Njengoba ukukhiqiza kwanamuhla kuqhubeka nokudinga ukusebenza okuphezulu okuvela ezingxenyeni, ikakhulukazi lezo ezisebenza ngaphansi kwezimo ezimbi kakhulu njengokushisa okuphezulu, umfutho ophezulu, kanye nokungqubuzana okunamandla, ubuchwepheshe bokumboza buye baba yinto ebaluleke kakhulu. Ukusetshenziswa kwezimbozo eziqinile kudlala indima ebalulekile ekuthuthukiseni ukuqina kwamathuluzi, ukunemba komshini, kanye nokusebenza komkhiqizo jikelele. Ubuchwepheshe bokwelapha ubuso be-PVD (Physical Vapor Deposition) buhamba phambili ekusungulweni kwezinto ezintsha kulo mkhakha, buqhuba intuthuko kubuchwepheshe bokumboza.
Cha. 1 Iyini inqubo ye-PVD?
Inqubo ye-PVD ihilela ukusebenzisa izindlela ezibonakalayo ukuguqula izinto zokumboza kusuka esimweni esiqinile noma esiwuketshezi zibe isimo segesi, bese uzibeka phezu kwe-substrate ngokusebenzisa i-vapor deposition ukuze kwakheke i-coating efanayo, eqinile, nehlala isikhathi eside. Uma kuqhathaniswa ne-common chemical vapor deposition (CVD), izinzuzo eziyinhloko ze-PVD zisekukwazini kwayo ukufaka i-coating emazingeni okushisa aphansi, ukulawula ngokunembile ukujiya kwe-coating kanye nokwakheka kwayo, kanye nesimo sayo esinobungani nemvelo kanye nokonga amandla.
Izinzuzo ze-PVD Ezingcwecweni Eziqinile
Ngenxa yezinzuzo zayo eziyingqayizivele, ubuchwepheshe be-PVD buqashelwa kabanzi ekusetshenzisweni kwezimbozo eziqinile, ikakhulukazi ezindaweni ezidinga ubulukhuni obukhulu, ukumelana okuhle kakhulu nokuguguleka, kanye nokumelana nokugqwala okuphezulu. Izinzuzo ezibalulekile zenqubo ye-PVD zifaka:
1. Ukuqina Okuphezulu Kakhulu Nokumelana Nokugqokwa
Izembozo eziqinile ze-PVD zithuthukisa kakhulu ubulukhuni bezingxenye. Ngokubeka izinto ezifana ne-TiN (Titanium Nitride), i-TiAlN (Titanium Aluminium Nitride), kanye ne-CrN (Chromium Nitride), ubulukhuni bezembozo bungafinyelela ku-25GPa–63GPa noma ngaphezulu. Lezi zembozo eziqinile zithuthukisa ngempumelelo ukumelana nokuguguleka, zinciphise ukuguguleka kwendawo, zandise ukumelana nokushiswa kwe-oxidation, futhi zandisa impilo yenkonzo yamathuluzi, isikhunta, nezinye izingxenye.
2. Ukumelana Okuhle Kakhulu Nokushisa Okuphezulu
Izembozo ze-PVD zibonisa ukumelana okuvelele kokushisa okuphezulu, okwenza zibe zilungele izingxenye ezibhekene namazinga okushisa aphezulu kanye nokungqubuzana okuphezulu noma ukugqwala kwamakhemikhali. Isibonelo, izembozo ze-TiAlN azigcini nje ngokuhlinzeka ngokuqina okungavamile kodwa futhi zigcina ukuqina kwesakhiwo emazingeni okushisa aphezulu, okwenza zisetshenziswe kabanzi ekusikeni amathuluzi kanye nezikhunta zezicelo zomshini wokushisa okuphezulu.
3. I-Coefficient Ephansi Yokungqubuzana Kokusebenza Kahle Komshini Okuthuthukisiwe
Izembozo ze-PVD zisiza ekufinyeleleni ama-coefficient okungqubuzana aphansi kakhulu, zinciphisa ukungqubuzana kwezinto kanye nokuguguleka, okuthuthukisa ukusebenza kahle komshini kanye nekhwalithi yendawo. Lokhu kuzuzisa kakhulu ekucubunguleni okunembile kanye nezinqubo zokusika ngesivinini esikhulu.
4. Inobungani Nemvelo Futhi Isebenza Kakhulu
Uma kuqhathaniswa namasu okumboza endabuko, inqubo ye-PVD ayidingi amakhemikhali amaningi ayingozi, okwenza kube ubuchwepheshe obunobungani nemvelo. Ngaphezu kwalokho, imishini yokumboza ye-PVD isebenza kahle kakhulu, okwenza kube lula ukubekwa ngokushesha ukuhlangabezana nezidingo zokukhiqiza ezinkulu.
Inombolo 3 Izinkambu Zokusetshenziswa Ze-PVD Hard Coating
Imishini ye-PVD Hard Coating yokugqoka okuqinile isetshenziswa kabanzi ezimbonini ezidinga ukusebenza okuphezulu kakhulu. Ezinye izindawo ezibalulekile zokusetshenziswa zifaka:
1. Amathuluzi Okusika Nezikhunta
Ekwenziweni kwamathuluzi nesikhunta, ikakhulukazi amathuluzi okusika abhekene nokushisa okuphezulu kanye nokungqubuzana, izembozo ze-PVD zithuthukisa kakhulu ukumelana nokuguguleka, ukumelana nokugqwala, kanye nobunzima. Izembozo ze-TiN zivame ukusetshenziswa ekuphenduleni amathuluzi, ekusikeni kokugaya, kanye nasekubholeni, kuyilapho izembozo ze-TiAlN zisetshenziswa kakhulu ezinsizeni zokusika ezisheshayo, okuthuthukisa kakhulu ukusebenza kahle kokusika amathuluzi kanye nempilo yesevisi.
2. Izingxenye Zezimoto
Ezingxenyeni zenjini yezimoto ezifana namasilinda, ama-piston, nama-valve, izembozo eziqinile ze-PVD zinikeza ukumelana okuhle kakhulu nokushisa okuphezulu kanye nokumelana nokuguguleka, kunciphisa ngempumelelo ukungqubuzana, kwandise isikhathi sokuphila kwezingxenye, futhi kuthuthukise ukusebenza kwemoto iyonke.
4. Ukwethulwa Kwemishini Yokumboza Eqinile ye-Zhenhua FMA0605 PVD
Izinzuzo Zemishini
Ukuhlunga okusebenzayo kwama-arc macro-particles; izembozo ze-Ta-C zinikeza kokubili ukusebenza kahle okuphezulu kanye nokusebenza okuphezulu.
Ifinyelela ubulukhuni obuphezulu kakhulu, izembozo eziqinile ezingamelana nokushisa okuphezulu, i-coefficient ephansi yokungqubuzana, kanye nokumelana nokugqwala okuhle kakhulu. Ubulukhuni obumaphakathi bufika ku-25GPa–63GPa.
I-cathode isebenzisa ubuchwepheshe obunama-drive amabili obuhlanganisa ikhoyili ebekwe ngaphambili kanye nokufakwa kwe-magnet okuhlala njalo, okusebenza kanye nohlelo lokusika ama-ion kanye ne-fixture enama-angle amaningi enama-three-dimensional ukuze kufezwe ukufakwa okuphumelelayo.
Ifakwe i-arc cathodic enkulu enobubanzi, eqinisekisa izakhiwo ezinhle zokupholisa ngaphansi kwezimo zamanje eziphezulu. Ijubane lokunyakaza kwe-arc spot liyashesha, izinga le-ionization liphezulu, futhi izinga lokufakwa liyashesha. Lokhu kwenza ukufakwa kwezembozo ezixineneyo nezibushelelezi kube nokumelana okuphezulu kwe-oxidation kanye nokusebenza kahle kokushisa okuphezulu.
Ububanzi Bokusetshenziswa:
Imishini ingabeka i-AlTiN, i-AlCrN, i-TiCrAlN, i-TiAlSiN, i-CrN, nezinye izembozo eziqinile ezingamelani nokushisa okuphezulu, ezisetshenziswe kabanzi ezikhumbeni, amathuluzi okusika, izibhakela, izingxenye zezimoto, ama-piston, neminye imikhiqizo.
— Lesi sihloko sikhishwe yi-Imishini yokubopha eqinile ye-PVDI-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Feb-20-2025