Intangiriro y'ikoranabuhanga ryo gusiga irangi ry'ingufu

1. Ihame ry'ikoranabuhanga ryo gusiga irangi ry'iyoni idafite umwuka
Hakoreshejwe ikoranabuhanga ryo gusohora umwuka mu cyumba cy’ubusamo, urumuri rw’umusamo rukorerwa ku buso bw’ibikoresho bya cathode, bigatuma atome na iyoni bikora ku bikoresho bya cathode. Mu gihe cy’amashanyarazi, atome na iyoni bitera hejuru y’igikoresho nk’umusamo ku muvuduko mwinshi. Muri icyo gihe, umwuka w’ubusamo winjizwa mu cyumba cy’ubusamo, maze urwego rwo gutwikira rufite imiterere myiza rukorwa ku buso bw’igikoresho.
2. Ibiranga irangi rya ion idafite umwuka
(1) Kuba urwego rwo gusiga rufite ubushobozi bwo gufatana neza, urwego rwa filime ntirworoshye kugwa.
(2) Gupfuka neza no gutwikira neza ubuso.
(3) Ubwiza bwiza bw'urwego rwo gusiga.
(4) Igipimo cyo hejuru cyo gushyiramo filime no kuyikora vuba.
(5) Ubwoko bwinshi bw'ibikoresho bya substrate n'ibikoresho bya filime bikwiye byo gusiga

Ibikoresho binini byo gusiga irangi birwanya intoki bya magnetron bifite umurambararo munini

Imashini ikingira magnetron ikoresha ikoranabuhanga rikoreshwa mu gukwirakwiza magnetron ikoresheje ikoranabuhanga riciriritse rikoresha magnetron ikoresha frequency iri hagati, multi-arc ion na AF, rikoreshwa cyane mu nganda z'ibikoresho, ibikoresho byo ku meza, icyuma gikozwe muri titanium, sinki y'icyuma gikozwe muri stainless steel n'ibikoresho binini byo gutunganya icyuma gikozwe muri stainless steel. Ifite uburyo bwo gufata neza, gusubiramo, ubucucike n'uburyo filime ingana, umusaruro mwinshi n'umusaruro mwinshi.