Ishyirwa mu byiciro n'uburyo ibikoresho byo gusiga irangi mu cyuma bishyirwa mu byiciro

Mu nganda zigezweho, ibikoresho byo gusiga irangi byahindutse ingenzi cyane ku nganda nka elegitoroniki, optique, imodoka, semiconductors, na energy y'izuba. Bitewe n'iterambere rihoraho mu ikoranabuhanga, ubwoko butandukanye bw'ibikoresho byo gusiga irangi byagaragaje imiterere itandukanye mu mahame y'imikorere, urwego rw'ikoreshwa, n'ibisabwa mu mikorere. None se, ni ubuhe bwoko busanzwe bw'ibikoresho byo gusiga irangi bya vacuum, kandi ni ibihe bintu bikwiriye gukoreshwa? Iyi nkuru itanga isesengura rirambuye ry'ishyirwa mu byiciro n'uburyo ibikoresho byo gusiga irangi bya vacuum bishyirwa mu bikorwa, hamwe n'ibisobanuro bigufi by'amahame yabyo, kugira ngo bigufashe guhitamo neza mu guhitamo sisitemu zo gusiga irangi.

Amahame shingiro ya No.1 ya Gusiga irangi ry'umwuka
Gusiga irangi ry'ibikoresho mu cyuma bivamo umwuka cyangwa plasma hakoreshejwe uburyo bwa fiziki cyangwa imiti mu kirere gifite irangi ryinshi hanyuma bikabikwa ku buso bw'ubutaka kugira ngo bikoremo uduce duto. Ibyiza byabyo by'ingenzi birimo ibice by'ikirahure kinini, gufatana neza, gutungana cyane, no guhuza n'uburyo butandukanye bwo gutunganya ubuso bw'ibikoresho.

Gusiga umwuka uva mu cyuma bigabanyijemo ibice bibiri: Gusiga umwuka uva mu cyuma (PVD) n'Gusiga umwuka uva mu cyuma (CVD), hamwe n'ibikoresho byihariye bishyirwa mu byiciro hakurikijwe uburyo bwo gukora.

Ibyiciro by'ingenzi bya 2 by'ibikoresho byo gusiga ifuru
Sisitemu yo Guhindura Ubushyuhe

Ihame: Ikoresha ubushyuhe burwanya ubushyuhe kugira ngo ihindure umwuka uva mu kirere, hanyuma ihuze ku buso bw'ubutaka ikore firime.

Uburyo bwo Gukoresha: Ibyuma byo gushushanya, amafirime y'urumuri, amafirime agarura urumuri y'icyuma, nibindi, bikwiranye cyane n'ibintu nk'ibya plastiki n'ibirahuri.

Ibiranga: Imiterere yoroshye, ihendutse, ikwiriye gukorwa mu bwinshi mu bikorwa aho ubunini bwa filime buhanitse butari ngombwa.

Sisitemu yo Guhindura Ingufu mu Muyoboro wa E-beam

Ihame: Imirasire ya electron ifite ingufu nyinshi itera ibikoresho byibasiwe, bigatera gushonga no guhumeka mu gace runaka, hanyuma bigashyirwa ku buso bwa substrate.

Uburyo bwo Gukoresha: Gusiga ibikoresho bifite aho bishongesha cyane (urugero: Ti, W, SiO₂), bikoreshwa cyane mu byuma bipima neza, sisitemu za filime nyinshi, na filime ntoya zikora neza.

Ibiranga: Ingufu nyinshi zo guhumeka, ikoreshwa ry'ibikoresho byinshi, n'ubuziranenge bwiza bwa firime.

Sisitemu yo Gukoresha Magnetron

Ihame: Iyoni ziri muri plasma zitera ibintu byibasiwe, bigatuma atome "zisukwa" ku gice cy'ubutaka ku rwego rwa atome.

Uburyo bwo Gukoresha: Ibyuma bikomeye (urugero: TiN, CrN), filime za semiconductor, panels zo gukoraho, filime zoroheje z'izuba, nibindi.

Ibiranga: Imiterere ya filime imwe, ifite ubushobozi bwo gufatana neza, ikoreshwa cyane mu kugenzura, ikwiriye ibikoresho binini kandi bifite ishusho igoye.

Sisitemu ya CVD

Ihame: Imyuka ikora ihinduka iterwa n'ibinyabutabire ku bushyuhe bwinshi, bigatuma ibintu bishyirwa ku buso bw'ubutaka.

Ikoreshwa: Gutegura filime zikora ku bikoresho bya semiconductor, silicon carbide (SiC), silicon nitride (Si₃N₄), nibindi.

Ibiranga: Igera ku buryo bungana cyane, bufite ubucucike bwinshi, kandi bufite imiterere igoye, ikwiriye gukoreshwa mu buryo bunoze cyane.

Sisitemu ya CVD yongerewe mu maraso (PECVD) (Plasma-Enhanced CVD)

Ihame: Ishyira plasma ya RF mu gukurura imyuka ikora, igakora uduce duto tw’ingufu ku bushyuhe buri hasi.

Uburyo bwo Gukoresha: OLED, selile z'izuba, MEMS, irangi ry'umuyoboro wa fibre, nibindi.

Ibiranga: Uburyo bukoresha ubushyuhe buke, uburyo bwiza bwo gutwikira intambwe, bukwiriye ibikoresho bishobora kwangirika bitewe n'ubushyuhe.

No.3 Nigute wahitamo ibikoresho bikwiye byo gusiga irangi ry'ubushyuhe?
Mu guhitamo ibikoresho byo gusiga irangi mu buryo bw'umwuka, ibintu bikurikira bigomba kwitabwaho mu buryo bwuzuye:

Ubwoko n'imiterere y'igice cy'inyuma: urugero, icyuma, ikirahure, pulasitiki, cyangwa imiterere y'ijimetero igoye.

Ibisabwa mu mikorere ya firime: Byaba ari ubukomere bwinshi, ubushobozi bwo kugarura urumuri bwinshi, ubushobozi bwo gutwara urumuri, cyangwa ubushobozi bwo gukoresha urumuri birakenewe.

Igipimo cy'umusaruro n'ingengo y'imari: Umusaruro munini wikora ugereranije n'ingufu nto zo gusiga neza.

Guhuza ibikorwa: Niba ari ngombwa guhuza n'imirongo isanzwe ikora cyangwa se kuba yakwaguka mu gihe kizaza.

Ubwoko butandukanye bw'ibikoresho byo gusiga irangi mu buryo bwa vacuum cleaner bufite ibisobanuro bitandukanye mu mahame y'imikorere, ibikoresho bikoreshwa, n'inganda zigamije. Mu gusobanukirwa byimbitse imiterere ya tekiniki n'uburyo buri sisitemu ikoreshwamo, amasosiyete ashobora kongera umusaruro no guhangana ku isoko mu gihe agenzura ubuziranenge. Hamwe n'iterambere rihoraho ry'inganda zikora ibintu bigezweho, ibikoresho byo gusiga irangi mu buryo bwa vacuum cleaner bizakomeza gutera imbere biganisha ku buhanga bwo hejuru, ubwenge, n'imikorere myinshi, bikaba ingenzi mu kuvugurura inganda.

—Iyi nkuru yasohotse na  ibikoresho byo gusiga irangi ry'umwukauruganda rwa Zhenhua Vacuum