1. Lub hauv paus ntsiab lus ntawm cov txheej txheem nqus tsev ion
Siv cov thev naus laus zis nqus tsev arc hauv lub chamber nqus tsev, lub teeb arc raug tsim rau ntawm qhov chaw ntawm cov khoom cathode, ua rau cov atoms thiab ions tsim rau ntawm cov khoom cathode. Nyob rau hauv qhov kev ua ntawm lub zog hluav taws xob, cov atom thiab ion beams bombard qhov chaw ntawm cov workpiece ua lub anode ntawm qhov ceev ceev. Tib lub sijhawm, cov roj reaction raug coj mus rau hauv lub chamber nqus tsev, thiab ib txheej txheej nrog cov khoom zoo heev raug tsim rau ntawm qhov chaw ntawm cov workpiece.
2. Cov yam ntxwv ntawm lub tshuab nqus tsev ion txheej
(1) Kev nplaum zoo ntawm txheej txheej, txheej zaj duab xis tsis yooj yim poob tawm.
(2) Zoo qhwv ib puag ncig txheej thiab txhim kho qhov chaw npog.
(3) Zoo zoo ntawm txheej txheej.
(4) Tus nqi tso tawm siab thiab tsim cov yeeb yaj kiab sai.
(5) Ntau yam khoom siv substrate thiab cov ntaub ntawv zaj duab xis rau txheej
Cov khoom siv txheej txheem loj loj uas muaj ntau lub arc magnetron tiv thaiv kev ntiv tes
Lub tshuab txheej txheem magnetron sputtering tiv thaiv ntiv tes siv kev sib xyaw ua ke ntawm cov zaus nruab nrab magnetron sputtering, ntau-arc ion thiab AF thev naus laus zis, uas yog siv dav hauv kev lag luam kho vajtse, kho vajtse rooj tog, titanium stainless hlau phaj, stainless hlau dab dej thiab cov hlau stainless hlau loj ua cov phaj. Nws muaj kev nplaum zoo, rov ua dua, qhov ceev thiab kev sib xws ntawm cov txheej zaj duab xis, cov zis siab thiab cov khoom lag luam siab.
Lub sijhawm tshaj tawm: Tsib Hlis-31-2024