ʻO ka ʻenehana mālama ʻili PVD i nā uhi paʻakikī

I ka hoʻomau ʻana o ka hana ʻana o kēia au i ke koi ʻana i ka hana kiʻekiʻe mai nā ʻāpana, ʻoiai nā mea e hana ana ma lalo o nā kūlana koʻikoʻi e like me ke kiʻekiʻe o ka mahana, ke kaomi kiʻekiʻe, a me ka friction ikaika, ua lilo ka ʻenehana uhi i mea koʻikoʻi. He kuleana koʻikoʻi ka hoʻohana ʻana i nā uhi paʻakikī i ka hoʻomaikaʻi ʻana i ke kūpaʻa o ka mea hana, ka pololei o ka mīkini, a me ka hana holoʻokoʻa o ka huahana. ʻO ka ʻenehana mālama ʻili PVD (Physical Vapor Deposition) ke alo o ka hana hou ma kēia kahua, e hoʻokele ana i nā holomua i ka ʻenehana uhi.

Helu 1 He aha ke Kaʻina Hana PVD?

ʻO ke kaʻina hana PVD e pili ana i ka hoʻohana ʻana i nā ʻano hana kino e hoʻololi i nā mea uhi mai kahi kūlana paʻa a wai paha i kahi kūlana kinoea, a laila e waiho ana iā lākou ma luna o ka ʻili substrate ma o ka waiho ʻana o ka mahu e hana i kahi uhi like, paʻakikī, a paʻa. Ke hoʻohālikelike ʻia me ka waiho ʻana o ka mahu kemika kuʻuna (CVD), ʻo nā pono nui o PVD aia i kona hiki ke waiho i nā uhi ma nā mahana haʻahaʻa, kaohi pololei i ka mānoanoa a me ka haku mele ʻana o ka uhi, a me kona ʻano aloha i ke kaiapuni a me ka ikehu.

Nā Pōmaikaʻi No.2 o PVD i nā Uhi Paʻakikī
Ma muli o kona mau pono kūikawā, ua ʻike nui ʻia ka ʻenehana PVD i ka hoʻopili ʻana i nā uhi paʻakikī, ʻoi aku hoʻi ma nā wahi e koi ana i ka paʻakikī kiʻekiʻe, ke kūpaʻa maikaʻi loa i ka ʻaʻahu ʻana, a me ke kūpaʻa ʻoi aku ka maikaʻi o ka pala. ʻO nā pono nui o ke kaʻina hana PVD:

1. Paʻakikī kiʻekiʻe loa a me ke kūpaʻa ʻana i ka ʻaʻahu
Hoʻonui nui nā uhi paʻakikī PVD i ka paʻakikī o nā ʻāpana. Ma ka waiho ʻana i nā mea e like me TiN (Titanium Nitride), TiAlN (Titanium Aluminum Nitride), a me CrN (Chromium Nitride), hiki i ka paʻakikī o ka uhi ke hiki i 25GPa–63GPa a ʻoi aku paha. Hoʻomaikaʻi maikaʻi kēia mau uhi paʻakikī i ke kūpaʻa ʻana i ka ʻaʻahu, hoʻēmi i ka abrasion o ka ʻili, hoʻonui i ke kūpaʻa oxidation, a hoʻolōʻihi i ke ola lawelawe o nā mea hana, nā ʻōmole, a me nā ʻāpana ʻē aʻe.

2. Ke kūpaʻa wela kiʻekiʻe maikaʻi loa
Hōʻike nā uhi PVD i ke kūpaʻa wela kiʻekiʻe loa, e kūpono ana iā lākou no nā ʻāpana i kau ʻia i nā mahana koʻikoʻi a me ka friction kiʻekiʻe a i ʻole ka pala kemika. No ka laʻana, ʻaʻole wale nā ​​​​uhi TiAlN e hāʻawi i ka paʻakikī koʻikoʻi akā mālama pū i ke kūpaʻa kūkulu i nā mahana kiʻekiʻe, e hoʻohana nui ʻia ai i nā mea ʻoki a me nā ʻōmole no nā noi mīkini wela kiʻekiʻe.

3. Ka helu haʻahaʻa haʻalulu no ka hoʻomaikaʻi ʻana i ka pono o ka mīkini
Kōkua nā uhi PVD i ka hoʻokō ʻana i nā coefficients friction haʻahaʻa loa, e hōʻemi ana i ka friction a me ke komo ʻana o nā mea, kahi e hoʻonui ai i ka pono o ka mīkini a me ka maikaʻi o ka ʻili. He mea maikaʻi loa kēia no ka mīkini kikoʻī a me nā kaʻina hana ʻoki wikiwiki.

4. Pilikino i ke kaiapuni a me ka hana pono loa
Ke hoʻohālikelike ʻia me nā ʻano hana uhi kuʻuna, ʻaʻole koi ke kaʻina hana PVD i ka nui o nā kemika ʻino, e lilo ia i ʻenehana aloha i ke kaiapuni. Eia kekahi, hana nā lako uhi PVD me ka pono kiʻekiʻe, e hiki ai ke hoʻokahe wikiwiki e hoʻokō i nā koi hana nui.

Nā kahua noi No.3 o ka uhi paʻakikī PVD
Hoʻohana nui ʻia nā mīkini uhi paʻakikī PVD no nā uhi paʻakikī i nā ʻoihana e pono ai ka hana ʻili kiʻekiʻe. ʻO kekahi mau wahi noi koʻikoʻi:

1. Nā Mea Hana ʻoki a me nā Mold
I ka hana ʻana i nā mea hana a me nā ʻōmole, ʻoi aku hoʻi no nā mea hana ʻoki i hōʻike ʻia i nā mahana kiʻekiʻe a me ka friction, hoʻonui nui nā uhi PVD i ke kūpaʻa ʻana i ka ʻaʻahu, ke kūpaʻa i ka pala, a me ka paʻakikī. Hoʻohana pinepine ʻia nā uhi TiN i nā mea hana wili, nā mea ʻoki wili, a me nā wili, ʻoiai ua hoʻopili nui ʻia nā uhi TiAlN i nā noi ʻoki wikiwiki, e hoʻomaikaʻi nui ana i ka pono o ka ʻoki ʻana i nā mea hana a me ke ola lawelawe.

2. Nā ʻĀpana Kaʻa
No nā ʻāpana ʻenekini kaʻa e like me nā cylinders, pistons, a me nā valves, hāʻawi nā uhi paʻakikī PVD i ke kūpaʻa wela kiʻekiʻe a me ke kūpaʻa ʻana i ka ʻaʻahu, e hōʻemi pono ana i ka friction, e hoʻolōʻihi i ke ola o nā ʻāpana, a me ka hoʻomaikaʻi ʻana i ka hana holoʻokoʻa o ke kaʻa.

4. Hoʻolauna ʻia o nā lako hana uhi paʻakikī PVD Zhenhua FMA0605
Nā Pōmaikaʻi o nā Lako Hana
Kānana pono o nā macro-particles arc; Hāʻawi nā uhi Ta-C i ka pono kiʻekiʻe a me ka hana maikaʻi loa.
Hoʻokō i ka paʻakikī kiʻekiʻe loa, nā uhi superhard kūpaʻa i ka mahana kiʻekiʻe, ka coefficient friction haʻahaʻa, a me ke kūpaʻa maikaʻi loa i ka pala. ʻO ka paʻakikī awelika e hiki i ka 25GPa–63GPa.

Hoʻohana ka cathode i kahi ʻenehana dual-drive e hoʻohui ana i kahi coil i hoʻonoho ʻia ma mua a me ka hoʻopaʻa ʻana o ka magnet mau loa, e hana pū ana me kahi ʻōnaehana etching ion a me kahi mea hoʻopili multi-angle ʻekolu-dimensional e hoʻokō ai i ka hoʻopili pono ʻana.
Ua hoʻolako ʻia me kahi arc cathodic nui-diameter, ka mea e hōʻoiaʻiʻo ai i nā waiwai hoʻomaʻalili maikaʻi loa ma lalo o nā kūlana o kēia manawa kiʻekiʻe. He wikiwiki ka wikiwiki o ka neʻe ʻana o ka arc spot, kiʻekiʻe ka wikiwiki o ka ionization, a wikiwiki ka wikiwiki o ka waiho ʻana. Hiki i kēia ke waiho ʻana o nā uhi ʻoi aku ka mānoanoa a me ka laumania me ke kūpaʻa oxidation kiʻekiʻe a me ka hana wela kiʻekiʻe.
Ka laulā o ka noi:
Hiki i nā lako ke waiho iā AlTiN, AlCrN, TiCrAlN, TiAlSiN, CrN, a me nā uhi paʻakikī ʻē aʻe e kū pono ana i ka mahana kiʻekiʻe, kahi i hoʻohana nui ʻia i loko o nā ʻōmole, nā mea ʻoki, nā punches, nā ʻāpana kaʻa, nā pistons, a me nā huahana ʻē aʻe.

— Ua hoʻokuʻu ʻia kēia ʻatikala eNā lako hana uhi paʻakikī PVDʻO Zhenhua Vacuum