Emkhakheni wobuchwepheshe bokufaka ifilimu encane, ukufaka i-cylindrical magnetron sputtering sekuyindlela ephumelelayo neguquguqukayo. Lobu buchwepheshe obusha buhlinzeka abacwaningi kanye nochwepheshe bemboni indlela yokufaka amafilimu amancane ngokunemba okumangalisayo kanye nokufana. Ukufaka i-cylindrical magnetron sputtering kusetshenziswa kabanzi ezimbonini ezahlukahlukene futhi kuguqula inqubo yokufaka ifilimu encane.
I-cylindrical magnetron sputtering, eyaziwa nangokuthi i-cylindrical magnetron sputtering coating, ubuchwepheshe bokufaka umphunga obusebenzisa ama-cylindrical magnetron cathodes. Isimiso sayo sokusebenza sihilela ukudala i-plasma lapho ama-ion esheshiswa khona aye endaweni ethile bese ekhipha ama-athomu ayo. Lawa ma-athomu abe esefakwa ku-substrate ukuze akhe ifilimu encane.
Enye yezinzuzo eziyinhloko zokufaka i-cylindrical magnetron sputtering yikhono lokufinyelela amazinga aphezulu okufaka i-film ngenkathi kugcinwa ikhwalithi yefilimu enhle kakhulu. Ngokungafani namasu okusebenzisa i-sputtering avamile, avame ukuholela ekwehleni kwekhwalithi yefilimu ngamanani aphezulu okufaka i-film, ukufaka i-cylindrical magnetron sputtering kuqinisekisa ukuthi ubuqotho befilimu kanye nokwakheka kwayo kugcinwa kuyo yonke inqubo yokufaka i-film.
Ngaphezu kwalokho, ukwakheka kwesilinda kwe-magnetron cathode kuvumela ukusatshalaliswa okufanayo kwe-plasma kanye ne-magnetic field, ngaleyo ndlela kuthuthukisa ukufana kwefilimu. Lokhu kufana kubalulekile ezinhlelweni zokusebenza ezidinga izakhiwo zefilimu ezihambisanayo kulo lonke ubuso be-substrate. Izimboni ezifana ne-optics, i-electronics kanye namandla elanga ziye zazuza kakhulu emandleni athuthukile okuphalaza kwe-magnetron yesilinda.
Ukusetshenziswa kwe-cylindrical magnetron sputtering kudlulela ngale kwezicelo zendabuko. Abacwaningi nonjiniyela bahlala behlola izindlela ezintsha zokusebenzisa lobu buchwepheshe emikhakheni esezingeni eliphezulu njenge-nanotechnology kanye ne-biomedicine. Amandla okulawula ngokunembile amapharamitha okubeka, njengokwakheka kwegesi, ingcindezi, kanye namandla, kuvumela ukudalwa kwamafilimu enziwe ngokwezifiso anezakhiwo ezilungiselelwe kahle ezifanelekile izinhlelo zokusebenza ezithile.
Ukwethulwa kwamagesi asabelayo kwandisa kakhulu amandla okuphalaza kwe-magnetron ngesilinda. Ngokungenisa amagesi asabelayo njenge-nitrogen noma i-oxygen, ama-composite angafakwa noma kukhiqizwe ama-composite efilimu amancane anezakhiwo ezihlukile. Lokhu kuvula izindlela ezintsha zokuhlola izinto ezithuthukisiwe ezinokusebenza okuthuthukisiwe, njengokumelana nokuguguleka okuthuthukisiwe, ukuqina okwandisiwe noma ukumelana nokugqwala okuphezulu.
Ngaphezu kwalokho, inqubo yokuphalaza i-cylindrical magnetron ingandiswa kalula, okwenza ifanelekele ukusetshenziswa kwezimboni ezinkulu. Lokhu kukhula, kuhlanganiswe nokusebenza kahle kwayo kanye nokuguquguquka kwayo, kuholele ekwandeni kokwamukelwa kwalobu buchwepheshe yizimboni ezidinga amafilimu amancane ukuthi afakwe ngesikhathi sezinqubo zokukhiqiza.
Njenganoma yiluphi ubuchwepheshe obuthuthukisiwe, imizamo yocwaningo nentuthuko eqhubekayo iyaqhubeka nokuthuthukisa amakhono okusebenzisa i-cylindrical magnetron sputtering. Abacwaningi basebenza ukuze bathuthukise amapharamitha enqubo, balungise izinto eziqondiwe futhi bahlole imiklamo ye-cathode ehlukile ukuze bathuthukise ukusebenza kahle kokufakwa kobuchwepheshe kanye nokusebenza okuphelele.
–Lesi sihloko sikhishwe yi-umenzi womshini wokumboza nge-vacuumI-Guangdong Zhenhua
Isikhathi sokuthunyelwe: Okthoba-26-2023