1. Mfundo ya ukadaulo wopaka utoto wa ion
Pogwiritsa ntchito ukadaulo wotulutsa mpweya wa vacuum arc mu chipinda chopanda mpweya, kuwala kwa mpweya kumapangidwa pamwamba pa zinthu za cathode, zomwe zimapangitsa kuti maatomu ndi ma ayoni apangidwe pa zinthu za cathode. Pogwiritsa ntchito mphamvu yamagetsi, ma atomu ndi ma ayoni amaphulika pamwamba pa chinthu chogwirira ntchito ngati anode pa liwiro lalikulu. Nthawi yomweyo, mpweya wochitapo kanthu umalowetsedwa mu chipinda chopanda mpweya, ndipo wosanjikiza wokutira wokhala ndi makhalidwe abwino kwambiri umapangidwa pamwamba pa chinthu chogwirira ntchito.
2. Makhalidwe a vacuum ion ❖ kuyanika
(1) Kumatirira bwino kwa wosanjikiza wokutira, wosanjikiza wa filimuyo sikophweka kugwa.
(2) Kuphimba bwino komanso kuphimba bwino pamwamba.
(3) Ubwino wa wosanjikiza wokutira.
(4) Kuchuluka kwa mafuta opangidwa komanso kupanga filimu mwachangu.
(5) Zipangizo zosiyanasiyana zoyenera za substrate ndi filimu yopangira utoto
Zipangizo zazikulu zophikira zotsutsana ndi zala za magnetron zokhala ndi mipanda yambiri
Makina ophikira a magnetron oletsa zizindikiro za chala amagwiritsa ntchito kuphatikiza kwa magnetron sputtering yapakatikati, ma ion ambiri a arc ndi ukadaulo wa AF, womwe umagwiritsidwa ntchito kwambiri m'makampani opanga zida zamagetsi, zida za patebulo, mbale yachitsulo chosapanga dzimbiri ya titaniyamu, sinki yachitsulo chosapanga dzimbiri ndi kukonza mbale yayikulu yachitsulo chosapanga dzimbiri. Ili ndi kumatirira kwabwino, kubwerezabwereza, kuchulukana komanso kufanana kwa wosanjikiza wa filimuyo, kutulutsa kwakukulu komanso zokolola zambiri.
Nthawi yotumizira: Meyi-31-2024
