In izinqubo zokumboza i-vacuum ezithuthukisiwe, ukulawulwa okunembile kokwakheka kwefilimu encane kubalulekile ekufezeni izakhiwo ezifiselekayo zokukhanya, zemishini, nezokusebenza. Ukushintshana kwe-Multi-target, inqubo esetshenziswa kabanzi ku-PVD, i-magnetron sputtering, kanye nezinhlelo zokufaka ezisizwa yi-ion, kudlala indima ebalulekile kulo mongo ngokuvumela ukulungiswa okuguquguqukayo kokuguquguquka kwezinto kanye nokwakheka ngesikhathi sokufakwa. Leli khono libaluleke kakhulu ezimbozweni eziyinkimbinkimbi ze-multilayer, amafilimu ane-graded-index, noma izakhiwo ezihlanganisiwe lapho i-stoichiometry kanye nokufana kuthinta ngqo ukusebenza kwefilimu.
Ukushintshana kwe-multi-target kuvumela ukusetshenziswa okulandelanayo noma ngesikhathi esisodwa kwe-target ezahlukene ngaphandle kokuphazamisa inqubo yokufaka, kugcinwa izimo ze-plasma eziqhubekayo ngenkathi kuvumela ukulawulwa okunembile kwezilinganiso zezinto eziyisisekelo. Ngokulungisa amazinga wamandla, isikhathi sokuphonsa, kanye nokuvezwa kwe-target, opharetha bangakwazi ukulungisa kahle ukwakheka kwesendlalelo ngasinye esibekiwe, baqinisekise ukuthi izinkomba zokubuyisa, ama-coefficients okuphela, noma ugesi oqhubayo uhlangabezana nemininingwane yomklamo. Ezinqubweni zokuphonsa ezisabelayo, ukumiswa kwe-multi-target kwenza kube lula ukufakwa kwezingxenye zensimbi ne-oxide ngesikhathi esisodwa ngenkathi kulawulwa ukucindezela kwe-oxygen noma i-nitrogen okuyingxenye, kunciphisa ingozi yobuthi be-target noma ukwakheka kwesigaba okungafuneki.
Ngaphezu kwalokho, ukushintshaniswa kwe-multi-target kuthuthukisa ukuguquguquka kwenqubo kanye nokuphindaphinda. Kunciphisa isidingo sokufaka umoya ekamelweni njalo noma ukushintshaniswa kwe-target ngesandla, ngaleyo ndlela kugcinwa izimo ze-vacuum ezizinzile kanye namapharamitha e-plasma ahambisanayo. Lokhu kuzinza kubalulekile ekufinyeleleni amazinga okufakwa okufanayo, isakhiwo esincane sefilimu exinene, kanye nokwakheka kwesici okuncishisiwe, konke okubalulekile ekumbozweni kwe-optical okusebenza kahle kakhulu, izitaki eziningi eziphikisana nokukhanya noma ezibonisa ukukhanya okuphezulu, kanye namafilimu amancane asebenzayo kuma-photonics noma kumadivayisi wamandla.
Ngaphezu kwalokho, ukuhlanganisa amathuluzi okuqapha angaphakathi njenge-optical emission spectroscopy, i-quartz crystal microbalances (QCM), noma ukuxilongwa kwe-plasma ngokushintshwa kwe-multi-target kwenza kube lula ukulawula impendulo yesikhathi sangempela yokwakheka. Ukulungiswa kungenziwa ngokuguquguqukayo ukuze kulungiswe ukuguguleka kwe-target, ukushintshashintsha kwesivuno se-sputtering, noma ukushintshashintsha okuncane kwengcindezi yegumbi kanye nokuqukethwe kwegesi okusele, ukuqinisekisa i-stoichiometry ehambisanayo kuzo zonke izindawo ezinkulu noma ukugijima kokukhiqiza okweluliwe.
Ngamafuphi, ukushintshaniswa kwe-multi-target kuyindlela eyisisekelo yokulawula ukwakheka kwefilimu encane enembile kubuchwepheshe besimanje bokumboza nge-vacuum. Ngokunikeza ukulawula okuguquguqukayo kokuguquguquka kwezinto, ukugcina izimo ze-plasma eziqhubekayo, nokuhlanganiswa nokuxilongwa okuthuthukile kwe-in-situ, kuqinisekisa ukuthi amafilimu amaningi, ahlanganisiwe, noma ahlelwe ngezigaba afinyelela izakhiwo zawo eziklanywe kahle zokukhanya, zikagesi, nezemishini. Leli khono libalulekile ekumbozweni okunembe kakhulu okusetshenziswa kuma-optics, ama-photonics, amadivayisi wamandla, nakwezinye izinhlelo zokusebenza zezimboni ezithuthukile.
-Lesi sihloko sishicilelwe nguumenzi wemishini yokumboza nge-vacuum I-Zhenhua Vacuum
Isikhathi sokuthunyelwe: Mashi-19-2026