Ekumbozeni nge-vacuum, ukulawulwa kwezinga lokushisa akuyona nje ipharamitha - kuyisisekelo sekhwalithi yefilimu, ukunamathela, kanye nokuphindaphindeka. Kusukela ekushiseni kwe-substrate kuya ekupholiseni, zonke izigaba zejika lokushisa zithinta ngqo isakhiwo sefilimu, isimo sobuso, kanye nokusebenza kokukhanya noma komshini. Iphrofayili yokushisa elungiselelwe iqinisekisa izimo zokumboza ezizinzile, amazinga okubekwa ahambisanayo, kanye nesivuno somkhiqizo esithembekile.
1. Indima Yokushisa Ku-Isimbozo se-Vacuum
Ngesikhathi sokufakwa komusi ongokoqobo (i-PVD) noma ukufakwa komusi wamakhemikhali (i-CVD), izinga lokushisa lisebenza njengokuguquguquka kwenqubo ebalulekile okuthinta ukuhamba kwe-adatom, i-nucleation yefilimu, kanye ne-kinetics yokukhula.
Izinga lokushisa eliphansi kakhulu liholela ekusakazekeni okubi kobuso, okuholela ezakhiweni zekholomu, izikhala, noma imigodi.
Ngakolunye uhlangothi, izinga lokushisa elidlulele lingabangela ukucindezeleka kokushisa, ukuguqulwa kwe-substrate, noma ukuguqulwa kwesigaba okungafuneki.
Ngakho-ke, ukulawulwa kwejika lokushisa okunembile kuvumela onjiniyela ukulinganisela ubuningi befilimu, amandla okunamathela, kanye nezinga lokucindezeleka, okuqinisekisa ukusebenza kahle kokumboza okusebenzayo kanye nobuhle.
2. Izigaba Eziyinhloko Zokulawula Ijika Lokushisa
Ijika lokushisa eliphelele enqubweni yokumboza nge-vacuum livame ukufaka ukushisa kwangaphambili, ukushisa kokufaka, ukuzinzisa izinga lokushisa, kanye nokupholisa okulawulwayo.
(1) Ukushisa Okungaphansi Kwe-Substrate
Ngaphambi kokufakwa, ama-substrate ashiswa kancane kancane aze afike ezingeni lokushisa eliqondiwe ukuze asuse ukungcola okungaphezulu (njengama-molecule amanzi noma ama-hydrocarbon) futhi athuthukise ukunamathela kwefilimu. Lesi sigaba sidinga ukulawulwa kwesilinganiso sokushisa okufanayo ukuze kuvinjelwe ukushaqeka kokushisa noma ukwanda okungalingani.
(2) Ukuphathwa Kokushisa Kokufakwayo
Ngesikhathi sokwakheka kwefilimu, izinga lokushisa kumele lihlale lizinzile ngaphakathi kuka-±2–3°C we-setpoint. Ukuguquguquka kungashintsha indlela ekhululekile yama-athomu aphefumulayo futhi kushintshe i-stoichiometry yefilimu noma ama-optical constants. Ezinhlelweni ze-magnetron sputtering, impendulo yokushisa esebenzayo ngama-thermocouples noma izinzwa ze-infrared ivame ukuhlanganiswa nokulawulwa kwe-PID okuvaliwe ukuze kulawulwe ngokunembile.
(3) Ukulungiswa Kwejika Lokupholisa
Ukupholisa ngemva kokufakwa kwegesi kubaluleke ngokulinganayo. Ukupholisa okusheshayo kungaholela ekuqhekekeni kwefilimu noma ekucindezelekeni okusele, kuyilapho ukupholisa okuhamba kancane kusiza ukugcina ukuzinza kwe-lattice kanye nokunamathela. Ukupholisa okulawulwayo kunciphisa nezingozi ze-oxidation lapho kushintshelwa kusuka ku-vacuum kuya emkhathini ozungezile.
3. Amasu Okuphatha Ukushisa Okunembile
Ukuqinisekisa ukulawulwa okunembile kokushisa kuyo yonke inqubo, izinhlelo ezithuthukisiwe zihlanganisa amasu amaningi okuklama nokuqapha:
Ukushisa okunezindawo eziningi: Izindawo ezizimele zokushisa ziqinisekisa ukusatshalaliswa kokushisa okufanayo kwezindawo ezinkulu noma eziyinkimbinkimbi.
Izingibe zempendulo zesikhathi sangempela: Ukuqapha okuqhubekayo ngezinzwa ezifakiwe kwenza ukulungiswa kwamandla e-heater kube okuguquguqukayo.
Ukulinganisela kwemisebe nokuqhuba: Ukubekwa kwe-heater okulungiselelwe kunciphisa amazinga okushisa.
Ukulungiswa kwenqubo okusekelwe ekulingiseni: Ukumodela kwe-thermal kusiza ekuchazeni amazinga afanele okukhuphuka kanye nokwehla kweresiphi ngayinye yokumboza.
Ukulinganiswa kwezinto ezithile: Izinto ezahlukene ze-substrate—njengepulasitiki, ingilazi, noma izinto zobumba—zidinga amaphrofayili okushisa enziwe ngokwezifiso ngenxa yokuguquguquka kwazo kokushisa okuhlukile kanye nama-coefficients okwandisa.
4. Umthelela Ekhwalithini Yefilimu kanye Nesivuno Sokukhiqiza
Ijika lokushisa eliklanywe kahle lihumusha ngqo imiphumela yokumboza engcono kakhulu:
Ukunamathela kwefilimu okuthuthukisiwe ngokusakazwa okuthuthukisiwe kwesixhumi esibonakalayo.
Ukucindezeleka kwangaphakathi kanye nobuningi beziphambeko ezincishisiwe.
Ukubukeka okufanayo okubonakalayo noma okusansimbi kuzo zonke izinhlobo zejiyometri eziyinkimbinkimbi.
Izinga lokufakwa okuzinzile kanye nokuphindaphinda okuphezulu kwenqubo.
Kwezingxenye zezimoto, ezibonakalayo, neze-elekthronikhi, ukuphathwa kwezinga lokushisa okuqhubekayo kuqinisekisa ukuthi izembozo zihlangabezana nezindinganiso eziqinile zokusebenza nezokubonakala — kusukela ekukhanyeni kwesibuko kuya ekuqineni kwezembozo eziqinile.
5. Isiphetho
Ukulawulwa kwejika lokushisa kuyisisekelo esithule sazo zonke izinhlelo zokumboza nge-vacuum. Ngokwazi amandla okushisa — kunokuba nje kubekwe amazinga okushisa — onjiniyela bangafinyelela ikhwalithi ephezulu yefilimu, amazinga aphansi okukhubazeka, kanye nokuthembeka okukhulu kwenqubo.
Njengoba izinhlelo zokusebenza zokufaka i-vacuum zikhula kuzo zonke ingaphakathi lezimoto, amadivayisi okukhanya, kanye nokupakishwa kwe-semiconductor, ukulawulwa kwejika lokushisa okuhlakaniphile kuzoqhubeka nokuchaza umngcele phakathi kokufaka okuvamile namafilimu amancane aklanywe ngempela.
—Lesi sihloko sishicilelwe ngu imishini yokumboza nge-vacuumumenzi we-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Okthoba-09-2025