Mu rwego rw'ikoranabuhanga ryo gushyiramo filime ntoya, gukoresha magnetron silinda byatumye habaho uburyo bwiza kandi bukoreshwa mu buryo butandukanye. Ubu buryo bushya buha abashakashatsi n'inzobere mu nganda uburyo bwo gushyiramo filime ntoya mu buryo bunoze kandi bungana. Gukoresha magnetron silinda mu nganda bikoreshwa cyane mu nganda zitandukanye kandi birimo guhindura uburyo bwo gushyiramo filime ntoya.
Gukoresha magnetron sputtering mu buryo bwa cylindrical, bizwi kandi nka cylindrical magnetron sputtering coating, ni ikoranabuhanga rikoresha amashanyarazi akoresha magnetron cathodes. Ihame ryayo rikora rikubiyemo gukora plasma aho iyoni zihutishwa zigana ku kintu runaka hanyuma zigasohora atome zayo. Izi atome zishyirwa ku gice cy'ingenzi kugira ngo zikore filime nto.
Imwe mu nyungu z'ingenzi zo gukoresha magnetron mu buryo bwa cylindrical ni ubushobozi bwo kugera ku gipimo cyo hejuru cyo gushyiramo filime ariko igakomeza kuba nziza cyane. Bitandukanye n'uburyo gakondo bwo gukoresha magnetron mu buryo bwa cylindrical, akenshi butuma filime igabanuka ku gipimo cyo hejuru cyo gushyiramo filime, gukoresha magnetron mu buryo bwa cylindrical bituma filime ikomeza kuba nziza kandi ikora neza mu gihe cyose cyo gushyiramo filime.
Byongeye kandi, imiterere y’icyuma cya magnetron cathode ituma habaho uburyo bumwe bwo gukwirakwiza plasma na magnetic field, bityo bikanongera uburyo filime ikoreshwa. Ubu buryo ni ingenzi ku bikorwa bisaba imiterere ihamye ya filime ku buso bwose bw’ubutaka. Inganda nka optique, electronics na solar energy zarungukiye cyane ku bushobozi buhanitse bwo gukwirakwiza magnetron mu cylindrical.
Gukoresha magnetron sputtering irenga uburyo gakondo bwo kuyikoresha. Abashakashatsi n'abahanga bahora bashakisha uburyo bushya bwo gukoresha iri koranabuhanga mu nzego zigezweho nka nanotechnology na biomedicine. Ubushobozi bwo kugenzura neza ibipimo byo gushyiramo umwuka, nk'imiterere ya gaze, umuvuduko, n'ingufu, bituma habaho filime zihariye zifite imiterere ikwiriye gukoreshwa mu buryo bwihariye.
Kwinjizwa kwa gaze zikora reactive birushaho kwagura ubushobozi bwa magnetron sputtering. Mu gushyiramo gaze zikora reactive nka azote cyangwa ogisijeni, ibivanze bishobora gushyirwamo cyangwa hagakorwa ibivanze bya filime bito bifite imiterere yihariye. Ibi bifungura inzira nshya zo gushakisha ibikoresho bigezweho bifite imikorere myiza, nko kunoza uburyo bwo kudashira, kwiyongera k’ubukana cyangwa kurwanya ingese.
Byongeye kandi, uburyo bwo gusohora icyuma gikozwe mu buryo bwa cylindrical magnetron bushobora kongerwa byoroshye, bigatuma gikoreshwa mu nganda nini. Uku kwaguka, hamwe n'imikorere yacyo n'uburyo bwo gukora ibintu bitandukanye, byatumye iyi koranabuhanga irushaho kwiyongera mu nganda zisaba ko hashyirwamo filime nto mu gihe cyo gukora.
Nkuko bigenda ku ikoranabuhanga rigezweho, ubushakashatsi n'iterambere bikomeje kunoza ubushobozi bwo gukoresha magnetron mu buryo bwa cylindrical. Abashakashatsi barimo gukora ku buryo bwo kunoza ibipimo by'imikorere, kunoza ibikoresho by'ingenzi no gushakisha ubundi buryo bwo gushushanya cathode kugira ngo barusheho kunoza imikorere y'ikoranabuhanga n'imikorere muri rusange.
–Iyi nkuru yasohotse nauruganda rukora imashini zikora imashini zikoresha umwuka ushyushyeGuangdong Zhenhua
Igihe cyo kohereza: Ukwakira-26-2023