakakikorua hiko, me te CMP.
Ngā wero o te whakamarumaru hiko: Ka pā tika te matotoru me te ōritetanga o te paparanga whakamarumaru ki te kaha dielectric.
I te pikinga ake o te kiato whakauru maramara, kua akiakihia te tūhuratanga o ngā rauemi rerekē e ngā taupatupatu i waenga i te hua me te utu—te waihanga i te whai wāhitanga mō te TGV.
II. TGV: Auahatanga Hononga-Karāhe
1. Te Mātāpono Hangarau
Ka whakamahia e TGV ngā papa karāhe hei utu mō te silicon. Ka hangaia ngā vias tino tika mā te keri laser, mā te whakairo mākū rānei, ā, muri iho ka whakatakotoria he paparanga purapura whakarewa me te whakakikorua hiko, ka tutuki ai ngā hononga poutū rite ki te TSV.
He tino pai te ārai hiko o te karāhe, he iti te pūmau dielectric (Dk), he iti te ngaronga dielectric (Df), ā, he tino pumau te āhua, e tino pai ai te TGV mō te tuku tohu tere-tiketike me te takai optoelectronic.
2. Te Rere o te Tukanga
Ko ngā mahi matua o te hanga TGV ko:
Te Keri Taiaho: Ka hangaia e ngā taiaho tino tere ngā moroiti i roto i te karāhe, ko te whānui kei waenga i te 20–150 μm.
Te Whakatakotoranga o te Papa Kākano: Ka whakatakotoria e te PVD, pērā i te magnetron sputtering, he paparanga ara iahiko ōrite ki runga i ngā pakitara via.
Whakakikoruatanga Hiko Konganuku: Ka whakakīia ngā vias e te parahi, te koranu nikara-parahi rānei hei hanga hononga hiko mā roto i te karāhe.
Te Whakamahere me te Tauira: Ka taea te hono atu i ngā paparanga maha, te hononga rānei ki ngā maramara IC.
3. Ngā Painga
Ki te whakatauritea ki te TSV, he maha ngā painga o te TGV:
He iti te ngaronga hiko: Ko te karāhe Dk he tata ki te 1/3 o te silicon, e whakaiti ana i te whakawhitiwhiti tohu me te ngaronga whakaurunga.
Te pumau wera tino pai: He tata te CTE ki ngā konganuku, e whakaiti ana i te ahotea wera.
Māramatanga whatu: Tautoko ana i te whakaurunga optoelectronic ki ngā whakaahua me ngā pūoko.
Utu whakahaere: Kei te pakari haere te keri taiaho me te tukatuka karāhe, he pai mō te whakaputa taumata-panel nui.
III. TSV vs TGV: Whakataurite me ngā Rohe Taupānga
| Taonga | TSV (Mā Silicon Via) | TGV (Mā te Karāhe) |
| Papa raro | Hiraka kotahi-kiriata | Karāhe motuhake (Borofloat, Corning, Schott, me ētahi atu) |
| Te whānui o te kōhao | 5–50 μm | 20–150 μm |
| Te Hōhonutanga o te Pū | 30–100 μm | 100–400 μm |
| Te whakamarumaru | Me whai paparanga ārai atu anō | Te ārai ā-roto o te karāhe |
| Taurite Tauwehenga Whānui Wera | Ngā rerekētanga nui ki te whakataurite ki te Cu | He rite ki te Cu, he iti te ahotea wera |
| Te Utu Tukanga | Teitei | He iti iho |
| Ngā tono | Te Whakatakotoranga Ahu-3 o te Arorau/Mahara | SiP, ngā pūoko, ngā takai hikohiko, ngā pūihi, ngā MEMS |
Ko te TSV tonu te whiringa matua mō te whakarārangi arorau me te mahara 3D mahi-teitei, i te mea kei te tere haere te whānui o te TGV ki te SiP, te whakaurunga optoelectronic, ngā pūoko, me ngā taputapu RF.
I te mea kua eke te rahi o te papa karāhe ki te taumata takai papa (PLP), kei te noho a TGV hei tūāpapa hononga pai mō te whakawhitiwhiti kōrero 5G, te radar motuka, ngā whatu AR, me te takai Mini/Micro LED.
IV. Mai i te Hiraka ki te Karāhe: Ngā Painga Taumata-Pūnaha
Ehara i te mea he whakakapinga rauemi noa iho te whakaurunga mai o te karāhe; engari he panonitanga anō hoki i roto i te rapunga whakaaro hoahoa taumata-pūnaha.
Mahi hiko: Ka whakaitihia e te karāhe Dk iti te whakaroa tohu me te whakapaunga hiko.
Te pono o te hanganga: He pai ake te papatahi o te TGV, he iti ake te piko mō ngā takai whānui.
Ngāwari o te hanga: Mā te tukatuka taiaho me te PVD korehau ka taea te hototahi me te tauine nui o ngā tukanga.
Ina koa, mō te whakaurunga optoelectronic, mā te māramatanga whatu o te karāhe ka taea ngā hoahoa takai e tautokona ana e te papa ngā hononga hiko me ngā arataki ngaru, ngā karāhe arotahi, me ngā matapihi pūoko, he mea uaua ki te whakatutuki me te TSV.
V. ZhenHua Vacuum TGV Concrete Containing Solution
Ngā Painga o ngā Taputapu:
Arotautanga o te Paninga Mā te Hōhonu: He hangarau paninga mā te hōhonu motuhake e kaha ana ki te whakahaere i ngā mā te hōhonu he iti iho i te 30 μm me te ōwehenga āhuatanga >10:1, e aro ana ki ngā wero mā te hōhonu uaua.
Ka taea te whakarite mō ngā Rahi Rerekē: Ka tautoko i ngā papa karāhe tae atu ki te 600×600 mm, 510×515 mm, nui ake rānei.
Ngāwari o te Tukanga: Hototahi ki a Cu, Ti, Ni, Pt, me ētahi atu kiriata angiangi kawe hiko, mahi rānei hei whakatutuki i ngā whakaritenga ātete hiko me te waikura.
Mahi Pūmau me te Tiaki Ngāwari: Kei roto he mana atamai mō te whakarerekētanga tawhā aunoa me te aroturukitanga wā-tūturu o te ōritetanga matotoru; ka āwhina te hoahoa modular i te tiaki me te whakaiti i te wā kore mahi.
Whānuitanga Whakamahinga: He pai mō ngā takai matatau TGV/TSV/TMV, ka tutuki ai he paninga paparanga purapura hōhonu me te ōwehenga āhua 10:1.
—I whakaputaina tēnei tuhinga etaputapu paninga korehau kaihanga Zhenhua Vacuum
Wā tuku: Oketopa-16-2025