Kwicandelo lobuchwepheshe bokufaka iifilimu ezincinci, ukutshiza ngemagnetron esilinda kuye kwaba yindlela esebenzayo neguquguqukayo. Le teknoloji intsha inika abaphandi kunye neengcali zoshishino indlela yokufaka iifilimu ezincinci ngokuchanekileyo nangokufana okugqwesileyo. Ukutshiza ngemagnetron esilinda kusetyenziswa kakhulu kumashishini ahlukeneyo kwaye kuguqula inkqubo yokubeka iifilimu ezincinci.
I-cylindrical magnetron sputtering, ekwaziwa ngokuba yi-cylindrical magnetron sputtering coating, yiteknoloji yokubeka umphunga obonakalayo esebenzisa ii-cylindrical magnetron cathodes. Umgaqo wayo wokusebenza ubandakanya ukudala i-plasma apho ii-ion zikhawuleziswa khona ukuya kwizinto ezijoliswe kuzo kwaye zikhuphe ii-athomu zayo. Ezi athomu emva koko zifakwa kwi-substrate ukuze zenze ifilimu encinci.
Enye yezona nzuzo ziphambili zokutshiza nge-cylindrical magnetron kukukwazi ukufikelela kumazinga aphezulu okufakwa kwefilimu ngelixa kugcinwa umgangatho wefilimu ogqwesileyo. Ngokungafaniyo neendlela zemveli zokutshiza, ezidla ngokukhokelela ekunciphiseni umgangatho wefilimu kumazinga aphezulu okufakwa kwefilimu, ukutshiza nge-cylindrical magnetron kuqinisekisa ukuba ukuthembeka kwefilimu kunye nokwakheka kwayo kugcinwa kuyo yonke inkqubo yokufakwa kwefilimu.
Ukongeza, uyilo lwesilinda lwe-magnetron cathode luvumela ukusasazwa kweplasma kunye ne-magnetic field okufanayo, ngaloo ndlela kuphucula ukufana kwefilimu. Oku kufana kubaluleke kakhulu kwizicelo ezifuna iipropati zefilimu ezihambelanayo kuwo wonke umphezulu we-substrate. Amashishini afana ne-optics, i-electronics kunye namandla elanga azuze kakhulu kubuchule obuphambili bokutshiza i-magnetron yesilinda.
Ukusetyenziswa kwe-cylindrical magnetron sputtering kudlulela ngaphaya kwezicelo zemveli. Abaphandi kunye neenjineli bahlala behlola iindlela ezintsha zokusebenzisa obu buchwepheshe kwiindawo eziphambili ezifana ne-nanotechnology kunye ne-biomedicine. Amandla okulawula ngokuchanekileyo iiparameter zokubeka, ezifana nokwakheka kwegesi, uxinzelelo, kunye namandla, kuvumela ukudalwa kweefilimu ezenzelwe wena ezineempawu ezilungiselelwe wena ezifanelekileyo kwizicelo ezithile.
Ukungeniswa kweegesi ezisabelayo kwandisa ngakumbi amandla okutshiza kwe-cylindrical magnetron. Ngokungenisa iigesi ezisabelayo ezifana ne-nitrogen okanye i-oxygen, ii-composites zinokubekwa okanye kuveliswe ii-composites zefilimu ezincinci ezineempawu ezikhethekileyo. Oku kuvula iindlela ezintsha zokuhlola izixhobo eziphambili ezinemisebenzi ephuculweyo, ezinje ngokumelana nokuguguleka okuphuculweyo, ubunzima obongezelelekileyo okanye ukumelana nokugqwala okuphezulu.
Ngaphezu koko, inkqubo yokutshiza i-cylindrical magnetron inokwandiswa ngokulula, nto leyo eyenza ifaneleke kwizicelo ezinkulu zoshishino. Oku kukhula, kunye nokusebenza kwayo kakuhle kunye nokuguquguquka kwayo, kukhokelele ekwandiseni ukwamkelwa kobu buchwepheshe ngamashishini afuna iifilimu ezincinci ukuba zifakwe ngexesha leenkqubo zokuvelisa.
Njengakweminye iteknoloji ephucukileyo, imizamo yophando nophuhliso eqhubekayo iyaqhubeka nokuphucula amandla okutshiza ngemagnetron ngesilinda. Abaphandi basebenza ukuphucula iiparameter zenkqubo, ukuphucula izixhobo ekujoliswe kuzo kunye nokuphonononga ezinye iindlela zoyilo lwe-cathode ukuphucula ngakumbi ukusebenza kakuhle kokubekwa kweteknoloji kunye nokusebenza kwayo iyonke.
–Eli nqaku likhutshwe nguumenzi womatshini wokugquma nge-vacuumGuangdong Zhenhua
Ixesha lokuthumela: Okthobha-26-2023