Mu mafakitale amakono, zida zophikira vacuum zakhala chinthu chofunikira kwambiri m'mafakitale monga zamagetsi, ma optics, magalimoto, ma semiconductors, ndi mphamvu ya dzuwa. Ndi kupita patsogolo kwaukadaulo kosalekeza, mitundu yosiyanasiyana ya zida zophikira vacuum imawonetsa njira zosiyanasiyana mu mfundo za njira, magawo ogwiritsira ntchito, ndi zofunikira pakugwira ntchito. Ndiye, ndi mitundu iti yodziwika bwino ya zida zophikira vacuum, ndipo ndi zochitika ziti zomwe zikuyenera kugwiritsidwa ntchito? Nkhaniyi ikupereka kusanthula mwatsatanetsatane kwa magulu ndi kuchuluka kwa zida zophikira vacuum, pamodzi ndi kufotokozera mwachidule mfundo zawo, kuti zikuthandizeni kusankha mwasayansi kwambiri posankha makina ophikira.
Mfundo Zoyambira Nambala 1 za Kuphimba kwa Vacuum
Kuphimba vacuum kumatanthauza njira yosinthira zinthu kukhala nthunzi kapena plasma pogwiritsa ntchito njira zakuthupi kapena zamakemikolo pamalo okhala ndi vacuum yambiri ndikuziyika pamalo opangira zinthu kuti apange mafilimu opyapyala. Ubwino wake waukulu ndi monga zigawo zolimba za filimu, kumamatira mwamphamvu, kuyera kwambiri, komanso kugwirizana ndi mitundu yosiyanasiyana ya zinthu pamwamba.
Chophimba cha vacuum chimagawidwa m'magulu awiri: Kutulutsa Nthunzi Yathupi (PVD) ndi Kutulutsa Nthunzi Yamankhwala (CVD), ndipo zida zina zimagawidwa m'magulu ena kutengera njira zogwirira ntchito.
Nambala 2 Magulu Aakulu a Zipangizo Zophikira Vacuum
Dongosolo Lotulutsa Mpweya wa Kutentha
Mfundo: Amagwiritsa ntchito kutentha koteteza kuti zinthu zomwe zimatuluka mumlengalenga zikhale mpweya, zomwe zimapangika pamwamba pa nthaka kuti zipange filimu.
Kugwiritsa Ntchito: Zophimba zokongoletsera, mafilimu owoneka bwino, mafilimu owunikira achitsulo, ndi zina zotero, makamaka zoyenera zinthu monga mapulasitiki ndi magalasi.
Zinthu Zake: Kapangidwe kosavuta, kotsika mtengo, koyenera kupanga zinthu zambiri m'malo omwe makulidwe a filimu ndi apamwamba sikofunikira.
Dongosolo Lotulutsa Mpweya wa E-beam
Mfundo: Magetsi amphamvu kwambiri amawononga zinthu zomwe akufuna, zomwe zimapangitsa kuti zisungunuke komanso ziume, zomwe zimagwera pamwamba pa nthaka.
Kugwiritsa Ntchito: Kuphimba zinthu zomwe zimasungunuka kwambiri (monga Ti, W, SiO₂), zomwe zimagwiritsidwa ntchito kwambiri mu ma optics olondola, machitidwe amafilimu ambiri, ndi mafilimu opyapyala ogwira ntchito.
Zinthu: Kugwiritsa ntchito bwino kwambiri kwa nthunzi, kugwiritsa ntchito bwino zinthu, komanso kuyera bwino kwa filimu.
Dongosolo Lopopera Magnetron
Mfundo: Ma ayoni mu plasma amaphulitsa chinthu chomwe chikufunidwa, zomwe zimapangitsa kuti maatomu "atulutsidwe" pa substrate pamlingo wa atomu.
Kugwiritsa Ntchito: Zophimba zolimba (monga TiN, CrN), mafilimu a semiconductor, mapanelo okhudza, mafilimu opyapyala a dzuwa, ndi zina zotero.
Zinthu: Magawo ofanana a filimu, kumamatira mwamphamvu, kusinthasintha kwakukulu, koyenera kugwiritsidwa ntchito m'malo akuluakulu komanso owoneka ngati ovuta.
Dongosolo la CVD
Mfundo: Mpweya wochitapo kanthu umakumana ndi zotsatira za mankhwala kutentha kwambiri, zomwe zimapangitsa kuti zinthu zotsalira pamwamba pa nthaka zikhazikike.
Ntchito Yogwiritsidwa Ntchito: Kukonzekera mafilimu ogwira ntchito a zipangizo za semiconductor, silicon carbide (SiC), silicon nitride (Si₃N₄), ndi zina zotero.
Mawonekedwe: Amakhala ndi zophimba zofanana kwambiri, zokhuthala kwambiri, komanso zomangidwa mosiyanasiyana, zoyenera kugwiritsidwa ntchito molondola kwambiri.
Dongosolo la CVD Yolimbikitsidwa ndi Plasma (PECVD)
Mfundo: Imayambitsa RF plasma kuti ipangitse mpweya wochitapo kanthu, ndikupanga mafilimu opyapyala pa kutentha kochepa.
Kuchuluka kwa Ntchito: Ma OLED, maselo a dzuwa, MEMS, zokutira za ulusi wowala, ndi zina zotero.
Zinthu: Njira yotenthetsera pang'ono, kuphimba bwino kwambiri, yoyenera zinthu zomwe zimakhudzidwa ndi kutentha.
Nambala 3 Kodi Mungasankhe Bwanji Zida Zoyenera Zophikira Vacuum?
Posankha zida zophikira vacuum, zinthu zotsatirazi ziyenera kuganiziridwa mokwanira:
Mtundu ndi Mawonekedwe a Substrate: mwachitsanzo, chitsulo, galasi, pulasitiki, kapena kapangidwe ka geometric kovuta.
Zofunikira pa Ntchito ya Filimu: Kaya kuuma kwambiri, kuwunikira kwambiri, kuyendetsa bwino, kapena magwiridwe antchito a kuwala ndikofunikira.
Kukula kwa Kupanga ndi Bajeti: Kupanga kwakukulu kodziyimira pawokha poyerekeza ndi kupaka kolondola kwa magulu ang'onoang'ono.
Kugwirizana kwa Njira: Kaya kuphatikizidwa ndi mizere yopangira yomwe ilipo kapena kufalikira kwamtsogolo ndikofunikira.
Mitundu yosiyanasiyana ya zida zophikira vacuum ili ndi mfundo zosiyana pa mfundo za ndondomeko, zipangizo zoyenera, ndi mafakitale omwe akufuna. Mwa kumvetsetsa bwino makhalidwe aukadaulo ndi momwe dongosolo lililonse limagwiritsidwira ntchito, makampani amatha kukulitsa luso lopanga komanso mpikisano pamsika pomwe akuwonetsetsa kuti zinthu zili bwino. Ndi chitukuko chopitilira cha kupanga zinthu zapamwamba, zida zophikira vacuum zidzapitiliza kusintha kukhala zolondola kwambiri, zanzeru, komanso zogwira ntchito zambiri, kukhala chinthu chofunikira kwambiri pakukweza mafakitale.
—Nkhaniyi yafalitsidwa ndi zida zophikira zotsukirawopanga Zhenhua Vacuum
Nthawi yotumizira: Julayi-19-2025