Kwi-vacuum coating, ulawulo lobushushu aluyonto nje iphambili - sisiseko somgangatho wefilimu, ukunamathela, kunye nokuphindaphinda. Ukusuka ekufudumaleni kwe-substrate ukuya ekupholiseni, inqanaba ngalinye le-curve yobushushu lichaphazela ngokuthe ngqo ulwakhiwo lwefilimu, imo yomphezulu, kunye nokusebenza kwe-optical okanye koomatshini. Iprofayili yobushushu ephuculiweyo iqinisekisa iimeko zokugquma ezizinzileyo, amazinga okufakwa rhoqo, kunye nemveliso ethembekileyo.
1. Indima yoBushushu kwiUkwaleka ngeVacuum
Ngexesha lokufakwa komphunga emzimbeni (i-PVD) okanye ukubekwa komphunga wekhemikhali (i-CVD), ubushushu busebenza njengenguqu ebalulekileyo yenkqubo echaphazela ukuhamba kwe-adatom, i-nucleation yefilimu, kunye ne-kinetics yokukhula.
Ubushushu obuphantsi kakhulu bukhokelela ekungasasazeki kakuhle komphezulu, nto leyo ebangela izakhiwo zekholamu, imingxunya, okanye imingxuma yephini.
Kwelinye icala, ubushushu obugqithisileyo bunokubangela uxinzelelo lobushushu, ukuguqulwa kwesiseko sendawo, okanye utshintsho olungafunekiyo lwesigaba.
Ngenxa yoko, ulawulo oluchanekileyo lwegophe lobushushu luvumela iinjineli ukuba zilinganisele uxinano lwefilimu, amandla okunamathela, kunye nenqanaba loxinzelelo, ukuqinisekisa ukusebenza kakuhle kombala kunye nobuhle.
2. Amanqanaba aPhambili oLawulo lweKhowudi yoBushushu
Ijika lobushushu elipheleleyo kwinkqubo yokugquma nge-vacuum lidla ngokuquka ukufudumeza kwangaphambili, ukufudumeza i-depozition, ukuzinzisa ubushushu, kunye nokupholisa okulawulwayo.
(1) Ukufudumeza i-substrate
Ngaphambi kokuba ibekwe, ii-substrates zifudunyezwa kancinci kancinci ukuya kubushushu obujoliswe kubo ukuze zisuse izinto ezingcolisayo kumphezulu (ezifana neemolekyuli zamanzi okanye iihydrocarbons) kwaye ziphucule ukunamathela kwefilimu. Eli nqanaba lifuna ulawulo olufanayo lwesantya sokufudumeza ukuthintela ukutsha okanye ukwanda okungalinganiyo.
(2) Ulawulo lobushushu bokufakwa
Ngexesha lokwenziwa kwefilimu, ubushushu kufuneka buhlale buzinzile ngaphakathi kwe-±2–3°C yendawo emiselweyo. Ukuguquguquka kunokutshintsha indlela ekhululekileyo ye-athomu ezivuthulukileyo kwaye kutshintshe i-stoichiometry yefilimu okanye ii-optical constants. Kwiinkqubo ze-magnetron sputtering, impendulo yobushushu esebenzayo nge-thermocouples okanye ii-infrared sensors zihlala zidityaniswa nolawulo lwe-PID oluvaliweyo ukuze kubekho ulawulo oluchanekileyo.
(3) Ukuphucula iKreyivu yokuPholisa
Ukupholisa emva kokufakwa kwe-oksijini kubaluleke ngokulinganayo. Ukupholisa ngokukhawuleza kunokukhokelela ekuqhekekeni kwefilimu okanye uxinzelelo olushiyekileyo, ngelixa ukupholisa kancinci kunceda ukugcina uzinzo lwe-lattice kunye nokunamathela. Ukupholisa okulawulwayo kunciphisa nemingcipheko ye-oxidation xa utshintshela kwi-vacuum ukuya kwi-ambient atmosphere.
3. Iindlela zoLawulo oluchanekileyo lobushushu
Ukuqinisekisa ulawulo oluchanekileyo lobushushu kuyo yonke inkqubo, iinkqubo eziphambili zidibanisa amaqhinga amaninzi oyilo kunye nokubeka esweni:
Ukufudumeza kwiindawo ezininzi: Iindawo ezizimeleyo zokufudumeza ziqinisekisa ukusasazwa kobushushu obufanayo kwiindawo ezinkulu okanye ezintsonkothileyo.
Iimpendulo zexesha langempela: Ukubeka iliso rhoqo ngokusebenzisa izinzwa ezifakwe ngaphakathi kwenza uhlengahlengiso oluguquguqukayo lwamandla e-heater.
Ukulinganisela okukhanyayo nokuqhuba: Ukubekwa kwe-heater elungiselelweyo kunciphisa ubushushu.
Ukulungiswa kwenkqubo ngokusekelwe kukulinganisa: Imodeli yobushushu inceda ekuchazeni amazinga afanelekileyo okunyuka nokunciphisa isantya kwiresiphi nganye yokugquma.
Ukulinganiswa kwezinto ezithile: Izinto ezahlukeneyo ze-substrate—ezifana neeplastiki, iglasi, okanye iiseramikhi—zifuna iiprofayili zokufudumeza ezenzelwe wena ngenxa yokuqhuba kwazo ubushushu okwahlukileyo kunye nee-coefficients zokwandisa.
4. Impembelelo kuMgangatho weFilimu kunye neNzuzo yeMveliso
Ijika lobushushu eliyilwe kakuhle liguqulela ngokuthe ngqo kwiziphumo zokugquma ezigqwesileyo:
Ukuqinisa ukunamathela kwefilimu ngokuphucula ukusasazeka kwe-interface.
Uxinzelelo lwangaphakathi olunciphileyo kunye noxinano lweziphene.
Inkangeleko efanayo ye-optical okanye ye-metallic kwiijiyometri ezintsonkothileyo.
Izinga lokugcinwa elizinzileyo kunye nokuphindaphinda okuphezulu kwenkqubo.
Kwizinto zemoto, ezibonakalayo, neze-elektroniki, ulawulo lobushushu oluqhubekayo luqinisekisa ukuba iingubo zihlangabezana nemigangatho engqongqo yokusebenza kunye neyokubonakalayo - ukusuka ekukhanyeni kwesipili ukuya ekuqineni kwengubo eqinileyo.
5. Isiphelo
Ulawulo lwegophe lobushushu lungundoqo ongathethiyo wenkqubo nganye yokugquma nge-vacuum. Ngokuziqhelanisa nokuguquguquka kobushushu — endaweni yokubeka nje amaqondo obushushu — iinjineli zinokufikelela kumgangatho ophezulu wefilimu, amazinga aphantsi eziphene, kunye nokuthembeka okukhulu kwenkqubo.
Njengoko usetyenziso lwe-vacuum coating lusanda kwiindawo zangaphakathi zeemoto, izixhobo ze-optical, kunye nokupakishwa kwe-semiconductor, ulawulo lwe-intelligence curve luya kuqhubeka nokuchaza umda phakathi kwe-coating eqhelekileyo kunye neefilimu ezincinci ezenziwe ngobuchule.
—Eli nqaku lipapashwe ngu izixhobo zokugquma nge-vacuumumenzi we-Zhenhua Vacuum
Ixesha leposi: Okthobha-09-2025