Ngā tikanga whakahaere noa o te pūnaha korehau mīhini paninga mimiti

He tino kaha ngā whakaritenga a te mīhini paninga mimiti korehau mō te whakahaere o ngā pūnaha korehau maha, te tukanga tīmatanga-mutu, te tiaki i te parahanga ina puta he hapa, me ētahi atu, ā, me tutuki hoki ngā tikanga whakahaere.

1. Ngā papu miihini, ka taea anake te papu ki te 15Pa~20Pa, neke atu rānei, ki te kore ka puta he raruraru nui ki te parahanga o te rerenga whakamuri.
2, papu Adsorption, hei whirihora i te taputapu pakaru anti-pēhanga, hei karo i ngā aituā i muri i te tuara mahana.
3, Ina mutu, me wehe te mahanga makariri mai i te rūma korehau, ā, me mutu te papu korehau teitei i muri i te whakakorenga o te hauota wai me te whakahokinga mai o te pāmahana.
4, papu horapa, i mua i te mahi noa me te whakamutu i te papu i roto i te 20 meneti, he tino nui te parahanga o te kohu hinu, no reira kaua e hono ki te rūma korehau, ki te mahanga makariri rānei.
5, Tātari ngota, karohia te mahanga mimiti o te tātari ngota i roto i te paura totoka o te tātari ngota, te mimiti rānei e te papu miihini. Mena kāore e taea e te pūnaha korehau o te mīhini paninga mimiti te eke ki te taumata korehau e hiahiatia ana, kāore rānei e taea te papu, ka taea e koe te tirotiro i te āhua mahi o te taputapu papu i te tuatahi, kātahi ka tirohia mēnā kei reira te puna toto. I mua i te huihuinga o ngā wāhanga korehau, me horoi te pūnaha korehau, me whakamaroke, me tirotiro mō ngā turuturu, kātahi ka whakamahia i muri i te whakamanatanga. Kātahi ka tirohia te āhua ma o te mowhiti hiri wāhanga tango, te raruraru rakuraku o te mata hiri, te raruraru hononga piri, me ētahi atu.

Ngā taputapu paninga ārai-matimati

Ka whakamahia e te mīhini paninga ārai-matimati te hangarau hanga kiriata magnetron sputtering, e kore e whakaoti noa i ngā raruraru mahi o te piri o te kiriata, te pakeke, te ātete paru, te ātete waku, te ātete whakarewa, te ātete koroheketanga, te ātete pupuhi me te ātete kohua, engari ka taea hoki te whakaputa kiriata AR me te kiriata AF i roto i te oumu kotahi, he mea tino pai mō te whakaputa papatipu o te whakapaipai tae mata whakarewa me te karāhe, te kiriata AR, te kiriata AF/AS. He nui te kaha utaina o te taputapu, he tino pai te mahi, he māmā te tukanga, he ngāwari te whakahaere me te pai o te ōrite o te paparanga kiriata. Haunga te mahi pai o te paparanga kiriata, he tukanga hoa taiao anō hoki.

Kua whānuitia te whakamahinga o ngā taputapu nei hei paparanga i roto i te mara tukatuka mata o te taupoki karāhe waea pūkoro, te arotahi waea pūkoro, te kiriata ātete-pahū, me ētahi atu, hei paninga AR+AF, kia pai ake ai te ātete o ēnei hua ki te paru, kia māmā ake ai te horoi i te mata, kia roa ake ai hoki te ora.