Hauv kev tsim khoom niaj hnub no, cov khoom siv nqus tsev tau dhau los ua cov khoom tseem ceeb rau kev lag luam xws li khoom siv hluav taws xob, khoom siv kho qhov muag, khoom siv tsheb, khoom siv semiconductor, thiab lub zog hnub ci. Nrog rau kev nce qib ntawm thev naus laus zis tas mus li, ntau hom khoom siv nqus tsev qhia txog ntau yam kev hloov pauv hauv cov ntsiab cai ntawm cov txheej txheem, cov teb thov, thiab cov kev xav tau kev ua tau zoo. Yog li, cov hom khoom siv nqus tsev feem ntau yog dab tsi, thiab lawv haum rau cov xwm txheej twg? Tsab xov xwm no muab kev tshuaj xyuas ntxaws ntxaws ntawm kev faib tawm thiab qhov ntau thiab tsawg ntawm cov khoom siv nqus tsev, nrog rau kev piav qhia luv luv ntawm lawv cov ntsiab cai, los pab koj ua qhov kev xaiv zoo dua hauv kev xaiv cov txheej txheem txheej.
No.1 Cov Ntsiab Cai Tseem Ceeb ntawm Txheej Tshuab Nqus Tsev
Kev txheej txheej nqus tsev yog hais txog cov txheej txheem ntawm kev hloov cov ntaub ntawv mus rau hauv cov pa lossis cov ntshav los ntawm kev siv cov txheej txheem lub cev lossis tshuaj hauv qhov chaw nqus tsev siab thiab tso lawv rau ntawm cov khoom siv los ua cov zaj duab xis nyias. Nws cov txiaj ntsig tseem ceeb suav nrog cov txheej zaj duab xis ntom ntom, kev nplaum zoo, kev ntshiab siab, thiab kev sib haum xeeb nrog ntau yam kev kho saum npoo ntawm cov khoom.
Cov txheej txheem nqus tsev feem ntau muab faib ua ob pawg: Physical Vapor Deposition (PVD) thiab Chemical Vapor Deposition (CVD), nrog rau cov khoom siv tshwj xeeb ntxiv raws li cov txheej txheem.
No.2 Cov Kev Faib Tawm Tseem Ceeb ntawm Cov Khoom Siv Txheej Tshuab Nqus Tsev
Lub Tshuab Ua Kom Sov Thermal
Lub hauv paus ntsiab lus: Siv cov cua sov tiv taus kom sublime cov khoom siv evaporation mus rau hauv ib theem gaseous, uas tom qab ntawd condenses rau ntawm qhov chaw substrate los tsim ib zaj duab xis.
Daim Ntawv Thov: Cov txheej txheem kho kom zoo nkauj, cov yeeb yaj kiab kho qhov muag, cov yeeb yaj kiab xim hlau, thiab lwm yam, tshwj xeeb tshaj yog rau cov khoom siv xws li yas thiab iav.
Nta: Cov qauv yooj yim, pheej yig, tsim rau kev tsim khoom loj hauv cov ntawv thov uas qhov siab tuab zaj duab xis tsis tseem ceeb.
E-beam Evaporation System
Lub hauv paus ntsiab lus: Cov hluav taws xob muaj zog siab tawg rau cov khoom siv, ua rau yaj thiab ua pa, uas tom qab ntawd tso rau ntawm qhov chaw substrate.
Daim Ntawv Thov: Kev txheej cov ntaub ntawv uas muaj cov ntsiab lus yaj siab (piv txwv li, Ti, W, SiO₂), siv dav hauv cov khoom siv kho qhov muag, cov txheej txheem zaj duab xis ntau txheej, thiab cov zaj duab xis nyias ua haujlwm.
Nta: Kev ua haujlwm evaporation siab, kev siv cov khoom siv siab, thiab kev ua kom zoo nkauj ntawm zaj duab xis.
Magnetron Sputtering System
Lub hauv paus ntsiab lus: Cov ions hauv plasma bombard cov khoom siv, ua rau cov atoms "sputtered" rau ntawm lub substrate ntawm qib atomic.
Daim Ntawv Thov: Cov txheej txheem tawv (piv txwv li, TiN, CrN), cov yeeb yaj kiab semiconductor, cov vaj huam sib luag kov, cov yeeb yaj kiab nyias nyias hnub ci, thiab lwm yam.
Nta: Cov txheej zaj duab xis sib xws, muaj zog nplaum, tswj tau zoo, tsim rau thaj chaw loj thiab cov haujlwm ua haujlwm zoo li nyuaj.
CVD System
Lub hauv paus ntsiab lus: Cov pa roj reactive dhau los ua cov tshuaj lom neeg ntawm qhov kub siab, tsim cov khoom tso rau ntawm qhov chaw substrate.
Daim Ntawv Thov Scope: Kev npaj cov yeeb yaj kiab ua haujlwm rau cov khoom siv semiconductor, silicon carbide (SiC), silicon nitride (Si₃N₄), thiab lwm yam.
Nta: Ua tiav qhov sib xws siab, qhov ceev ceev, thiab cov txheej txheem nyuaj, tsim rau cov ntawv thov siab.
Plasma-Enhanced CVD (PECVD) System
Lub hauv paus ntsiab lus: Qhia txog RF plasma los ua kom muaj cov pa roj reactive, tsim cov zaj duab xis nyias ntawm qhov kub qis dua.
Daim Ntawv Thov Scope: OLEDs, lub hnub ci hlwb, MEMS, optical fiber coatings, thiab lwm yam.
Nta: Cov txheej txheem kub qis, kev them nqi zoo heev, tsim rau cov ntaub ntawv rhiab heev thermally.
No.3 Yuav Ua Li Cas Xaiv Cov Khoom Siv Txheej Tshuab Nqus Tsev Kom Zoo?
Thaum xaiv cov khoom siv nqus tsev, cov hauv qab no yuav tsum tau txiav txim siab kom meej:
Hom thiab Duab ntawm cov khoom siv: piv txwv li, hlau, iav, yas, lossis cov qauv geometric nyuaj.
Cov Kev Cai Ua Haujlwm ntawm Zaj Duab Xis: Txawm tias xav tau qhov nyuaj siab, kev cuam tshuam siab, kev coj ua hluav taws xob, lossis kev ua haujlwm pom kev zoo.
Kev Tsim Khoom Loj thiab Nyiaj Txiag: Kev tsim khoom loj loj piv rau kev txheej txheem me me.
Kev Sib Tw Ua Haujlwm: Txawm tias yuav tsum muaj kev koom ua ke nrog cov kab ntau lawm uas twb muaj lawm lossis kev nthuav dav yav tom ntej.
Cov khoom siv nqus tsev txheej sib txawv muaj ntau yam tseem ceeb hauv cov txheej txheem, cov ntaub ntawv siv tau, thiab cov lag luam uas xav tau. Los ntawm kev nkag siab tob txog cov yam ntxwv thiab cov kev siv ntawm txhua lub tshuab, cov tuam txhab tuaj yeem txhim kho kev ua haujlwm zoo thiab kev sib tw ua lag luam thaum tseem ua kom zoo. Nrog rau kev txhim kho tas mus li ntawm kev tsim khoom siab, cov khoom siv nqus tsev txheej yuav txuas ntxiv mus rau qhov tseeb dua, kev txawj ntse, thiab kev ua haujlwm ntau yam, ua lub hauv paus tseem ceeb rau kev txhim kho kev lag luam.
— Tsab xov xwm no tau luam tawm los ntawm cov khoom siv nqus tsev txheejChaw tsim khoom Zhenhua Lub Tshuab Nqus Tsev
Lub sijhawm tshaj tawm: Lub Xya Hli-19-2025