Hauv cov ntaub ntawv kev tshawb fawb thiab kev tsim vaj tsev, thaj chaw ntawm cov yeeb yaj kiab nyias txheej ua lub luag haujlwm tseem ceeb hauv kev lag luam xws li hluav taws xob mus rau kev tsim khoom siab heev. Ntawm cov thev naus laus zis sib txawv muaj, lub cev vapor deposition (PVD) sputtering tau tshwm sim los ua ib txoj hauv kev tshiab thiab muaj txiaj ntsig rau kev tso cov yeeb yaj kiab nyias ntawm cov substrates. Kab lus no yuav delve rau hauv lub ntiaj teb no ntawm PVD sputtering, sib tham txog nws cov kev siv, cov txiaj ntsig thiab kev tsim kho tshiab. PVD sputtering, tseem hu ua magnetron sputtering, yog cov txheej txheem dav siv hauv kev lag luam semiconductor los tso cov yeeb yaj kiab nyias ntawm wafers. Nws suav nrog kev siv cov ntshav plasma tshem tawm cov atoms los ntawm lub hom phiaj cov khoom, uas tom qab ntawd muab tso rau hauv lub substrate, tsim ib zaj duab xis nyias.
Cov txheej txheem muaj ntau yam zoo, xws li kev tswj xyuas meej ntawm cov yeeb yaj kiab tuab, zoo adhesion, thiab muaj peev xwm tso ntau yam khoom xws li hlau, oxides, thiab nitrides. Kev siv ntawm PVD sputtering yog dav thiab ntau yam. Hauv kev lag luam hluav taws xob, feem ntau yog siv los tso cov khoom siv hluav taws xob xws li txhuas thiab tooj liab, uas ua rau cov khoom siv me me thiab kev sib xyaw ua ke. Tsis tas li ntawd, PVD sputtering yog siv dav hauv kev lag luam kho qhov muag, xws li cov tshuaj tiv thaiv kev cuam tshuam ntawm lo ntsiab muag thiab tsom iav los txhim kho lub teeb kis tau tus mob. Kev nce qib tsis ntev los no hauv PVD sputtering thev naus laus zis tau ua rau nws nrov dua. Ib qho kev txhim kho tseem ceeb yog kev taw qhia ntawm reactive sputtering, uas tuaj yeem tso cov yeeb yaj kiab nyias ntawm cov tebchaw nrog cov khoom zoo. Los ntawm kev qhia cov pa roj reactive rau hauv lub tshuab nqus tsev thaum lub sij hawm tso tawm, cov tuam ntxhab tuaj yeem tswj cov muaj pes tsawg leeg thiab stoichiometry ntawm cov yeeb yaj kiab tso, muab kev ua tau zoo thiab kev ua haujlwm.
Tsis tas li ntawd, lub hom phiaj kev tsim kho tshiab tau nthuav dav lub peev xwm ntawm PVD sputtering. Piv txwv li, siv cov hom phiaj sib xyaw uas muaj ntau yam ntaub ntawv tuaj yeem tso cov yeeb yaj kiab tshwj xeeb tshwj xeeb nrog cov khoom tshwj xeeb. Qhov no qhib qhov rooj rau kev tsim cov ntaub ntawv tshiab rau cov khoom siv hluav taws xob siab, lub zog cia thiab cov khoom siv biomedical. Hauv cov ntsiab lus, PVD sputtering yog cov txheej txheem nyias nyias txheej txheej txheej txheem nrog ntau yam kev siv thiab kev nce qib tsis ntev los no. Nrog rau kev tswj xyuas meej ntawm nyias zaj duab xis tso tawm thiab kev sib raug zoo nrog ntau yam ntaub ntawv, nws tau dhau los ua ib qho tseem ceeb hauv kev lag luam xws li electronics thiab optics. Kev tshawb fawb tsis tu ncua thiab kev tsim kho tshiab hauv kev ua haujlwm ntawm PVD sputtering yog xav kom ntxiv dag zog rau nws cov peev xwm, ua kom muaj kev tsim cov ntaub ntawv tshiab thiab thawb cov ciam teb ntawm kev nce qib thev naus laus zis.
– Zaj lus no yog tso tawm los ntawmtshuab nqus tsev txheej tshuab manufacturersZhenhua Vacuum.
Post lub sij hawm: May-27-2025