Ekwenzeni kwesimanje, imishini yokumboza nge-vacuum isibe yimpahla ebalulekile embonini efana ne-elekthronikhi, i-optics, izimoto, ama-semiconductor, kanye namandla elanga. Ngokuthuthuka okuqhubekayo kwezobuchwepheshe, izinhlobo ezahlukene zemishini yokumboza nge-vacuum zibonisa izitayela ezahlukahlukene ezimisweni zenqubo, amasimu okusetshenziswa, kanye nezidingo zokusebenza. Ngakho-ke, yiziphi izinhlobo ezivamile zemishini yokumboza nge-vacuum, futhi yiziphi izimo ezifanele? Lesi sihloko sinikeza ukuhlaziywa okuningiliziwe kokuhlukaniswa kanye nobubanzi bokusetshenziswa kwemishini yokumboza nge-vacuum, kanye nencazelo emfushane yezimiso zayo, ukukusiza wenze ukukhetha okungokwesayensi ekukhetheni izinhlelo zokumboza.
Izimiso Eziyisisekelo Zoku-1 Isimbozo se-Vacuum
Ukugqoka i-vacuum kubhekisela enqubweni yokuguqula izinto zibe yizimo zomusi noma ze-plasma ngezindlela zomzimba noma zamakhemikhali endaweni ene-vacuum ephezulu bese uzibeka ezindaweni ezingaphansi komhlaba ukuze zakhe amafilimu amancane. Izinzuzo zayo eziyinhloko zifaka phakathi izendlalelo zefilimu ezixineneyo, ukunamathela okuqinile, ubumsulwa obuphezulu, kanye nokuhambisana nokwelashwa okuhlukahlukene kwendawo yezinto.
Ukufakwa kwe-vacuum kuhlukaniswe kakhulu ngezigaba ezimbili: Ukufakwa Komusi Ongokoqobo (i-PVD) kanye Nokufakwa Komusi Omakhemikhali (i-CVD), kanti imishini ethile ihlukaniswe ngokwezindlela zenqubo.
Izinhlobo Eziyinhloko Zemishini Yokumboza I-Vacuum No.2
Uhlelo Lokuhwamuka Kokushisa
Isimiso: Isebenzisa ukushisa okuvimbelayo ukuze ifake izinto zokuhwamuka zibe yisigaba segesi, bese zihlangana ebusweni be-substrate ukuze zakhe ifilimu.
Ububanzi Bokusetshenziswa: Izimbozo zokuhlobisa, amafilimu okukhanya, amafilimu acwebezelayo ensimbi, njll., afaneleka kakhulu ezintweni ezingaphansi komhlaba ezifana nepulasitiki nengilazi.
Izici: Isakhiwo esilula, izindleko eziphansi, ezifanele ukukhiqizwa ngobuningi ezindaweni zokusebenza lapho ukunemba okuphezulu kobukhulu befilimu kungabalulekile.
Uhlelo Lokuhwamuka Kwe-E-beam
Isimiso: Imisebe yama-electron enamandla aphezulu ihlasela izinto eziqondiwe, okubangela ukuncibilika nokuhwamuka kwendawo, okube sekufakwa ebusweni be-substrate.
Ububanzi Bokusetshenziswa: Ukugqoka izinto ezincibilika kakhulu (isb., Ti, W, SiO₂), ezisetshenziswa kabanzi kuma-precision optics, izinhlelo zamafilimu ezingqimba eziningi, kanye namafilimu amancane asebenzayo.
Izici: Ukusebenza kahle kokuhwamuka okuphezulu, ukusetshenziswa okuphezulu kwezinto ezibonakalayo, kanye nobumsulwa obuhle kakhulu befilimu.
Uhlelo Lokuchitha Amanzi lweMagnetron
Isimiso: Ama-ion ku-plasma ahlasela izinto eziqondiwe, okwenza ama-athomu “achitheke” aye ku-substrate ezingeni le-athomu.
Ububanzi Bokusetshenziswa: Izimbozo eziqinile (isb., i-TiN, i-CrN), amafilimu e-semiconductor, amaphaneli okuthinta, amafilimu amancane elanga, njll.
Izici: Izendlalelo zefilimu ezifanayo, ukunamathela okuqinile, ukulawuleka okuphezulu, kufanelekile ezindaweni zokusebenza ezinkulu nezinomumo oyinkimbinkimbi.
Uhlelo lwe-CVD
Isimiso: Amagesi asebenzayo abhekana nokusabela kwamakhemikhali emazingeni okushisa aphezulu, akhiqiza imikhiqizo yokubeka phezu komhlabathi.
Ububanzi Bokusetshenziswa: Ukulungiswa kwamafilimu asebenzayo amadivayisi e-semiconductor, i-silicon carbide (SiC), i-silicon nitride (Si₃N₄), njll.
Izici: Ifinyelela ukufana okuphezulu, ubuningi obukhulu, kanye nokumbozwa okuhlelekile okuyinkimbinkimbi, okulungele ukusetshenziswa okunembe kakhulu.
Uhlelo lwe-Plasma-Enhanced CVD (PECVD)
Isimiso: Yethula i-RF plasma ukuze ivuse amagesi asabelayo, yakha amafilimu amancane emazingeni okushisa aphansi.
Ububanzi Bokusebenza: Ama-OLED, amaseli elanga, ama-MEMS, izembozo ze-optical fiber, njll.
Izici: Inqubo yokushisa okuphansi, ukumbozwa kwezinyathelo okuhle kakhulu, kufanelekile ezintweni ezizwela ukushisa.
Cha.3 Ungayikhetha Kanjani Imishini Yokumboza I-Vacuum Efanele?
Uma ukhetha imishini yokumboza nge-vacuum, izici ezilandelayo kufanele zicatshangelwe ngokuphelele:
Uhlobo Lwesisekelo Nokuma: isib., insimbi, ingilazi, ipulasitiki, noma izakhiwo zejiyometri eziyinkimbinkimbi.
Izidingo Zokusebenza Kwefilimu: Kungakhathaliseki ukuthi ukuqina okuphezulu, ukubonakaliswa okuphezulu, ukuhanjiswa kwamandla, noma ukusebenza kahle kokukhanya kuyadingeka.
Isikali Sokukhiqiza kanye Nesabelomali: Ukukhiqizwa okuzenzakalelayo okukhulu uma kuqhathaniswa nokwembozwa okunembile kweqembu elincane.
Ukuhambisana Kwenqubo: Kungakhathaliseki ukuthi ukuhlanganiswa nemigqa yokukhiqiza ekhona noma ukulinganiswa kwesikhathi esizayo kuyadingeka.
Izinhlobo ezahlukene zemishini yokumboza nge-vacuum zigcizelela kakhulu izimiso zenqubo, izinto ezisebenzayo, kanye nezimboni eziqondiwe. Ngokuthola ukuqonda okujulile kwezimpawu zobuchwepheshe kanye nezinhlelo zokusebenza zesistimu ngayinye, izinkampani zingathuthukisa ukusebenza kahle kokukhiqiza kanye nokuncintisana emakethe ngenkathi ziqinisekisa ikhwalithi. Ngokuthuthuka okuqhubekayo kokukhiqiza okuphezulu, imishini yokumboza nge-vacuum izoqhubeka nokuthuthuka iye ekuqondeni okuphezulu, ubuhlakani, kanye nokusebenza okuningi, ibe yinto ebalulekile yokuthuthukisa izimboni.
—Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Julayi-19-2025