Kwinkalo yetekhnoloji yokubekwa kwefilimu encinci, i-cylindrical magnetron sputtering ibe yindlela esebenzayo neguquguqukayo. Le teknoloji ivelisa izinto ezintsha ibonelela abaphandi kunye neengcali zemizi mveliso indlela yokufaka iifilimu ezibhityileyo ngokuchaneka okukhethekileyo kunye nokufana. I-Cylindrical magnetron sputtering isetyenziswa kakhulu kumashishini ahlukeneyo kwaye iguqula inkqubo yokubeka ifilimu ebhityileyo.
I-Cylindrical magnetron sputtering, ekwabizwa ngokuba yi-cylindrical magnetron sputtering coating, bubuchwephesha bokubekwa komphunga obonakalayo obusebenzisa i-cylindrical magnetron cathodes. Umgaqo wayo wokusebenza ubandakanya ukwenza iplasma apho ii-ion zikhawuleza ukuya kwinto ekujoliswe kuyo kwaye ikhuphe iiathom zayo. Ezi athom ke zifakwa kwi-substrate ukwenza ifilimu ebhityileyo.
Enye yeenzuzo eziphambili ze-cylindrical magnetron sputtering kukukwazi ukufikelela kumazinga aphezulu okubekwa ngelixa ugcina umgangatho wefilimu ogqwesileyo. Ngokungafaniyo neendlela eziqhelekileyo zokutshiza, ezihlala zikhokelela ekunciphiseni umgangatho wefilimu kumazinga aphezulu okubeka, i-cylindrical magnetron sputtering iqinisekisa ukuba imfezeko yefilimu kunye nokwakheka kuyagcinwa kuyo yonke inkqubo yokubeka.
Ukongeza, i-cylindrical design ye-magnetron cathode ivumela i-plasma efanayo kunye nokuhanjiswa kwemagnethi, ngaloo ndlela kuphuculwa ukufana kwefilimu. Oku kufana kubalulekile kwizicelo ezifuna iimpawu zefilimu ezingaguqukiyo kuwo wonke umphezulu we-substrate. Amashishini afana ne-optics, i-electronics kunye namandla elanga azuze kakhulu kubuchule obuphezulu be-cylindrical magnetron sputtering.
Ukusetyenziswa kwe-cylindrical magnetron sputtering kunabela ngaphaya kwezicelo zemveli. Abaphandi kunye neenjineli bahlala behlola iindlela ezintsha zokusebenzisa le teknoloji kwiinkalo ezinqamlekileyo ezifana ne-nanotechnology kunye ne-biomedicine. Ikhono lokulawula ngokuchanekileyo iiparamitha zokubeka, ezifana nokubunjwa kwegesi, uxinzelelo, kunye namandla, ivumela ukudalwa kweefilimu ezenziwe ngokwezifiso ezineempawu ezilungelelanisiweyo ezifanelekileyo kwizicelo ezithile.
Ukuqaliswa kweegesi ezisebenzayo kwandisa ngakumbi amandla e-cylindrical magnetron sputtering. Ngokuzisa iigesi ezisebenzayo ezifana ne-nitrogen okanye i-oksijini, ii-composites zingafakwa okanye iimbumba zefilimu ezincinci ezineempawu ezizodwa zinokuveliswa. Oku kuvula iindlela ezintsha zokuphonononga imathiriyeli ephucukileyo ngokusebenza okuphuculweyo, okufana nokuphuculwa kokumelana nokunxiba, ukonyuka kobunzima okanye ukuxhathisa okungaphezulu kokuhlwa.
Ngaphaya koko, inkqubo ye-cylindrical magnetron sputtering inokunyuswa ngokulula, iyenze ilungele usetyenziso lwemizi-mveliso emikhulu. Oku kunyuka, kudityaniswa nokusebenza kwayo kunye nokuguquguquka kwayo, kukhokelele ekwandeni kokwamkelwa kobu buchwepheshe ngamashishini afuna ukuba iifilimu ezincinci zifakwe ngexesha leenkqubo zokuvelisa.
Njengayo nayiphi na itekhnoloji ephezulu, uphando oluqhubekayo kunye neenzame zophuhliso ziyaqhubeka nokuphucula amandla e-cylindrical magnetron sputtering. Abaphandi basebenzela ukucokisa iiparamitha zenkqubo, ukwandisa imathiriyeli ekujoliswe kuyo kwaye baphonononge uyilo olulolunye lwe-cathode ukuqhubela phambili nokuphucula ukusebenza kakuhle kwetekhnoloji kunye nokusebenza ngokubanzi.
–Eli nqaku likhutshwa nguumenzi womatshini wokugqumaGuangdong Zhenhua
Ixesha lokuposa: Oct-26-2023