Inqubo yokufaka umhwamuko wevacuum ngokuvamile ihlanganisa izinyathelo ezinjengokuhlanza indawo engaphansi, ukulungiswa ngaphambi kokumbozwa, ukufakwa komhwamuko, ukucosha izingcezu, ukwelashwa kwangemva kokucwenga, ukuhlola, nemikhiqizo eqediwe.
(1) Ukuhlanza indawo engaphansi. Izindonga zegumbi le-vacuum, uhlaka lwe-substrate namanye amafutha angaphezulu, ukugqwala, izinto ezisele zokucwenga kulula ukuhwamuka ku-vacuum, okuthinta ngokuqondile ukuhlanzeka kongqimba lwefilimu namandla okubopha, kufanele kuhlanzwe ngaphambi kokucwenga.
(2) Ukulungiselela ngaphambi kokumboza. Ukumboza i-vacuum engenalutho ngezinga elifanele le-vacuum, i-substrate nezinto zokumboza zokwelashwa kwangaphambili. Ukushisa i-substrate, inhloso ukususa umswakama futhi kuthuthukiswe amandla okubopha isisekelo se-membrane. Ukushisisa i-substrate ngaphansi kwe-vacuum ephezulu kungaqeda igesi ekhangisiwe engaphezulu kwe-substrate, bese kuqeda igesi ngaphandle kwegumbi le-vacuum ngepompo ye-vacuum, esiza ekuthuthukiseni izinga le-vacuum yegumbi lokumboza, ukuhlanzeka kongqimba lwefilimu namandla okubopha isisekelo sefilimu. Ngemva kokufinyelela i-vacuum degree ethile, umthombo wokuqala wokuhwamuka ngamandla aphansi kagesi, ukushisa kwefilimu noma ukuncibilika kwangaphambili. Ukuze uvimbele ukuhwamuka ku-substrate, vala umthombo wokuhwamuka kanye nezinto zomthombo nge-baffle, bese ufaka amandla aphezulu kagesi, izinto zokumboza zishiswa ngokushesha ekushiseni kokuhwamuka, ukuhwamuka bese ususa i-baffle.
(3) Ukuhwamuka. Ngaphezu kwesiteji sokuhwamuka kokukhetha izinga lokushisa elifanele le-substrate, izinga lokushisa lokuhwamuka kwezinto ezibonakalayo ngaphandle kwe-deposition of air pressure nakho kuyipharamitha ebaluleke kakhulu. Ukubekwa kwengcindezi yegesi okuyivacuum yegumbi lokumboza, inquma isilinganiso samahhala samangqamuzana egesi ahamba endaweni yokuhwamuka kanye nebanga elithile lokuhwamuka ngaphansi komhwamuko nama-athomu egesi ayinsalela kanye nenani lokungqubuzana phakathi kwama-athomu omhwamuko.
(4) Ukuthulula. Ngemuva kokuqina kwesendlalelo sefilimu ukuze uhlangabezane nezidingo, vala umthombo wokuhwamuka nge-baffle futhi umise ukushisa, kodwa ungaqondisi umoya ngokushesha, isidingo sokuqhubeka nokupholisa ngaphansi kwezimo ze-vacuum isikhathi esithile ukuze uphole, ukuvimbela ukufakwa, ukufakwa okusele okusele kanye nokumelana, umthombo wokuhwamuka nokunye oxidized, bese umisa ukupompa, bese ukhipha i-vacuum ukuze uvule i-substrate.
-Le ndatshana ikhishwe nguumshini wokugcwalisa umshini we-vacuumr Guangdong Zhenhua
Isikhathi sokuthumela: Aug-23-2024