Emkhakheni wobuchwepheshe bokufakwa kwefilimu emincane, ukuphalaza kwe-cylindrical magnetron sekuyindlela ephumelelayo neguquguqukayo. Lobu buchwepheshe obusha bunikeza abacwaningi nezingcweti zemboni indlela yokufaka amafilimu amancanyana anembayo nokufana okukhethekile. I-cylindrical magnetron sputtering isetshenziswa kabanzi ezimbonini ezahlukahlukene futhi iguqula inqubo yokubeka ifilimu emincane.
I-Cylindrical magnetron sputtering, eyaziwa nangokuthi i-cylindrical magnetron sputtering coating, iwubuchwepheshe bokubeka umhwamuko obonakalayo obusebenzisa i-cylindrical magnetron cathode. Umgomo wayo wokusebenza uhilela ukwakha i-plasma lapho ama-ion asheshiselwa khona aqonde entweni eqondiwe futhi akhiphe ama-athomu awo. Lawa ma-athomu abe esefakwa ku-substrate ukuze enze ifilimu elincanyana.
Enye yezinzuzo eziyinhloko ze-cylindrical magnetron sputtering yikhono lokufinyelela amazinga aphezulu okubeka ngenkathi ugcina ikhwalithi yefilimu enhle kakhulu. Ngokungafani nezindlela zendabuko zokufafaza, ezivame ukuholela ekwehliseni ikhwalithi yefilimu kumazinga aphezulu okubekwa, i-cylindrical magnetron sputtering iqinisekisa ukuthi ubuqotho befilimu nokwakheka kugcinwa kuyo yonke inqubo yokubeka.
Ukwengeza, umklamo we-cylindrical we-magnetron cathode uvumela ukusabalalisa kwe-plasma efanayo kanye nokusabalalisa kwenkundla kazibuthe, ngaleyo ndlela kuthuthukise ukufana kwefilimu. Lokhu kufana kubalulekile ezinhlelweni ezidinga izakhiwo zefilimu ezingaguquki kuyo yonke indawo engaphansi. Izimboni ezifana ne-optics, electronics namandla elanga ziye zazuza kakhulu emandleni athuthukile we-cylindrical magnetron sputtering.
Ukusetshenziswa kwe-cylindrical magnetron sputtering kudlulela ngale kwezinhlelo zokusebenza zendabuko. Abacwaningi nonjiniyela bahlale behlola izindlela ezintsha zokusebenzisa lobu buchwepheshe emikhakheni esezingeni eliphezulu njenge-nanotechnology kanye ne-biomedicine. Ikhono lokulawula ngokunembile imingcele yokubeka, efana nokwakheka kwegesi, ingcindezi, namandla, ivumela ukudalwa kwamafilimu enziwe ngokwezifiso anezici ezihlotshisiwe ezifanele izinhlelo zokusebenza ezithile.
Ukwethulwa kwamagesi asebenzayo kwandisa amandla e-cylindrical magnetron sputtering. Ngokwethula amagesi asebenzayo njenge-nitrogen noma umoya-mpilo, izinhlanganisela zingafakwa noma izinhlanganisela zefilimu ezacile ezinezakhiwo ezihlukile zingakhiqizwa. Lokhu kuvula izindlela ezintsha zokuhlola izinto ezithuthukisiwe ezinokusebenza okuthuthukisiwe, njengokumelana nokugqokwa okuthuthukisiwe, ukuqina okwandayo noma ukumelana nokugqwala okuphakeme.
Ngaphezu kwalokho, inqubo ye-cylindrical magnetron sputtering ingakhushulwa kalula, iyenze ifanele ukusetshenziswa kwezimboni ezinkulu. Lokhu kukhula, kuhlangene nokusebenza kahle kwayo kanye nokuguquguquka, kuholele ekwandeni kokwamukelwa kwalobu buchwepheshe yizimboni ezidinga ukuthi amafilimu amancane afakwe phakathi nezinqubo zokukhiqiza.
Njenganoma yibuphi ubuchwepheshe obuthuthukisiwe, imizamo eqhubekayo yocwaningo nentuthuko iyaqhubeka nokuthuthukisa amakhono e-cylindrical magnetron sputtering. Abacwaningi basebenzela ukucwenga amapharamitha enqubo, bathuthukise izinto eziqondiwe futhi bahlole eminye imiklamo ye-cathode ukuze bathuthukise ukusebenza kahle kokufakwa kobuchwepheshe kanye nokusebenza kukonke.
-Le ndatshana ikhishwe nguumenzi womshini we-vacuum coatingI-Guangdong Zhenhua
Isikhathi sokuthumela: Oct-26-2023