Mu rwego rwa tekinoroji yoroheje yo gushira, sisitemu ya magnetron ya silindrike yahindutse uburyo bwiza kandi butandukanye. Ubu buhanga bugezweho butanga abashakashatsi ninzobere mu nganda uburyo bwo kubitsa firime zoroheje kandi zuzuye kandi zidasanzwe. Cylindrical magnetron sputtering ikoreshwa cyane mubikorwa bitandukanye kandi ihindura uburyo bwo kubika firime.
Cylindrical magnetron sputtering, izwi kandi nka silindrike ya magnetron sputtering coating, ni tekinoroji yo kubika imyuka yumubiri ikoresha cathodes ya magnetron. Ihame ryakazi ririmo gukora plasma aho ion yihuta yerekeza kubintu bigamije no kwirukana atome zayo. Izi atome noneho zishyirwa kuri substrate kugirango zikore firime yoroheje.
Imwe mu nyungu zingenzi za silindrike ya magnetron sputtering nubushobozi bwo kugera ku gipimo kinini cyo kubika mugihe ukomeje ubwiza bwa firime. Bitandukanye nubuhanga gakondo bwo gusohora, akenshi butuma ubwiza bwa firime bugabanuka ku gipimo cyo hejuru cyoherejwe, magnetron ya silindrike ya silindrike yemeza ko ubunyangamugayo bwa firime hamwe nibihimbano bigumaho mugihe cyose cyo kubitsa.
Mubyongeyeho, igishushanyo cya silindrike ya magnetron cathode ituma plasma nyinshi hamwe na magnetique ikwirakwizwa, bityo bikazamura uburinganire bwa firime. Uku guhuza ni ingenzi kubisabwa bisaba imiterere ya firime ihamye hejuru yubutaka bwose. Inganda nka optique, electronics ningufu zizuba zungukiwe cyane nubushobozi buhanitse bwa magnetron ya silindrike.
Gukoresha silindrike ya magnetron gusohora birenze porogaramu gakondo. Abashakashatsi naba injeniyeri bahora bashakisha uburyo bushya bwo gukoresha ubwo buhanga mu bice bigezweho nka nanotehnologiya na biomedicine. Ubushobozi bwo kugenzura neza ibipimo byabitswe, nkibigize gaze, igitutu, nimbaraga, bituma habaho gukora firime yabugenewe ifite imitunganyirize ikwiranye nibisabwa byihariye.
Kwinjiza imyuka ya gaze ikora byongera ubushobozi bwa magnetron ya silindrike. Mugutangiza imyuka idahwitse nka azote cyangwa ogisijeni, ibiyigize birashobora kubikwa cyangwa ibinini bya firime yoroheje bifite imiterere yihariye irashobora kubyara. Ibi bifungura inzira nshya zo gushakisha ibikoresho bigezweho hamwe nibikorwa byongerewe imbaraga, nko kunoza imyambarire, kongera ubukana cyangwa kurwanya ruswa.
Byongeye kandi, sisitemu ya magnetron ya silindrike irashobora kwaguka byoroshye, bigatuma ikoreshwa mubikorwa binini byinganda. Ubu bunini, bufatanije nuburyo bukora neza kandi butandukanye, bwatumye hiyongeraho ikoreshwa ryikoranabuhanga ninganda zisaba firime zoroshye kubikwa mugihe cyo gukora.
Kimwe na tekinoroji iyo ari yo yose igezweho, ubushakashatsi burambye hamwe nimbaraga ziterambere bikomeje kongera ubushobozi bwa magnetron ya silindrike. Abashakashatsi barimo gukora kunoza ibipimo ngenderwaho, kunoza ibikoresho bigamije no gushakisha ubundi buryo bwa cathode kugira ngo barusheho kunoza imikorere y’ikoranabuhanga no gukora muri rusange.
–Iyi ngingo yasohowe naimashini ikora imashiniGuangdong Zhenhua
Igihe cyo kohereza: Ukwakira-26-2023