Tsarin shigar da tururi gabaɗaya ya haɗa da matakai kamar tsabtace ƙasa, shirye-shiryen kafin shafa, ajiyar tururi, ɗaukar guda, jiyya bayan-plating, gwaji, da ƙãre kayayyakin.
(1) Substrate tsaftacewa. Vacuum jam'i ganuwar, substrate frame da sauran surface mai, tsatsa, saura plating abu ne mai sauki ƙafe a cikin wani injin, kai tsaye shafi da tsarki na fim Layer da bonding karfi, dole ne a tsabtace kafin plating.
(2) Shiri kafin shafa. Shafi fanko fanko zuwa dace injin digiri, da substrate da shafi kayan for pretreatment. Dumama da substrate, manufar shi ne don cire danshi da kuma inganta membrane tushe bonding karfi. Dumama da substrate karkashin babban injin iya desorb da adsorbed gas a saman na substrate, sa'an nan sharar da iskar gas daga cikin dakin dakin da injin famfo, wanda shi ne conducive don inganta injin digiri na shafi dakin, da tsarki na fim Layer da bonding karfi na fim tushe. Bayan kai wani matakin injin, tushen ƙawancen farko tare da ƙaramin ƙarfin wutar lantarki, preheating na fim ko pre-narkewa. Don hana evaporation zuwa substrate, rufe tushen evaporation da kayan tushe tare da baffle, sa'an nan kuma shigar da wutar lantarki mafi girma, kayan shafa yana da sauri mai tsanani zuwa zafin jiki na evaporation, evaporation sannan kuma cire baffle.
(3) Haushi. Baya ga matakin evaporation don zaɓar madaidaicin zafin jiki mai dacewa, sanya yanayin ƙawancen abu a waje da matsi na iska shima muhimmin ma'auni ne. Deposition na gas matsa lamba wanda shi ne shafi dakin injin, kayyade matsakaicin free kewayon gas kwayoyin motsi a cikin evaporation sarari da wani takamaiman evaporation a karkashin tururi da saura gas atom da adadin karo tsakanin tururi atom.
(4) Ana saukewa. Bayan kauri daga cikin fim Layer saduwa da bukatun, rufe evaporation tushen tare da baffle da kuma dakatar da dumama, amma kada nan da nan shiryar da iska, da bukatar ci gaba da kwantar a karkashin injin yanayi na wani lokaci zuwa kwantar da hankali, don hana plating, saura plating abu da kuma juriya, evaporation tushen da sauransu a kan oxidized, sa'an nan kuma daina yin famfo, sa'an nan kuma kumbura, bude dakin substrate a cikin dakin substrate.
–Wannan labarin ya fito dagainjin shafa injin ƙiraGuangdong Zhenhua
Lokacin aikawa: Agusta-23-2024