Gabatarwar jigon tururi, sputtering da ion shafi

Vacuum shafi yafi hada da injin tururi jijiya, sputtering shafi da ion shafi, duk abin da ake amfani da su ajiya daban-daban karfe da kuma wadanda ba karfe fina-finan a saman na roba sassa ta distillation ko sputtering a karkashin injin yanayi, wanda zai iya samun wani bakin ciki surface shafi. tare da fitaccen fa'idar mannewa da sauri, amma farashin kuma ya fi girma, kuma nau'ikan karafa da za a iya sarrafa su ba su da yawa, kuma ana amfani da su gabaɗaya don aikin shafi na samfuran mafi girma.

Matsakaicin tururi hanya ce ta dumama ƙarfe a ƙarƙashin babban injin, sanya shi narke, ƙafe, da samar da fim ɗin ƙarfe na bakin ciki a saman samfurin bayan sanyaya, tare da kauri na 0.8-1.2 um.Yana cika cikin ƙananan ƙananan sassa da ƙananan sassa a saman samfurin da aka kafa don samun nau'i-nau'i-kamar madubi.Lokacin da aka yi amfani da tururi mai tsabta ko dai don samun tasirin madubi mai nunawa ko don zubar da karfe tare da ƙananan mannewa, ƙasan ƙasa. dole ne a rufe.

Sputtering yawanci yana nufin sputtering magnetron, wanda shine hanya mai saurin zafi mai sauri.Tsarin yana buƙatar vacuum na kusan 1 × 10-3Torr, wato 1.3 × 10-3Pa vacuum state cike da inert gas argon (Ar), da kuma tsakanin filastik substrate (anode) da karfe manufa (cathode) da high-voltage. kai tsaye, saboda motsin wutar lantarki na iskar gas da ke haifar da fitarwa mai haske, samar da plasma, plasma za ta fitar da atom na karfen da aka yi niyya sannan ya ajiye su a kan filastik.Yawancin kayan aikin ƙarfe na gabaɗaya suna amfani da sputtering DC, yayin da kayan yumbu marasa ƙarfi suna amfani da sputtering RF AC.

Ion shafi wata hanya ce da ake amfani da fitar da iskar gas don yin juzu'i na ionize iskar gas ko abin da aka ƙafe a ƙarƙashin yanayi mara kyau, kuma abin da ya ƙafe ko na'urar amsawa ana ajiye shi akan ma'aunin ta hanyar bama-bamai na ions ko ions na abubuwan da aka ƙafe.Waɗannan sun haɗa da suturar ion magnetron sputtering ion, murfin ion mai amsawa, murfin cathode sallamar ion mai zurfi (hanyar ajiyar tururi mai fa'ida), da murfin ion da yawa (rufin cathode arc ion).

A tsaye magnetron mai gefe biyu sputtering ci gaba da shafi a layi
Za'a iya amfani da fa'ida, don samfuran lantarki kamar littafin kariya harsashi EMI Layer, samfuran lebur, har ma da duk samfuran ƙoƙon fitila a cikin takamaiman ƙayyadaddun tsayi.Babban ƙarfin lodi, ƙarami mai ɗorewa da matse kofuna masu haske na conical don shafi mai gefe biyu, wanda zai iya samun ƙarfin lodi mai girma.Ingancin kwanciyar hankali, daidaito mai kyau na fim ɗin fim daga tsari zuwa tsari.Babban digiri na atomatik da ƙananan farashin aiki.