ʻO PVD Sputtering: He holomua i ka ʻenehana uhi kiʻiʻoniʻoni lahilahi

Ma ka ʻepekema waiwai a me ka ʻenekinia, he kuleana koʻikoʻi ke kahua o ka uhi kiʻiʻoniʻoni ʻoniʻoni i nā ʻoihana mai ka uila a hiki i ka hana holomua. Ma waena o nā ʻenehana like ʻole i loaʻa, ua puka mai ka hoʻoheheʻe kino kino (PVD) sputtering ma ke ʻano he ala hou a maikaʻi hoʻi no ka waiho ʻana i nā kiʻiʻoniʻoni lahilahi ma nā substrates. E komo kēia ʻatikala i ka honua o PVD sputtering, e kūkākūkā ana i kāna mau noi, nā pōmaikaʻi a me nā mea hou loa. ʻO ka PVD sputtering, i ʻike ʻia ʻo magnetron sputtering, he ʻano hana i hoʻohana nui ʻia i ka ʻoihana semiconductor e waiho i nā kiʻiʻoniʻoni lahilahi ma nā wafers. Hoʻohana ia i ka plasma no ka wehe ʻana i nā ʻātoma mai kahi mea i hoʻopaʻa ʻia, a laila waiho ʻia ma luna o kahi substrate, e hana ana i kahi kiʻiʻoniʻoni lahilahi.

Hāʻawi ke kaʻina hana i nā pono he nui, e like me ka mana pololei o ka mānoanoa kiʻiʻoniʻoni, adhesion maikaʻi loa, a me ka hiki ke waiho i nā ʻano mea like ʻole me nā metala, oxides, a me nitrides. He ākea a ʻokoʻa nā noi o ka PVD sputtering. I ka ʻoihana uila, hoʻohana maʻamau ia e waiho i nā mea conductive e like me ke alumini a me ke keleawe, e hiki ai ke hana i nā ʻāpana liʻiliʻi a me nā kaʻa hoʻohui. Eia kekahi, hoʻohana nui ʻia ka PVD sputtering i ka ʻoihana hoʻopiʻi optical, e like me nā pale anti-reflective ma nā lens a me nā aniani e hoʻomaikaʻi i ka hana hoʻouna māmā. ʻO nā holomua hou i ka ʻenehana sputtering PVD e hoʻonui a kaulana. ʻO kahi hoʻomohala kaulana ʻo ka hoʻokomo ʻana i ka sputtering reactive, hiki ke waiho i nā kiʻiʻoniʻoni lahilahi o nā pūhui me nā waiwai i hoʻonui ʻia. Ma ka hoʻokomo ʻana i nā kinoea reactive i loko o ke keʻena māmā i ka wā o ka waiho ʻana, hiki i nā mea hana ke hoʻomalu i ka haku mele a me ka stoichiometry o nā kiʻiʻoniʻoni i waiho ʻia, me ka hoʻomaikaʻi ʻana i ka hana a me ka hana.

Eia kekahi, ua hoʻonui nā mea hou i nā mana o ka PVD sputtering. No ka laʻana, hiki i ka hoʻohana ʻana i nā pahuhopu composite i loaʻa i nā mea he nui ke waiho i nā kiʻiʻoniʻoni lahilahi kūikawā me nā waiwai kūʻokoʻa. Wehe kēia i ka puka i ka hoʻomohala ʻana i nā mea hou no ka uila kiʻekiʻe, ka mālama ʻana i ka ikehu a me nā mea biomedical. I ka hōʻuluʻulu ʻana, ʻo PVD sputtering kahi ʻenehana hoʻopiʻi kiʻiʻoniʻoni lahilahi me kahi ākea o nā noi a me nā holomua hou. Me ka mana pololei i ka waiho ʻana o nā kiʻiʻoniʻoni lahilahi a me ka hoʻohālikelike ʻana me nā mea like ʻole, ua lilo ia i mea nui i nā ʻoihana e like me ka uila a me ka optics. Ke hoʻomau nei ka noiʻi a me ka hana hou i ke kahua o ka sputtering PVD e manaʻo ʻia e hoʻonui hou i kona hiki, e hiki ai ke hana i nā mea hou a me ka pana ʻana i nā palena o ka holomua ʻenehana.

-Ua hoʻokuʻu ʻia kēia ʻatikala emea hana mīkini hoʻopaʻa haʻahaʻaZhenhua Vacuum.