Hauv kev siv tshuab tso cov zaj duab xis nyias, cylindrical magnetron sputtering tau dhau los ua ib txoj hauv kev zoo thiab siv tau ntau yam. Cov thev naus laus zis tshiab no muab rau cov kws tshawb fawb thiab cov kws tshaj lij hauv kev lag luam ib txoj hauv kev los tso cov zaj duab xis nyias nrog qhov tseeb thiab sib xws. Cylindrical magnetron sputtering yog siv dav hauv ntau yam lag luam thiab tab tom hloov pauv txoj hauv kev tso cov zaj duab xis nyias.
Cylindrical magnetron sputtering, tseem hu ua cylindrical magnetron sputtering txheej, yog ib qho thev naus laus zis tso pa tawm uas siv cov cathodes cylindrical magnetron. Nws txoj cai ua haujlwm suav nrog kev tsim cov plasma uas cov ions raug nrawm mus rau cov khoom siv thiab ntiab tawm nws cov atoms. Cov atoms no tom qab ntawd raug tso rau ntawm lub substrate los tsim ib zaj duab xis nyias.
Ib qho ntawm cov txiaj ntsig tseem ceeb ntawm cylindrical magnetron sputtering yog lub peev xwm los ua tiav cov nqi tso tawm siab thaum tswj hwm cov yeeb yaj kiab zoo heev. Tsis zoo li cov txheej txheem sputtering ib txwm muaj, uas feem ntau ua rau cov yeeb yaj kiab zoo dua ntawm cov nqi tso tawm siab dua, cylindrical magnetron sputtering ua kom ntseeg tau tias cov yeeb yaj kiab zoo thiab cov khoom sib xyaw tau khaws cia thoob plaws hauv cov txheej txheem tso tawm.
Tsis tas li ntawd xwb, tus qauv cylindrical ntawm lub magnetron cathode tso cai rau kev faib cov plasma thiab magnetic field ntau dua, yog li ua kom cov zaj duab xis sib xws. Qhov kev sib xws no yog qhov tseem ceeb rau cov ntawv thov uas xav tau cov khoom zoo sib xws thoob plaws tag nrho cov substrate nto. Kev lag luam xws li optics, electronics thiab lub zog hnub ci tau txais txiaj ntsig zoo los ntawm cov peev xwm siab heev ntawm cylindrical magnetron sputtering.
Kev siv cov cylindrical magnetron sputtering txuas ntxiv mus rau ntau tshaj li cov kev siv ib txwm muaj. Cov kws tshawb fawb thiab cov engineers yeej ib txwm tshawb nrhiav txoj hauv kev tshiab los siv cov thev naus laus zis no hauv cov teb tshiab xws li nanotechnology thiab biomedicine. Lub peev xwm los tswj cov kev tso tawm, xws li cov roj sib xyaw, siab, thiab lub zog, tso cai rau kev tsim cov yeeb yaj kiab customized nrog cov khoom tsim nyog rau cov ntawv thov tshwj xeeb.
Qhov kev qhia txog cov pa roj reactive ntxiv nthuav dav lub peev xwm ntawm cylindrical magnetron sputtering. Los ntawm kev qhia txog cov pa roj reactive xws li nitrogen lossis oxygen, cov khoom sib xyaw tuaj yeem tso rau hauv lossis cov khoom sib xyaw ua ke nrog cov khoom tshwj xeeb tuaj yeem tsim tau. Qhov no qhib txoj hauv kev tshiab los tshawb nrhiav cov ntaub ntawv siab heev nrog kev ua haujlwm zoo dua, xws li kev tiv thaiv kev hnav zoo dua, kev tawv dua lossis kev tiv thaiv corrosion zoo dua.
Tsis tas li ntawd xwb, cov txheej txheem cylindrical magnetron sputtering tuaj yeem yooj yim scaled up, ua rau nws tsim nyog rau cov ntawv thov kev lag luam loj. Qhov scalability no, ua ke nrog nws cov kev ua haujlwm zoo thiab versatility, tau ua rau muaj kev siv cov thev naus laus zis no ntau ntxiv los ntawm cov lag luam uas xav tau cov yeeb yaj kiab nyias nyias kom tso rau hauv cov txheej txheem tsim khoom.
Ib yam li lwm yam thev naus laus zis siab heev, kev tshawb fawb thiab kev txhim kho uas tseem niaj hnub ua mus ntxiv txuas ntxiv txhim kho cov peev xwm ntawm cylindrical magnetron sputtering. Cov kws tshawb fawb tab tom ua haujlwm los txhim kho cov txheej txheem, ua kom zoo dua cov ntaub ntawv thiab tshawb nrhiav lwm cov qauv cathode kom txhim kho cov thev naus laus zis qhov kev ua haujlwm zoo thiab kev ua tau zoo tag nrho.
– Tsab xov xwm no yog tso tawm los ntawmlub tshuab nqus tsev txheej tshuab chaw tsim khoomGuangdong Zhenhua
Lub sijhawm tshaj tawm: Lub Kaum Hli-26-2023