1. Ụkpụrụ nke teknụzụ mkpuchi ion vacuum
Site na iji teknụzụ mwepụ vacuum arc n'ime ụlọ vacuum, a na-emepụta ìhè arc n'elu ihe cathode ahụ, na-eme ka atọm na ion dị n'elu ihe cathode ahụ. N'okpuru ọrụ nke ubi eletriki, oghere atọm na ion na-efegharị elu nke ihe ọrụ ahụ dị ka anode n'ọsọ dị elu. N'otu oge ahụ, a na-ewebata gas mmeghachi omume n'ime ụlọ vacuum ahụ, a na-akpụkwa oyi akwa mkpuchi nwere ihe onwunwe dị mma n'elu ihe ọrụ ahụ.
2. Àgwà nke mkpuchi ion ikuku
(1) Ezigbo njikọta nke oyi akwa mkpuchi ahụ, oyi akwa ihe nkiri ahụ adịghị mfe ịda.
(2) Mkpuchi dị mma na mkpuchi elu ka mma.
(3) Ezigbo mma nke oyi akwa mkpuchi.
(4) Oke ọnụego itinye ego na nhazi ihe nkiri ngwa ngwa.
(5) Oke ihe dị iche iche nke ihe ndị e ji ihe nkiri mee na ihe ndị e ji kpuchie ihe dị iche iche
Ngwa mkpuchi mgbochi mkpịsị aka magnetron nke nwere ọtụtụ arc dị iche iche
Igwe mkpuchi magnetron sputtering na-egbochi mkpịsị aka na-anabata ngwakọta nke magnetron sputtering ugboro ole na ole, multi-arc ion na AF, nke a na-ejikarị eme ihe n'ụlọ ọrụ ngwaike, ngwaike tebụl, efere ígwè anaghị agba nchara titanium, sink ígwè anaghị agba nchara na nnukwu nhazi efere ígwè anaghị agba nchara. Ọ nwere ezigbo nrapado, imeghachi omume, njupụta na otu oyi akwa ihe nkiri ahụ, mmepụta dị elu na mmepụta ngwaahịa dị elu
Oge ozi: Mee-31-2024