I te mea kei te whakaiti haere tonu ngā taputapu haurua-ira me te whakauru atu i ngā mahi maha atu, ka tūtaki ngā hangarau tākai ki ngā wero onge. Kua puta ake te paninga korehau hei tukanga matua hei whakahohe i roto i te tākai haurua-ira matatau, e whakarite ana i te whakaitiiti o te taputapu, te mahi teitei ake, me te pono mo te wa roa. Mā te whakamahi i ngā tikanga hangarau kiriata angiangi pēnei i te whakatakotoranga kohu tinana (PVD), te whakatakotoranga kohu matū (CVD), me te whakatakotoranga paparanga ngota (ALD), ka taea e ngā kaihanga te whakatutuki i ngā tono nui mō te tiaki arai, te mahi hiko, me te whakahaere wera i roto i ngā maramara o te whakatupuranga e whai ake nei.
Ngā Wero Noa i roto i te Tākai Ārahi-Haumaru
Tākai hiko-hauruaehara i te mea he taahiraa tiaki noa iho engari he wāhanga tino nui e aro nui ana ki te mahi. Ko ngā wero noa ko:
Te Tomokanga o te Makuku me te Hāora
He tino tairongo ngā taputapu kua kapi ki te pānga o te taiao. Ahakoa he iti noa te makuku, te horapa hāora rānei, ka taea e rātou te arahi ki te waikura, te hekenga o te konganuku, te pirau hiko rānei.
Te Pono o te Papa Ārai
Kāore i te rawaka ngā āhuatanga ārai o ngā takai polymer tuku iho. Ki te kore he paninga kiriata angiangi pakari, ka ngāwari te pakaru o te pono o ngā maramara i ngā āhuatanga haumākū teitei, pāmahana teitei rānei.
Te Hekenga Hiko me te Pūmautanga Hononga
Ka tere ake te hekenga hiko i ngā pūnga matatau nā te nui o te iahiko. Ka taea e te piripono ngoikore, te kore rānei o te ōrite o ngā paninga te whakararu i te roanga o te hononga.
Ngā Herenga Whakamarara Wera
I te pikinga ake o te kaha o te taputapu, ka taea e ngā paninga whakahaere wera koretake te arahi ki ngā wāhi wera ā-rohe, te hekenga o te mahi, me te whakapoto i te roanga o te ora o te taputapu.
Te Whakaiti me te Tauwehenga Āhuatanga
Ko ngā hanganga tākai matatau pērā i ngā Through-Silicon Vias (TSV) me ngā Through-Glass Vias (TGV) e hiahia ana kia pania ngā paninga conformal i roto i ngā awaawa me ngā vias ōwehenga teitei, ā, koinei tonu te arai hangarau matua.
Ngā Otinga Paninga Korehau
1. Ngā Paninga Ārai Makuku/Hauora
Ko ngā kiriata angiangi SiO₂, SiNₓ, me Al₂O₃ i whakatakotoria mā te PVD, ALD rānei, ka mahi hei paparanga whakakī ā-hiri, ka whakaiti nui i te tere tuku mamaoa wai (WVTR).
Mā ngā puranga arai maha-apa e whakakotahi ana i ngā paparanga kore-waro me ngā paparanga ranu ka tutuki te pono teitei, he mea nui mō ngā kōwae RF me ngā takai MEMS.
2. Ngā Papa Whakatairanga-Pīpiri me ngā Papa Atanga
Ka whakarei ake ngā paparanga piri o te Ti, Cr, TiN rānei i te kaha o te here i waenga i ngā paparanga whakarewa me ngā dielectrics, ka ārai i te wehewehe i te wā e huri ana te wera.
Ka whakapai ake ngā maimoatanga mata parāma i te mākū me te hanganga kiriata i runga i ngā papa iti-pūngao mata.
3. Ngā Paparanga Whakakore i te Horapa me te Hekenga Hiko
Ko ngā paparanga ārai Ta, TaN, me Ru i whakatakotoria mā te magnetron sputtering ka mahi hei arai tohatoha whai hua i roto i ngā hononga Cu.
Ka whakaitihia e ēnei paparanga te hekenga hiko, ka tiakina te kawe hiko hononga i raro i te ahotea iahiko teitei.
4. Ngā Paninga Whakahaere Wera
Ka whakarei ake te mararatanga wera e ngā paninga kawe wera teitei pērā i te waro rite-taimana (DLC) me ngā kiriata AlN.
Mā ngā paninga kua whakaritea ka taea te whakauru ki ngā kōwae haurua hiko, ngā taputapu SiC/GaN, me ngā maramara rorohiko mahi-teitei (HPC).
5. Ngā Paninga Āhua-rite mō ngā Hanganga Āhua-teitei
Mā te ALD e whakarato te mana whakahaere taumata-atomika, e whakarite ana i ngā kiriata āhua rite me te kore-pū i roto i ngā TSV me ngā TGV me ngā ōwehenga āhuatanga neke atu i te 10:1.
He mea tino nui tēnei mō te takai IC 3D, ina pā tika te mātotoru me te pono o te hononga ki te hua.
Ngā Tono Take
Mōkihi MEMS: Mā te whakakī angiangi me ngā puranga Al₂O₃/SiNₓ ka pai ake te mau, ka roa ake te roa o te wā e mau ai te taputapu i roto i ngā taiao motuka me ngā taiao ahumahi.
Ngā Kōwae Mua RF: Ka whakaitihia e ngā paninga ārai maha-apa te kaha pirinoa me te nekehanga mahi i puta mai i te makuku.
Hikohiko Mana: Ka whakarei ake ngā paninga horapa wera DLC i te mararatanga wera i roto i ngā MOSFET e hangai ana ki te SiC, ka taea ai te whakapai ake i te pai o te mahi.
Whakaurunga 3D: Mā ngā paninga ALD ōrite i roto i te TSV/TGV ka pono te whakamarumaru me te whakarewa mō ngā taputapu mahara whānui-rahi (HBM).
Ngā Painga o te Paninga Korehau i roto i te Tākai
Teitei o te Pono: Mā te pai o te mahi ārai me te piri ka pumau te pūrere mō te wā roa.
Te Āhua Tauine: Ka tautokohia e ngā pūnaha whakatakotoranga korehau te takai taumata-wafer (WLP) me te takai taumata-panel (PLP), ka taea ai te whakaputa papatipu utu-pai.
Ngāwari o te Tukanga: Hototahi ki ngā rauemi kanorau (Si, GaAs, SiC, karāhe, polymers), e tutuki ai ngā hiahia whakaurunga kanorau.
Te Whakatutukitanga Taiao: Ka whakakore i ngā tukanga mākū e tino poke ana, pērā i te whakakikorua hiko, kia rite ki ngā paerewa hanga matomato.
Whakamutunga
Kua noho te paninga korehau hei tūāpapa mō te takai haurua-ā-ira matatau, e aro ana ki ngā wero o te tiaki ārai, te whakahaere wera, me te uhi ōwehenga-teitei. I te nekehanga o te umanga ki te whakaurunga kanorau, ngā hoahoa maramara, me te whakarārangi 3D, ka kaha ake te hiahia mō te whakatakotoranga kiriata angiangi tika.
Mā te auahatanga tonu i roto i ngā papaaho paninga PVD, ALD, me ngā papaaho ranu, ehara i te mea kei te whakarei ake i te pono anake ngā otinga paninga korehau engari kei te whakahohe kaha hoki i te heke mai o ngā takai haurua-ira.
—I whakaputaina tēnei tuhinga etaputapu paninga korehaukaihanga Zhenhua Vacuum
Wā tuku: Hepetema-27-2025