Cov xwm txheej hauv qab no yuav tsum tau ignite lub hollow cathode arc teeb:
- Lub hollow cathode phom ua los ntawm tantalum raj yog ntsia rau ntawm lub txheej chamber phab ntsa thiab yuav siv tau los emit kub electron ntws. Sab hauv txoj kab uas hla ntawm lub tiaj tiaj yog φ 6 ~ φ 15mm, nrog phab ntsa tuab ntawm 0.8-2mm.
- Lub hwj chim mov yog tsim los ntawm ib tug arc pib fais fab mov thiab ib tug arc tswj fais fab mov nyob rau hauv parallel. Qhov hluav taws xob ntawm qhov hluav taws xob tawm hluav taws xob yog 800-1000V, thiab qhov hluav taws xob tam sim no yog 30-50A; Lub arc voltage yog 40-70V, thiab arc tam sim no yog 80-300A.
Cov txheej txheem hollow cathode arc tawm ua raws cov txheej txheem ntawm kev hloov pauv los ntawm qhov txawv txav mus rau arc tawm hauv "volt ampere yam ntxwv nkhaus". Ua ntej, lub hwj huam mov yuav tsum tau muab 800V pib qhov hluav taws xob los ua kom muaj hluav taws xob tawm hauv lub raj tantalum. Lub high-density argon ions nyob rau hauv lub tantalum raj bombard thiab cua sov lub raj mus rau qhov kub qhov twg kub electrons yog emissions, uas ua rau ib tug loj npaum li cas ntawm plasma electron txaus thiab ib tug sai li sai tau nce nyob rau hauv lub hollow cathode arc. Tom qab ntawd, lub zog tam sim no kuj tseem xav tau los tswj lub arc tawm. Cov txheej txheem ntawm kev hloov los ntawm glow tawm mus rau arc tawm yog tsis siv neeg, yog li nws yog ib qho tsim nyog los teeb tsa lub zog hluav taws xob uas tuaj yeem tso tawm ob qho tib si high voltage thiab siab tam sim no.
Yog hais tias ob qho kev xav tau no yog tsom rau ntawm ib qho chaw siv hluav taws xob, cov khoom siv hluav taws xob thib ob kawg ntawm lub zog hloov hluav taws xob yuav tsum raug mob nrog cov xov hlau tuab heev rau ntau lub lem thiaj li yuav tso tawm qhov hluav taws xob siab thiab siab tam sim no, uas yuav yog lub zog ntim loj. Tom qab xyoo ntawm kev txhim kho, nws muaj peev xwm mus rau parallelize ib tug me me arc pib fais fab mov nrog ib tug txij nkawm arc fais fab mov. Lub arc pib fais fab mov siv cov xov hlau nyias nyias los ua cua ntau zaus, uas tuaj yeem tso tawm qhov hluav taws xob siab ntawm 800V rau ignite tantalum hlab thiab tsim kom muaj qhov paug tawm; Lub arc fais fab mov tuaj yeem tso tawm kaum tawm volts thiab ntau pua ntawm amperes ntawm tam sim no los ntawm winding ib tug tuab hlau nrog tsawg lem los tuav lub stability ntawm lub hollow cathode arc paug. Vim yog kev sib txuas ntawm ob lub zog siv hluav taws xob ntawm cov raj tantalum, thaum lub sijhawm hloov pauv los ntawm qhov txawv txav mus rau arc tawm, ob lub zog siv hluav taws xob yuav cia li txuas thiab hloov ntawm qhov hluav taws xob siab thiab qis tam sim no mus rau qhov tsis tshua muaj hluav taws xob thiab siab tam sim no.
- Kho lub tshuab nqus tsev sai sai. Lub nqus tsev vacuum rau glow paug nyob rau hauv tantalum hlab yog nyob ib ncig ntawm 100Pa, thiab cov deposited zaj duab xis qauv nyob rau hauv xws li cov tsis tshua muaj lub tshuab nqus tsev tej yam kev mob yog inevitably ntxhib. Yog li ntawd, tom qab igniting lub arc tawm, nws yog ib qho tsim nyog yuav tsum tam sim ntawd txo tus nqi ntawm cov huab cua ntws thiab sai kho lub nqus tsev vacuum theem rau 8 × 10-1 ~ 2Pa kom tau ib tug zoo thawj zaj duab xis qauv.
- Lub workpiece turntable yog ntsia nyob ib ncig ntawm lub txheej chamber, nrog rau lub workpiece txuas nrog tus ncej tsis zoo ntawm lub hwj chim tsis ncaj ncees lawm thiab lub tshuab nqus tsev chamber txuas nrog tus ncej zoo. Vim lub siab tam sim no ceev ntawm lub hollow cathode arc, qhov kev tsis ncaj ncees voltage ntawm ion coated workpiece tsis tas yuav ncav cuag 1000V, feem ntau 50-200V.
5. Teem lub tsom electromagnetic coil nyob ib ncig ntawm lub Gan vau, thiab lub electromagnetic teb generated los ntawm kev thov tam sim no rau lub kauj yuav tsom lub electron beam nyob rau hauv nruab nrab ntawm cov hlau ingot, ua rau lub zog ceev ntawm electron txaus.
Post lub sij hawm: Lub Xya hli ntuj-20-2023